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(chattering) (1) Correct the wiring (2) Correct the wiring conditions (reduce the tensile force and increase the bending radius). 19 (1) Check the power supply wiring. Incorrect wiring or broken lead wire (2) Check if there is bending stress applied to any parts of the lead wire.

Dimensions [mm] Model L A B n D E G LEKFS40mm-200m 453.4 206 378 6 2 300 280 LEKFS40mm-300m 553.4 306 478 6 2 300 280 LEKFS40mm-400m 653.4 406 578 8 3 450 430 LEKFS40mm-500m 753.4 506 678 10 4 600 580 LEKFS40mm-600m 853.4 606 778 10 4 600 580 19 Electric Actuator High Rigidity and High Precision Slider Type Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03

Normal mode 16 5.1 Summary of Normal mode 16 5.2 Menu 19 5.3 Window of Normal mode 21 5.3.1 Status window 21 5.3.2 Teaching window 23 5.3.3 Alarm window 24 5.3.4 Step data window 25 5.3.5. Parameter window 26 5.3.6 Drive test window 27 5.4 Teaching method 28 5.4.1 Preparation 28 5.4.2.

6 7 8 9 10 11 2 5/5 12 13 14 15 16 17 18 A: Creating a new chart by changing specifications Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved 19

OFF point = B + 16-2-42 19 Series ZSE 50 60F/ISE 50 60 High Precision, Digital Pressure Switch for General Fluids Setting (Common to ZSE50F/ISE50 and ZSE60F/ISE60) Key lock function Can prevent incorrect operation of operation buttons on the switch front. Key lock start Key lock cancel ZSE ISE SET SET PSE Press the SET button to complete calibration.

160) 7,05 7.80 (179) (1S8)8.54 lz7) 9.29 (236) 10.04 (255) 10.79 11.54 Q74) (23) 12.28 (312) 13.03 (3s1) 13.78 (350) 14.53 15.28 (36e) (388) @ NVZ5000 TApe 40 Manifokl,/ Bottom Ported inch (mm) Grommet (G) (H) Example pneumatic circuit diagram L type plug connector (L) M type plug connector (M) I : With indicator liqht and surge voltage suppressor n) 2 3 4 5 6 1 6 9 1 0 11 12 13 l4 16 18 19

T 22 8 P A R I R Y 12 G DA R I 25 11 6 6 29 Side A Side B 41 727 Series MRHQ Dimensions MRHQ20 A 48 59 B 78 38.5 4 x M6 x 1 depth 10 51 0 0.074 54h9 26.3 opened +2.2 0.2 8 0 0.1 0 0.05 10 M5 x 0.8 Finger closing port 16.3 closed 0 0.7 4 x M4 x 0.7 (attachment mounting screw ) 5 24.5 20 9 Max. 9.2 51 4 x M6 x 1 depth 9 (two on opposite side) M5 x 0.8 Finger opening port 24 3.4 62 16.5 27 19

No.EX-OMP0025-A PRODUCT NAME SI unit for AS-Interface MODEL / Series / Product Number EX250-SAS# Table of Contents Safety Instructions 2 Product Outline 8 Model Indication and How to Order 9 Summary of Product elements 9 Mounting and Installation 10 Installation 10 Wiring 11 Setting 14 Indication 16 Connection between SI unit output and the solenoid valve 17 Data bit 18 Maintenance 19 Troubleshooting

Lube Unit ALDU600-l06 to 10, ALDU900-l12 to 20 A B C D E F G H J K L M N P Q R S Model Port size 3/4 283 296 424 424 476 67 77 85 90 100 43 10 57 51 16 ALDU600-l06 ALDU600-l10 ALDU900-l12 ALDU900-l14 ALDU900-l20 135 345 460 145 90 150 480 20 430 470 175 87.5 30 62.5 1 1/4 1/2 615 615 682 419.2 209 1 1 1 250 125 33.2 33.2 710 670 20 700 230 120 222 1.17-19 Booster Lube Series ALB900 Standard

9 14 Bottom piping adapter PBT 15 O-ring HNBR Fluoro coating 16 Flow adjustment valve body PBT 17 Body Brass Electroless nickel plating 18 Needle Brass Electroless nickel plating 19 O-ring HNBR Fluoro coating 20 O-ring HNBR Fluoro coating @0 PFMB7501/7102 Component Parts !2 !1 !0oi q w e r t y u i !1 !2 No.

7 Piping (bottom) 14 POM y O-ring O-ring Parallel pin 15 16 17 18 19 NBR NBR Stainless steel Stainless steel Stainless steel !9 !8 !3 Cross recessed round head screw Hexagon nut Note) Grease is used on rubber and sliding sections.

Confirm there is no rattle on the pulley cover. 19 Electric Actuator/Maintenance Guide 4 Be sure to read before handling. Motor/Belt Mounting The tightening torque of bolt indicated in the procedure is that recommended by P/A. The tightening torque, however, must be conformed to other standards if the customer provides any.

Ksl P T 0.17 in (4.4 mm) or. 0.08 in (2.0 mm) T.T O 25 in 18.4 mm\ '7s PSIG (s Ksqqlq1 tu.F. 3.31 lbs (1.5 Ks) T f 40" '75 PSIG (5 Kgf/cm2) ' May be rotated without changing porl localion A B c D E F u H K M N A B D E F G H 't 28 (32 5' oot t l 5 o 1 2 t3l 0.80 (20 4 1 5 4 l39l 1 (321 1 4 2 (36t l m 30 5' o24 (6) 6.65 168 9) 487 (123 7l 1.57 (40) 1 7 8 (45 2l 0.87 e2l o.22 (5.5) 0 7 5 (19

Setting Software Functions . 9 4.1 Various windows . 9 (1) Main window . 9 (2) Status window . 16 (3) Teaching window . 19 (4) Parameter window . 22 (5) Step Data window . 23 (7) Test Drive window . 26 4.2.

No.PF-OMO0005-F PRODUCT NAME Digital Flow Switch MODEL / Series / Product Number PFMB7201 Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 13 Definition and terminology 14 Mounting and Installation 16 Installation 16 Piping 19 Wiring 21 Outline of Settings [Measurement mode] 25 Flow Setting (set value only) of OUT1 OUT2 [3 step setting mode] 26

other P362010-2 1 1 1 1 1 P362020-5 P362020-5 P362030-34 P362030-34 13 Diaphragm NBR, other 1 1 P36202019 P36202019 14 Valve Stainless steel, NBR P36201058 1 15 Valve Stainless steel, H-NBR 1 1 P36202068#1 P36202068#1 16 Valve Brass, NBR 1 1 P36203009#1 P36203009#1 17 Valve Brass, NBR 1 1 P36203010#1 P36203010#1 18 Damper NBR, other P36201021 1 1 1 P36202026 P36202026 19

M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19

Individual external pilot port: P1 M5 (VY1B01-00 only) 93 2 x 5.5 (For mounting) P1 P1 P1 P1 3.5 31 18.5 Port 3(R): 2 x 1/8 Exhaust from the both sides for 6 stations or more. 3.5 L1 L2 P=23.4 17.7 6.5 Common external pilot port: See Note for P1. 2 x M5 (VVEXB-2n-01 only) 22.4 22.4 Blanking plate Port 2(A): n x 1/8 61.5 94 9.5 R A A P1 31 26 19 P 9 8 18.45 P=23.4 29.95 10 25.5 Port 1(P)

chewed portion of the tube is used as is, this can cause trouble such as air leakage or difficulty in removing the tube. 13 No.JSY1000V-OMW0002-B Valve Construction 14 No.JSY1000V-OMW0002-B Valve Replacement Parts: Pilot Valve How to Order Pilot Valves (With a gasket and two mounting screws)*3 15 No.JSY1000V-OMW0002-B 16 No.JSY1000V-OMW0002-B 17 No.JSY1000V-OMW0002-B 18 No.JSY1000V-OMW0002-B 19

OUT IN BUS COM A COM B COM C COM D F R P B U S O I R DIA BF SOL RUN GATEWAY UNIT EX500 SERIES 18 19 Switch setting Open the station number switch protective cover and set the switches with a sharp-pointed watchmakers screwdriver etc. NOTE 1. Be sure to turn off the power before setting the switches. 2. Be sure to set these switches before use.