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qlosz 1 ' r s l . " s o , i e . r m Eacedtdc diGtatroe , (mm)' ' 'Eccantie distatce ,, {mmi. , ' ' Compact Guide cylinder:Series MGQ Constructions/Parts List ' Packing List Series MGQL Series MGQM MGQL 12-25 MGOM 12-25 qJffi-l *1]E t::]]IE{w MGQU]2-lm MGQM 32^1OO Parts List Carbon tool steel Urethane Chromale 032-s100:Hard High carbon chromium steel High-cycle hardened, Hard chromium plating

-- NCM seies

a) .250 \-24 0.50 .624 .621 0.25 0.86 0.38 it-l6 .251 .zfi 0.75 0.25 o.34 It.oo o.75 o.62 o.12 # 1 8 o.75 1-?

NCRAI seies

Sequence Felay, Se$nce cdlroller Belay, lc, Relay, Sequ*lcr Relay, tc Rolay, Sequence Fehv, lC, Sequence controtler colrlrollr Pder Elhge 5-24VDC 5 -12-24VDC 12-24WC ,12-24Vrc 5-12-24!{}C (4.5-28VDC) Curnnl coolanfdon 12mA 1smA 1zmA 15nA 1omA 12mA 1omA Lo* Yolbge MaI' 28Vrc !

NVZseies

Manual override 'H:Grommet G:Grommet Lead wire length :24 inch(6o0mm) Lead wire length :12 inch (3o0mm) L:L type plug connector With lead wire . 6: Lead wirg ;f,Jfll renetr \)/ :12 inch (3o0mm) M:M type plug connector With lead wire LO: L type plug connector Without connector DIN connector ,&

CJ2

CJ-CF006 CJ-CR006 6 6 8 11 5 8 6 M3 x 0.5 10 CJ-T010B CJ-CF010 CJ-CR010 3.3 10 8 10 13 6 10 8 M4 x 0.7 29 18 2 9 40 22 32 12 8 4.5 3.1 +0.048 0 16 CJ-T016B CJ-CF016 CJ-CR016 5 16 10 12 15 7 12 10 M5 x 0.8 35 20 14 48 28 38 16 10 5.5 6.4 2.3 +0.048 0 6-3-11

Antistatic Tubing TA  Series

(mm) 12 3.2 4 6 8 10 Tubing I.D.

Soft Nylon Tubing TS/TISA Series

Operating Pressure TS0425 TS0604 TS0806 TS1075 TS1209 TS1612 TISA01 TISA05 TISA07 TISA11 TISA13 4 2.5 6 4 8 6 10 7.5 12 9 16 12 3.18 2.18 4.76 3.48 6.35 4.57 9.53 6.99 12.7 9.56 Tubing O.D. (mm) Tubing I.D.

VFA3000

(6.5) (Breathing port) (Mounting hole) 2 x 18 (Pilot port) 5 x , , 38 14 12 SYA (Piping port) SYJA VZA ( ): Value for Rc 1/2 VFA VFRA VA 1771

VZS2000

Option Specifications 24, 48, 110, 220 VAC (50/60 Hz) 6, 12, 48 VDC Locking type (Tool required) With light/surge voltage suppressor Note) Coil rated voltage Manual override Option Plug-in type Note) Plug-in, K plug connector type is standard with light/surge voltage suppressor.

Safety Speed Control Valve (SSC Valve) Series ASS

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting

ISG

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 Series

AS

Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Inch size 1/8" 5/32" 1/4" 5/32" 1/4" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Flow Direction Symbol on Body C values: Sonic conductance dm3/(sbar) Free ow 0.3 0.4 0.6 0.4 0.6 1.0 1.2 1.1 1.6 2.2 2.6 2.4 3.5 Symbol Controlled ow 0.3 0.4 0.6 1.0 1.2 1.3 1.9 2.7 3.3 2.8 4.1 pressure ratio Free ow 0.3 0.2 0.3 0.1 0.2 0.2 0.3 0.2 b values: Critical Controlled

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

12 10 6 8 10 Tubing O.D.

AS_FS Inline

Flow Rate and Sonic Conductance Model AS1002FS AS2002FSAS2052FS AS3002FS AS4002FS Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Tubing O.D.

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

ASN Flow Rate and Sonic Conductance AQ ASV AS1001F AS3001F AS2051F AS4001F AS2001F Model Metric size 6 6 8 6 8 10 12 4 10, 12 3.2, 4, 6 Tubing O.D.

Flame Resistant (Equivalent to UL-94 Standard V-0) Flat Head Screwdriver Adjustable Speed Controller with One-touch Fitting AS  2  1F-W2D Series

How to Order AS 2 2 0 1F G 01 06 W2D Flame resistant flat head screwdriver adjustable Body size 2 1/8, 1/4 standard 3 3/8 standard 4 1/2 standard Applicable tubing O.D.*1 Metric size 06 6 08 8 10 10 12 12 Elbow Control method 0 Meter-out 1 Meter-in *1 For selecting applicable tubing O.D., refer to the Model shown above.

Platform Cylinder Series CXT ø12, ø16, ø20, ø25, ø32, ø40

Platform Cylinder Series CXT 12, 16, 20, 25, 32, 40 How to Order Port thread type 12 to 25 M thread Rc NPT G Nil TN TF 32, 40 CXT 20 100 M B M9BW Made to Order Platform cylinder Refer to page 525 for details. Bearing type Number of auto switches Slide bearing Ball bushing bearing M L 2 pcs. 1 pc. n pcs.

MQR

Low torque Metal seal type Rotary joint Series MQR 1 circuit, 2 circuits, 4 circuits, 8 circuits, 12 circuits How to Order MQR F 4 M5 Connection diameter Low torque Rotary joint (Metal seal type) M5 M5 x 0.8 Number of circuits 1 circuit 2 circuits 4 circuits 8 circuits 12 circuits 1 2 4 8 12 Options N/A Standard type FNote) Flange type Note: No flange type in 1 circuit system Options / Mounting

Coolant Valve Series SGC Made to Made to order specifications Order How to Order (For details, refer to page 389)

In-line D-M9N D-M9P D-M9B D-M9NA D-M9PA D-M9BA Electrical entry Special function Wiring (Output) Indicator light Applicable load Smbol A B C E F G 3-wire (NPN) 3-wire (PNP) 2-wire Relay, PLC IC circuit 24 V 5 V, 12 V Grommet Yes 12 V Yes 3-wire (NPN) 3-wire (PNP) 2-wire 24 V 5 V, 12 V Relay, PLC IC circuit Water resistance (2-color display) Grommet 12 V Option (For detail, refer to page

3 Port 3 Position Valve Body Ported VEX3 Series

3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF Body size Port size B Bracket (VEX312 only) Body size Port size Port 1(P), 2(A), 3(R) 12 01 1/8 02 1/4 Rated voltage