SMC Corporation of America
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(Blank plate) First station from the valve side 13-2-32 32 Vacuum Module: Ejector System Series ZX Manifold/System Circuit Example When not using individual air pressure supply When using individual air pressure supply Left ZX Left ZR ZM Dummy spacer R16 side Common exhaust Common exhaust ZH Common air supply Common air supply Pilot exhaust Right Individual air supply ZU Right Courtesy of

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

Symbol Port specifications Porting specifications (A,B) trA FB I 2 Common Common Side Bottom Series 1N313 Serial I rN313 AB I Allen Bradley DN I DeviceNet MB I l\4itsubishi PB I Prolibus 2 i 32 outputs/32 inputs AB2 Accessories D-sub cable with connectors on both ends.

a (sfo) valw & R9. to Manitold: NxT 3+17-2 (rnorudd in Kit) &32 x 3v. " IN$TALLANOX: loptional) Valv/Fg./Spsd Conlrol lo Manitoldr NXT 33317.3 (Ord6r sopa|aisly) &32 x 3 94 " Th inlrfca rgulalor is moo.led bstvn lhe meitold and vd$ unirs as show. in lh illuslrarth. xot,l{rnG SINGLEINTERFACEAEO. TIOT'BLE NTEBFACE AEG. G!ug.!: (For usswirh sPR0101only) optlon PslG Pan No. .fr[.-'l.

Tube Size Packaging Table 01 03 05 07 09 11 13 15 19 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 3/4 Tube Size Type A (Monowall) Type B (Reinforced) TIV01 TIV03 TIV05 TIV07 TIV09 TIV11 TIV13 TIV15 TIV19 3/4 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 Length (Meters) S S S S S S S S

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4.5-6 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

(20) 14 (10) 32 (0) 50 (10) 68 (20) 86 (30) Atmospheric pressure dew point F (C) How to read the dew point conversion chart Example) To obtain the atmospheric pressure dew point at a pressure dew point 50F (10C) and a pressure 102psi (0.7 MPa). 1.

Metric size Inch size Pilot port Model Port size 6 8 10 12 1/4" 5/16" 3/8" 1/2" ASP330F-01 ASP430F-02 ASP530F-03 ASP630F-04 ASP430F-F02 ASP530F-F03 ASP630F-F04 ASP330F-N01 ASP430F-N02 ASP530F-N03 ASP630F-N04 M5 x 0.8 R 1/8 Rc 1/8 R 1/4 Rc 1/8 R 3/8 Rc 1/4 R 1/2 G 1/8 R 1/4 G 1/8 R 3/8 G 1/4 R 1/2 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/8 NPT 3/8 NPT 1/4 NPT 1/2 Note) Brass parts are all

. () 20 25 32 40 50 63 80 100 -X *+ & *+ & ,& + & *# + & *# + & *# + & *# + & *# + & D-G5BAL Individual -X : ! ! Technical data ) *-9 / !

Blanking plate with 2 screws and gasket L dimension 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. 40 510.5 L dimension 4-12-16

48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4 26.2 24.3 16.5 3.5 18.7 16.8 11 9 1.2 16 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 26.2 18.7 9.7 VHS 22 10 8 10 46 58.5 61 30.5 28 21.5 4 20.8 18.7 14 13.7 3.2 28 29 VHK-B2A 49 17 1 30 25 21.5 31 30.5 20.8 16.1 22 12 10 12 46 62 63 31.5 30.5 21.5 4 21.8 20.8 14 17 3.2 31 32

DL08-01 18 32 19 8 14 DL08-02 16 21 38 14 12 24.5 DL08-03 22 54 26.5 31 10 17 DL10-02 23 51 Connection thread 26.5 14 DL10-03 17 22 57 DL10-04 27 28.5 100 DL12-02 25 76 17 43 12 19 28.5 DL12-03 17 26 85 DL12-04 27 17 Union Tee: DT H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

For details, refer to the table Series on page 2. 5/32" 5/16" Specifications Fluid: Refer to Applicable Fluid List.

Blanking plate with 2 screws and gasket L dimension 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. 40 510.5 L dimension 4-12-16

21.5 4 2 M6 x 1 (Width across flats 3) M8 x 1 (Width across flats 4) MXY8 30 70 10 40 29 M4 x 0.7 25 20.9 3.5 25 4 14 5 2.5 MXY12 40 M5 x 0.8 8.5 86 15 52 31 18 36 30.9 32 5 6 3 PH R RH RL T TB P PL PR Q QW TH W WD WE WR Z Model MXY6 4 2.9 5.1 13 7 9 11 60 12 3(depth 3) 3(depth 3) 2.5 30 5 88 25.5 20 MXY8 4 3.4 6.1 19 7 10 13 70 15 3(depth 3) 3(depth 3) 3 38 6.5 98 32 25 MXY12 5 4.5 7.8

Grade 3 Magnetic holding force Holding force N 25 32 40 50 63 363 588 922 1471 2256 Bore size (mm) 166

FlowRateandEffectiveArea FlowDirection SymbolonBody AS1002F 3.2,4,6 1/8",5/32" 1/4" 100 1.5 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metricsize 6 2 8 1/4" 5/16" 460 7 8 6 6 10 10,12 JISsymbol Inchsize TubeO.D. 5/16" 1/4" 5/32" 3/8" 1/4" 3/8" 1/2" Flowrate(l/min(ANR)) 230 3.5 20 0.3 290 4.5 130 2 920 14 660 10 390 6 920 14 1390 21 Controlledflow (Freeflow) Effectivearea(mm2) Note)Flowratevaluesaremeasuredat0.5MPaand20C

Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Inch size 1/8" 5/32" 1/4" 5/32" 1/4" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Flow Direction Symbol on Body C values: Sonic conductance dm3/(sbar) Free ow 0.3 0.4 0.6 0.4 0.6 1.0 1.2 1.1 1.6 2.2 2.6 2.4 3.5 Symbol Controlled ow 0.3 0.4 0.6 1.0 1.2 1.3 1.9 2.7 3.3 2.8 4.1 pressure ratio Free ow 0.3 0.2 0.3 0.1 0.2 0.2 0.3 0.2 b values: Critical Controlled

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow

Flow Rate and Sonic conductance AS1002F 3.2, 4, 6 1/8", 5/32" 1/4" 100 0.28 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metric size 8 1/4" 5/16" 460 1.3 6 6 2 10, 12 8 6 10 Flow Direction Symbol on Body Tube O.D.