M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19
01S AKH08-02S AKH08-03S AKH10-02S AKH10-03S AKH10-04S AKH12-03S AKH12-04S 8 10 M5 x 0.8 1/8 M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 30 31.7 21.2 20.6 22.2 22.9 24 27.7 36 35.5 48.3 40.8 41.3 54 46.5 5 10 4 2.8 12.7 Applicable tubing 2.8 6.5 6.5 6.5 10 8 13.5 6 14 17 22 16 24 43 45 39 80 62 80 H M 14 8 18.5 14 42 A 17 L 54.3 47.3 49.3 60.5 54.5 17 10 24 21 22 19
2.5 2.0 1.5 1.0 0.5 10 12 14 16 2 0 4 6 8 40 35 30 25 20 15 10 5 0 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) PF2W711, 511 0.035 0.030 0.025 Pressure loss (MPa) 0.020 0.015 0.010 0.005 0 10 20 30 40 50 60 70 80 90 110 100 Flow rate (l/min) Sensor Unit Construction Parts list No. 1 2 3 4 Description Attachment Seal Body Sensor Material Stainless steel NBR PPS PPS Flow direction 19
160) 7,05 7.80 (179) (1S8)8.54 lz7) 9.29 (236) 10.04 (255) 10.79 11.54 Q74) (23) 12.28 (312) 13.03 (3s1) 13.78 (350) 14.53 15.28 (36e) (388) @ NVZ5000 TApe 40 Manifokl,/ Bottom Ported inch (mm) Grommet (G) (H) Example pneumatic circuit diagram L type plug connector (L) M type plug connector (M) I : With indicator liqht and surge voltage suppressor n) 2 3 4 5 6 1 6 9 1 0 11 12 13 l4 16 18 19
VEX3221: M5 VEX3222: None (PA/Pilot air port) 58.6 Air operated: VEX3220 61.8 M5 (Port P2/Pilot air) Max. 10 101.7 Pg7 Applicable cable O.D. 3.5 to 7 87.9 M5 (Port P1/Pilot air) 80.4 69.1 3R 1P M5 (PE/Pilot exhaust port) P1 2A 1 59.1 58.1 102.6 64.1 1732 3 Port 3 Position Valve VEX3 Series Dimensions: Base Mounted/VEX342 External pilot solenoid: VEX3421 Internal pilot solenoid: VEX3422 41 19
.: ZS-38-A1) 25 20 20 45 30 2 30 34.6 19 5.2 14.7 9.6 5.2 Bracket configuration allows mounting in four orientations.
Troubleshooting for Cylinder Operation 16 Data: Outside dimensions of CE1B12 17 Outside dimensions of CE1B20 18 Outside dimensions of CE1B32 19 Outside dimensions of CE1B40 20 Outside dimensions of CE1B50 21 Outside dimensions of CE1B63 22 Specifications are subject to change without prior notice.
SQ1000 SQ2000 Built-in silencer direct exhaust (-S) SSQ1000-SE SSQ2000-SE * Part numbers above are for a set of ten elements. 10 No.SQ1000V-OMQ0002-B 11 No.SQ1000V-OMQ0002-B 12 No.SQ1000V-OMQ0002-B 13 No.SQ1000V-OMQ0002-B 14 No.SQ1000V-OMQ0002-B 15 No.SQ1000V-OMQ0002-B 16 No.SQ1000V-OMQ0002-B 17 No.SQ1000V-OMQ0002-B 18 No.SQ1000V-OMQ0002-B 19 No.SQ1000V-OMQ0002-B 20 No.SQ1000V-OMQ0002-B 21
If the mounting surface is distorted or not flat, excessive force may be applied to the housing, etc. causing malfunction. 19 - 4.
(Refer to "Setting and adjustment (page 19)" for setting the switch.) Mode Diagnostic data Diagnostic size 0 No diagnostic data. 0 byte 1 System diagnosis + Unit diagnosis 4 bytes -86No.EX-OMX1011 Details of diagnostic data Diagnostic data Byte Bit No.
(Refer to page 8-30-7 for contact protection box.) 2.7 through Most sensitive position 8-30-18 19 2-color Indication Type Reed Switch Band Mounting Style D-B59W For details about certified products conforming to international standards, visit us at www.smcworld.com. Auto Switch Specifications Grommet The optimum operating position can be determined by the color of the light.
(Refer to page 8-30-7 for contact protection box.) 2.7 through Most sensitive position 8-30-18 19 2-color Indication Type Reed Switch Band Mounting Style D-B59W For details about certified products conforming to international standards, visit us at www.smcworld.com. Auto Switch Specifications Grommet The optimum operating position can be determined by the color of the light.
(Refer to page 8-30-7 for contact protection box.) 2.7 through Most sensitive position 8-30-18 19 2-color Indication Type Reed Switch Band Mounting Style D-B59W For details about certified products conforming to international standards, visit us at www.smcworld.com. Auto Switch Specifications Grommet The optimum operating position can be determined by the color of the light.
resistance Water resistance Diagnosis output Water resistance Water resistance Water resistance Water resistance Water resistance Diagnosis output With timer Diagnosis output Diagnosis output With timer With timer Function 2 color 2 color 2 color 2 color 2 color 2 color 2 color 2 color 2 color 2 color 5.3-9 5.3-11 5.3-10 5.3-25 5.3-12 5.3-13 5.3-18 5.3-14 5.3-15 5.3-16 5.3-26 5.3-17 5.3-27 5.3-19
mode hysteresis HYS mode set value 5 6 HYS mode hysteresis 7 Wind mode lower side set value OUT2 8 Wind mode upper side set value 9 Wind mode hysteresis 10 Pressure peak value 11 Pressure bottom value 12 Reservation 13 Pressure display unit 14 Range specification 15 OUT1 output mode/output style 16 OUT2 output mode/output style 17 NPN/PNP output 18 Line name 19
setting of OUT1 6 Pressure setting of OUT1 7 Hysteresis setting of OUT1 8 Set OUT1 delay time at ON 9 Set OUT1 delay time at OFF 10 Display colour setting 11 Output mode setting of OUT2 12 Reversed output setting of OUT2 13 Pressure setting of OUT2 14 Hysteresis setting of OUT2 15 Set OUT2 delay time at ON 16 Set OUT2 delay time at OFF 17 Display colour setting 18 Digital filter setting 19
Refer to "IP address setting switch" (page 19) for details. -38No.EX-OMS0027 No. Problem Presumed cause Troubleshooting Program etc. is defective. Check if the ladder program of master, etc. is correct. Check if the green PWR(V) LED of the SI unit is ON. If the LED is off, or the red LED is ON, supply 24 VDC +10/-5% to the power supply for output.
Range over detection timer; Setting and Checking HRSE Series 5.6 Alarm customize function 5-19 HRX-OM-R039 Chapter 5 Display and setting of various functions 29. Press the [SEL] key once. Setting screen of the range over detection timer is displayed on the digital display. PV SV 30.
Vespel is a registered trademark of DuPont. 19 Intermediate flow (Tied-diaphragm) Two Stage Regulator for Ultra High Purity Series AP2700 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity to 150 slpm (NF3) to 900 slpm (H2) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Minimizes supply pressure effect by