Low Profile

SX90/090 Series CAT.ES70-59A Low Profile 2/3-Port Solenoid Valve SX90/090 Series How to Order SX9 1 5 G 2-port valve q SX090 5 G 3-port valve w e r q Type of actuation w Power-saving circuit e Rated voltage r Electrical entry 1 Normally closed 2 Universal Nil Without power-saving circuit Y1 With power-saving circuit 5 24 VDC 6 12 VDC G Grommet (Lead wire length: 300 mm) Specifications Model

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) {Nl/min} Flow rate 38 7 12 Controlled flow Effective area mm 0.6 0.1 0.2 l/min (ANR) {Nl/min} 420 Flow rate 105 280 Free flow 6.5 1.6 4.3 Effective area mm Note) Flow rates are values measured with

IS3000

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Mounting nut N W K N F S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103 132 137

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

Meter-out Meter-in 0 1 Note) M3 and M5 sizes: s (with seal) is not necessary. Thread type Cylinder side R Tube side Rc Symbol Bore size Made to Order (For details, refer to page 647.)

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

1 !

VER2000/4000

1 !2 !3 !4 !5 !6 q w e r t y u i Block packing !

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

3 Port Valve with Locking Holes Series VHS Specifications Model VHS20 VHS30 VHS40 VHS40-06 VHS50 3/4 1 1/8 1/4 1/4 3/8 1/4 3/8 1/2 3/4 IN, OUT Piping port 1/8 1/2 1/2 1/4 3/8 EXH 4.17 IN OUT 0.54 0.76 1.46 2.06 2.98 4.44 6.78 0.87 1.68 Cv OUT EXH 0.60 0.87 1.75 2.08 2.12 2.85 2.93 2.12 0.76 1.57 Air Fluid 1.5MPa Proof pressure 0.1 to 1.0MPa Operating pressure range JIS Symbol -5 to 60C

Guide Table Series MGF ø40, ø63, ø100 1

Rc 1/8 relief port Port for extending cylinder Port for retracting cylinder 8-23-8 9 Guide Table Series MGF Construction @2 !2 y u !3 e q t r o w @0 !1 !7 !8 !9 !5 !6 !0 MX i MTS @4 MY CY MG @1 !

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

dimensions Port size Rc VS A Model B C D E F G H J K L M N P U T S R VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19 32 50 50 118 96 120 60 7 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 133 96 140 66 9 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 64 50.8 163 196 68 60.5 1 2, 3 4 4-16

Compact Manometer Series PPA 1

PPA101 for vacuum PPA102 for low press. 10 to 100 kPa 0.1 to 1 MPa Rated pressure range 101 to 10 kPa Pressure display 3 digit LCD back light Pressure display discrimination 1/100 1 1 kPa 0.01 MPa 5 mmHg Note) kgf/cm 2 Mini. display units 0.01 0.01 0.1 0.2 inHg 0.1 0.1 1 PSI 0.01 0.01 0.1 bar Error display Over pressure, Memory data error, Change battery sign Peak/bottom display, Backlight

Compact Manometer Series PPA 1

PPA101 for vacuum PPA102 for low press. 10 to 100 kPa 0.1 to 1 MPa Rated pressure range 101 to 10 kPa Pressure display 3 digit LCD back light Pressure display discrimination 1/100 1 1 kPa 0.01 MPa 5 mmHg Note) kgf/cm 2 Mini. display units 0.01 0.01 0.1 0.2 inHg 0.1 0.1 1 PSI 0.01 0.01 0.1 bar Error display Over pressure, Memory data error, Change battery sign Peak/bottom display, Backlight

Air Suction Filter

(Example) For 6 stations 06 How to Order (Single unit) ZFA 100 01 Bracket Air suction filter Symbol Nil L None Bracket ZFA100 1 pc. on the left R LR Body type 1 pc. on the right With both the left and right sides 100 Filtration area (mm2) Symbol L or R shows the left or right of the filter IN when viewed from front. 2110 4210 200 Port size Thread type Applicable model Symbol 02 01 Port

Speed Controller: Standard Type Series AS In-line Type 1

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Light load Motor load Voltage IFW510 1 to 10 20 1 or less N.C.

Air Suction Filter Series ZFA 1

How to Order ZFA 100 01 Bracket Air suction filter Nil L None With bracket (1 pc. on the left) R With bracket (1 pc. on the right) Type (Recommended flow rate) L or R shows the left or right of the filter IN when viewed from front. 50 l /min (ANR) 200 l /min (ANR) 100 200 Port size ZFA100 B (ZFA200) B (ZFA100) 1 8 1 4 02 01 Thread type Nil T Rc How to Order Manifold NPTF F G Indicate both

W2M/4M

t signai VDC 1 2 3 Input signalVDC 1 2 3 Hysteresis r c 0.5 z o E ! 0 E E ,o5 5 E 1 2 3 4 lnplrl signal VDC lrpul signa VDC 1 2 3 lnput slgna!

SMC VVQ1000-P-1-N7 ind supply spacer, VV5Q* MANIFOLD VQ 4/5 PORT*** $56.55 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-R-1-C6 ind exhaust

SMC VVQ1000-P-1-N7 ind supply spacer, VV5Q* MANIFOLD VQ 4/5 PORT*** $56.55 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-R-1-C6 ind exhaust

SMC VVQ1000-P-1-N7 ind supply spacer, VV5Q* MANIFOLD VQ 4/5 PORT*** $56.55 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-R-1-C6 ind exhaust