NCQ8

-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 #6-32UNC2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-

Series SV

(With 2 input blocks) With external pilot specification 46.5 (Pitch) P = 20.5 23.5 21.3 16.5 18 11 M3 M12 17.7 11.6 13.5 36.1 83.8 5 37.6 3 3 PWR 3 3 42.7 3 5 PWR 3 5 E 3 5 E E 3 5 4 A E 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 2 2 2 2 60.3 76.8 1 1 1 1 BUS 0 BUS 0 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 0 0 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 N11 M8

M-E05-1-LQ1

1/2" x 3/8" 5-19 LQ1-5N19 LQ1-5B19 LQ1T5A-TT2-R4 5 Tubing extensions 3/4" x 5/8" 2-07 LQ1-2N07 31-2B07 5-19 LQ1-5N19 LQ1-5B19 LQ1T5A-TT2-R40 5 Tubing extensions 1" x 7/8" 5-19 LQ1-5N19 LQ1-5B19 5-19 LQ1-5N19 LQ1-5B19 LQ1T5A-TT3-R5 5 Tubing extensions 3/4" x 5/8" 5-19 LQ1-5N19 LQ1-5B19 Tubing extensions 1/2" x 3/8" LQ1T5A-TT3-R7 5 Tubing extensions 1/2" x 3/8" 5-19 LQ1-5N19 LQ1-5B19 LQ1T6A-TT1

NCA1

3/4 2.48 2 3/8 5 1/4 325 (3.25") 1 3 1 3/8 1-14 1 5/8 3.9 2 1 1/2 5/8 1/4 3/8-24 3/4 0 1/2 5/8 1.57 1.18 2.76 5/8 1/2-13 1 1/2 1 5/8 2 11/16 2.59 4 1/4 2.72 2 5/8 6 5/64 400 (4") 6 5/64 5/8 1 1/4 3/8-24 3 3/4 0 1/2 5/8 1.57 1.18 3.32 5/8 1/2-13 2 1/16 1 5/8 2 11/16 2.59 4 1/4 2.72 2 5/8 1 3/8 1-14 1 5/8 4.7 2 1 1/2 6-15-25 25 Series NCA1 Oversized Rod-Foot Style: NCA1L (XB5) ZA + Stroke XA

NCA1

5/8 2.40 2 1/4 5 1/8 1 3/4-16 1 1/8 2.6 1 1/2 1 1/8 1/2 250 (2.5") 1 3/4-16 1 1/8 3.1 1 1/2 1 1/8 1/2 7/8 5/16-24 3 0 3/8 3/8 1.30 1.06 2.19 19/32 3/8-18 1 1/4 1 3/8 2 5/16 2.13 3 3/4 2.48 2 3/8 5 1/4 325 (3.25") 1 3 1 3/8 1-14 1 5/8 3.9 2 1 1/2 5/8 1/4 3/8-24 3/4 0 1/2 5/8 1.57 1.18 2.76 5/8 1/2-13 1 1/2 1 5/8 2 11/16 2.59 4 1/4 2.72 2 5/8 6 5/64 400 (4") 6 5/64 5/8 1 1/4 3/8-24 3 3/4 0

0.4

: SQ1230D r e e q w r e e q w SQ1230D SQ1231D 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) 3 position: SQ1 30 3 4 5 3 position: SQ1 31 3 4 5 r e e q w r e e q w SQ1331 SQ1431 SQ1531 SQ1330 SQ1430 SQ1530 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2

LEC-OM071xx

Adjustments.5-2 5.1 Type of Adjustments and Basic Adjustment Procedure.5-2 5.1.1 Adjustments.5-2 5.1.2 Basic Adjustment Procedure.5-3 5.1.3 Monitoring Operation during Adjustment.5-4 5.1.4 Safety Precautions on Adjustment of Servo Gains.5-7 5.2 Tuning-less Function.5-10 5.2.1 Tuning-less Function.5-10 5.2.2 Tuning-less Levels Setting (Fn200) Procedure.5-13 5.2.3 Related Parameters.5-15 5.3

5 Port Solenoid Valve

4 (B) 2 (A) 4 (B) 2 VQC4101 VQC4100 VQC4101 VQC4100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e q w e q w (A) 4 (B) 2 (A) 4 (B) 2 VQC4200 VQC4201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e q w r e q w r (A) 4 (B) 2 (A) 4 (B) 2 VQC4300 VQC4301 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4400 VQC4401 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4500

LEC-OM069xx

Adjustments.5-2 5.1 Type of Adjustments and Basic Adjustment Procedure.5-2 5.1.1 Adjustments.5-2 5.1.2 Basic Adjustment Procedure.5-3 5.1.3 Monitoring Operation during Adjustment.5-4 5.1.4 Safety Precautions on Adjustment of Servo Gains.5-7 5.2 Tuning-less Function.5-10 5.2.1 Tuning-less Function.5-10 5.2.2 Tuning-less Levels Setting (Fn200) Procedure.5-13 5.2.3 Related Parameters.5-15 5.3

LEC-OM07605CN

PB51]5(_ _ _ 1) 4500 [Hz] 10 4500 5 30 5. [] PB51 NHQ5 5 5 [Pr. PE41](_ _ _ 1) 5] _ _ _ x 5 0 1 0h _ _ x _ 0:-40dB 1:-14dB 2:-8dB 3:-4dB 0h _ x _ _ 0:=2 1:=3 2:=4 3:=5 0h x _ _ _ 0h PB52 VRF21 2 2 [Pr. PA24]3(_ _ _ 1) [Pr. PB02]2(_ _1 _) (_ _ 2 _) 100.0 0.1 [Hz] 300.0 PB53 VRF22 2 2 [Pr. PA24]3(_ _ _ 1) [Pr. PB02]2(_ _1 _) (_ _ 2 _) 100.0 0.1 [Hz] 300.0 PB54 VRF23 2 2 [Pr.

Base Mounted Metal Seal/Rubber Seal Series VQ

EX121-SMB1(-XP) (5) EX121-STA1(-XP) (5) EX121-SSH1(-XP) (5) EX121-SPA1 EX121-SUW1(-XP) (5) VQC EX121-SAB1(-XP) (5) SQ EX120-SUH1(-XP) (5) q EX121-SSL1(-XP) (5) EX121-SSL2(-XP) (5) VQ0 EX121-SFU1(-XP) (5) EX121-SDN1 EX121-SCS1(-XP) (5) VQ4 EX121-SCS2(-XP) (5) VQ5 EX120-SMJ1(-XP) (5) AXT100-2-P (2) U S w e r t U S U S AXT100-2-F (2) U S VQZ AXT100-2-TB1 (4) AXT100-2-TB2 (4) VQD Note 1) A

5

2, 3, 4, 5) D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-C7 D-C80 5 15 50 15 + 45

LX

bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12 With brake 274 CE Marking _ Page 282 Made to Order AC servomotor specification _ 288 Low particulate generation specification _ 294 Construction

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

2-8-7 8 Series VQD1000 How to Order Manifold How to Order Valves VQD11 L 5 5 1 M5 Plug lead unit manifold VV4QD1 5 Body type 3 5 Body ported Base mounted Manifold 2 5 Body ported Base mounted Valve option Valve station Standard (2W) Vacuum (2 W) For large flow (3.2 W) For large flow, vacuum (3.2 W) Nil V U W 02 2 stations Note) Note) 20 20 stations (Max.)

Table of Contents

-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection (Mounting hole) Model A 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

(For details, refer to page 359.) 344 5 Port Solenoid Valve 10-SYJ7000 Construction (A)4 2(B) 2(B) (A)4 2 position single 2 position double 1 (P) (R1)5 3(R2) 3(R2) 1 (P) (R1)5 y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/exhaust center/pressure center 3 position closed center 2(B) (A)4 t q r w 3(R2) 1 (P) (R1)5 (A) 4 (B

Battery-less

5 !8@8 e r t !2 !1 @3 @5 o A @4 A A-A !4 @2 @0 !0 w !3 @6 Component Parts No.

Air Slide Table

M9NV M9N IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9PV M9P 2-wire 12 V M9BV M9B 3-wire (NPN) 5 V, 12 V M9NWV M9NW IC circuit 3-wire (PNP) M9PWV M9PW 2-wire 12 V M9BWV M9BW Diagnostic indication (2-color indicator) Relay, PLC Grommet Yes 24 V 3-wire (NPN) 5 V, 12 V M9NAV1 M9NA1 IC circuit 3-wire (PNP) M9PAV1 M9PA1 2-wire 12 V M9BAV1 M9BA1 Water resistant (2-color

5 Port Solenoid Valve Series VQZ1000/2000/3000

closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) (B) 2 4 (A) (B) 2 4 (A) (B) 2 4 (A) (B) 2 4 (A) (B) 2 4 (A) (B) 2 4 (R2) (P) (R1) 5 3 1 (R2) (P) (R1) 5 3 1 (R2) (P) (R1) 5 3 1 (R2) (P) (R1) 5 3 1 (R2) (P) (R1) 5 3 1 (R2) (P) (R1) 5 3 1 Note) Except metal seal type of the VQZ1000.

JXCx-OMT0023

INSTALLATION 2 1 to 2 6 2.1 Installation direction and clearances . 2 3 2.2 Keep out foreign materials . 2 4 2.3 Cable stress . 2 5 2.4 Inspection items . 2 5 2.5 Parts having service lives . 2 6 3.