RSQ

V, 12 V IC circuit 3-wire (PNP) Grommet 2-wire 12 V J Connector 3-wire (NPN) Relay, PLC 24 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) D3-wire (PNP) Grommet 12 V Water resistant (2-color indication) 2-wire -X With diagnostic output (2-color indication) 4-wire (NPN) 5 V, 12 V IC circuit 20Lead wire length symbols: 0.5 mNil (Example) A73C 3 m L (Example) A73CZ 5 m

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

5 V, 12 V Diagnostic indication (2-color indication) Grommet 2-wire 12 V Water resistant (2-color indication) 5 V, 12 V 4-wire (NPN) IC circuit With diagnostic output (2-color indication) Lead wire length symbols: 0.5 m Nil (Example) C73C 3 m L (Example) H73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 9-

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

0 Actuator cable length Nil Without controller/driver 6N LECP6/LECA6 (Step data input type) NPN 6P PNP 1N LECP1*2 Nil Without cable 1 1.5 m 3 3 m 5 5 m 8 8 m* !

Large Flow Air Filter AF800/900 Series

Large Flow Air Filter AF800/900 Series AC-A AF-A Standard Specifications AF900 AF800 Model AF-A 1 4 1 2 Port size 1 2 1 AR-A 1.5 MPa Proof pressure Maximum operating pressure 1.0 MPa AL-A 5 to 60C (No freezing) Ambient and fluid temperature Standard specifications: 5 m Option: 2, 10, 20, 40, 70, 100 m Polycarbonate Filtration Bowl material AW-A 45 cm3 Bowl capacity (cm3) AC-B Weight (kg)

Exhaust Cleaner Series AMC

Body size 2 AMC220 AMC310, 320 AMC510, 520 AMC610 AMC810 AMC910 Refer to page 5-10-14 for Specific Product Precautions. 3 5 6 8 9 Model/Male Thread Type Model Specifications Effective area (mm2) AMC310 AMC510 AMC610 AMC810 AMC910 16 55 165 330 550 Max. air flow (l/min(ANR)) Port size Weight (kg) Element model no.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

(Refer to pages 15-6-3 to 15-6-5 for details.) 15-13-1

AZ1000

type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Delivery pressure 1 to 10 psig (0.007 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

$ $ G59 G5P K59 G39 K39 G59W G5PW K59W G5BA 3-wire (NPN) IC circuit 5 V, 12 V 24 V 3-wire (PNP) Grommet 12 V 2-wire 100 V, 200 V Solid state auto switch Reed auto switch 3-wire (NPN) 2-wire Terminal conduit 12 V 3-wire (NPN) IC circuit Yes Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) 3-wire (PNP) 12 V 2-wire 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V M9PA

CLJ2

(PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit 24 V Diagnostic indication (2-color indication) 5 V, 12 V Grommet 2-wire Water resistant (2-color indication) 12 V H7BA H7NF With diagnostic output (2-color indication) 4-wire (NPN) 5 V, 12 V IC circuit Solid state switches marked with are produced upon receipt of order.

Series VQ1000 10- Base Mounted 21- Plug-in Unit

U3 U0 U1 U2 U3 S0 S1 S2 S3 Note 2) 2 to 16 stations Note 2) Note 2) Note 2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) F kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins

CLG1

indication) 5 V, 12 V IC circuit 4-wire (NPN) With diagnostic output (2-color indication) Solid state switches marked with are produced upon receipt of order.

CYP

Auto switch model Electrical entry direction Lead wire length (mm) Load voltage Type Electrical entry Indicator light Wiring (Output) Special function Applicable load 5 (Z) AC DC 0.5 (Nil) 3 (L) Perpendicular In-line Z76 5 V IC circuit 3-wire Yes Reed switch Z73 100 V 12 V Grommet Relay, PLC 24 V 2-wire Z80 No IC circuit 5 V, 12 V 100 V or less Y59A Y69A IC circuit 3-wire (NPN)

FHG

T dimension) None Differential pressure indicator Differential pressure indication switch Note) 0 1 5 1 2 3 4 5 1 2 3 4 1 2 3 4 340 410 480 550 620 430 530 630 730 560 650 750 850 04 (1/2B) 06 (3/4B) 08 (1B) 30 FH FH Note) N.C. and N.O. common Note) When the differential pressure indication 1 or 5 is selected, the connection method is 2 to 5. (0 and 1 cannot be selected.)

FQ1

Model symbol (In-line filters) Element size 250mm M005 M010 M020 M040 M074 M105 EM100-005 EM100-010 EM100-020 EM100-040 EM100-074 EM100-105 5 10 20 40 74 105 Bore size 65 x 250mm 04 06 10 Rc 1/2 Rc 3/4 Rc 1 M005 M010 M020 M040 M074 M105 EM200-005 x 4 EM200-010 x 4 EM200-020 x 4 EM200-040 x 4 EM200-074 x 4 EM200-105 x 4 5 10 20 40 74 105 Housing O-ring material N V NBR FPM 65 x 125mm Element

AS

10 0 0 5 10 Number of needle rotations Number of needle rotations AS4201F, AS4211F AS4301F, AS4311F AS3201F, AS3211F AS3301F, AS3311F 10, 11, 12 12, 13, 16 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 1500 1000 08, 09 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 06, 07 1000 500 500 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations Note) The numbers above the

Series VQ1000 10- Base Mounted 21- Plug-in Unit

U3 U0 U1 U2 U3 S0 S1 S2 S3 Note 2) 2 to 16 stations Note 2) Note 2) Note 2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) F kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins

Series PF2W Digital Flow Switch For Water

to 40 L/min 0.5 to 4 L/min 0.1 L/min 1 L/min 0.5 L/min 0.05 L/min 0.1 L/pulse 1 L/pulse 0.5 L/pulse 0.05 L/pulse Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Operating fluid temperature Accuracy Repeatability Temperature characteristics Note 1) 0 to 50C 5% F.S. 3% F.S. 3% F.S. 2% F.S. 5% F.S. (0 to 50C, 25C reference) Current consumption (No load) Weight Note 2) 70 mA or

Electric Actuator/High Rigidity Slider Type Ball Screw Drive Series LEJS AC Servo Motor ( 100/200 W )

Cable type 5, 6, 7 Cable length [m] 5, 8 Driver type 5 I/O connector Nil H Without connector With connector Nil A1 A2 B1 B2 C1 C2 S1 S2 Nil S R Nil 2 5 A Without cable 2 m 5 m 10 m Without cable Standard cable Robotic cable (Flexible cable) Power supply voltage (V) Compatible drivers 100 to 120 200 to 230 100 to 120 200 to 230 100 to 120 200 to 230 100 to 120 200 to 230 Without driver LECSA1

Air Cylinder Double Acting, Single Rod JCM Series ø 20, ø 25, ø 32, ø 40

Indicator light Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Perpendicular In-line Type Special function Electrical entry Wiring (Output) M9NV M9N V V V v v IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V M9NWV M9NW

Air Cylinder Double Acting, Single Rod JMB Series ø 32, ø 40, ø 45, ø 50, ø 56, ø 63, ø 67, ø 80, ø 85, ø 100

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N V V V v v IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V M9NWV M9NW