Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ø6), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve), Calibration Certificate
Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40 1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 *Please consult with SMC for non-standard strokes as they are produced as special orders.
Specifications: None, Display Pressure: -100 to 0 kPa, Connection Thread: 01 (R 1/8), Option: M (w/M5, Female Thread), Attachment: C2 (Clear Cover w/Protrusion, is Removable, Wrench Flats Protrude)
Specifications: None, Display Pressure: -100 to 0 kPa, Connection Thread: 02 (R 1/4), Option: M (w/M5, Female Thread), Attachment: C2 (Clear Cover w/Protrusion, is Removable, Wrench Flats Protrude)
Specifications: None, Display Pressure: K1 (-100 to 100 kPa), Connection Thread: 01 (R 1/8), Option: M (w/M5, Female Thread), Attachment: C (Clear Cover w/o Protrusion, is not Removable)
Specifications: None, Display Pressure: K2 (-100 to 200 kPa), Connection Thread: 02 (R 1/4), Option: M (w/M5, Female Thread), Attachment: C (Clear Cover w/o Protrusion, is not Removable)
s2 Unrestricted Dust tight 34 g 24 V, 12 V 37 g 24 DC DC 10% of rated voltage Class B or equivalent 2 W 2 W 3.2 W (Energy saving type) Power consumption DC (Inrush: 3.2 W, Holding: 2.4 W) L plug connector, M plug connector (With indicator light and surge voltage suppressor) Electrical entry M plug connector Base mounted M plug connector Body ported Note 1) Based on JIS B 8375-1981.
Rated Flow Range: 02 (0.02 to 2 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: T (Panel Mount Adapter, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)
Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: T (Panel Mount Adapter, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)
Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C8 (ø8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate
Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C8 (ø8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate
Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: C6 (ø6), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: T (Panel Mount Adapter, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)
Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration Certificate)
Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: C4 (ø4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: C8 (ø8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 24 VDC, Electrical Entry: M Plug Horizontal Connector w/Lead Wire 300mm, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual Override: -, Vacuum Pressure Sensor
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: Supply Valve, N.C., Rated Voltage: 24 VDC, Electrical Entry: M Plug Horizontal Connector w/Lead Wire 300mm, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Non-polar, Manual Override: -, Vacuum Pressure Sensor: -, Output Specifications
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Rc 1/2 Port Exhaust, Supply/Release Valve Combination: Supply Valve, N.C., Rated Voltage: 24 VDC, Electrical Entry: M Plug Horizontal Connector w/Lead Wire 300mm, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual Override: -, Vacuum Pressure Sensor: -, Output Specifications
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 24 VDC, Electrical Entry: M Plug Horizontal Connector w/Lead Wire 300mm, Light/Surge Voltage Suppressor: w/Surge Voltage Suppressor, Manual Override: -, Vacuum Pressure Sensor: -,
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 24 VDC, Electrical Entry: M Plug Horizontal Connector w/o Lead Wire, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual Override: -, Vacuum Pressure Sensor: