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In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 14 No.VP300-OMM0002-A S Revision history A Safety instructions PP 1st printing : MQ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

O. 1(P) 14 No.VP300-OMP0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved No.VP300-OMP0001

NO 8 No.VT307N-OMV0001 [3R] *N.O.[1P] 9 No.VT307N-OMV0001 No. 1ISO VG 32 [3R] *N.O.[1P] 1. 2. 3. 4. 5. 6. 7. 10 No.VT307N-OMV0001 VS 0120-837-838 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

M4 180 4 O 9 VT317**-OMH0003-A , , [3R] *N.O.[1P] , () 10 VT317**-OMH0003-A No. 1 ISO VG 32 [3R] *N.O.[1P] 1. 2. 3. 4. 5. 6. 7. 11 VT317**-OMH0003-A A VW : LW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of

N.C. 2 180 N.C.N.O. 3Nm DIN ( 8 VT325-OMT0001 () ( AC) 9 VT325-OMT0001 No. 1(ISO VG 32) (R) 10 VT325-OMT0001 Revision history First edition: TX 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015

N.O. 1 290 390 8 VT315**-OMH0005-A () AC 9 VT315**-OMH0005-A No. 1ISO VG 32 R 1. 2. 3. 4. 5. 6. 7. 10 VT315**-OMH0005-A A To : HV 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 10 VFR3000-OMH0005-B S Revision history A Renewal MZ B Safety Instructions PS 1st printing: AW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any

32 (EA)(P)(EB) (EA)(P)(EB) (A)(B) (A)(B) P1=0.7MPa,P2=0.5MPaS PB 38 40 31 4 2 4 2 (mm2) AEA 90 5 1 3 5 1 3 P2=0.5MPaS BEB 77 (EA)(P)(EB) (EA)(P)(EB) ()( ) 2.8N m 7 VFR3000-OMY0001 VFRA3000,4000 3 VFRA3000 VFRA4000 3 1(P) 8 VFR3000-OMY0001 R , 9 VFR3000-OMY0001 No. 1ISO VG 32 R (1) (2) (3) (4) (5) (6) 10 VFR3000-OMY0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 8 VP450-OMH0003-C Revision history AE ARenewal NQ A BE ASafety Instructions Po A CE ASafety Instructions WQ 1st printing : AQ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change

If the product has failed, then please return the valve as it is. 8 VT301-OMH0007-B Revision BE ARenewal 2018. 9 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

N.C. 1 2 3 N.C. 6 VT301-OMP0001 , No. 1ISO VG 32 (R) 1. 2. 3. 4. 5. 6. 7 VT301-OMP0001 S Revision history 1st printing :PU 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation

WR 1st printing: -4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved No.VT315-OMH0004-C

. * If the product has failed, then please return the valve as it is. 8 No.VT325-OMF0002-B Revision history AE A Renewal PT A BE A Renewal WQ 1st printing: FT 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

*If the product has failed, then please return the valve as it is. 9 VG300**-OMH0006-A A Complete revision Revision history First edition: June 1993 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015

Return us the failure valve in just the state when the failure occurred to the valve. 10 VP3145-OMH0005-D Revision history DE ARenewal 2018.8 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC

ON OFF 6 (1) 2 0.5MPa 2 10 (2) VR2110 3 )0.25MPa A 60sec (), (S) 0.8MPa 40sec B (3) (MPa) 3 OFF 1)4 1) OUT 0.7 0.6 VM1 VM1 () 0.5 0.4 0.3 0.2 ,0.6MPa VM2 VM2 0.1 ,0.3MPa 2 0 1 2 3 4 5 6 7 8 9 10 (m) 4 11 7. 4 (EXH) 1/8 (PIL) R 3 (R) 21/8 2 (A) 1 (P) 2M61 8 () 2x6.5 M6x1x12 4xM6 4X7 t=2 t=3 12 Revision history DVM VM100-A E (JIS) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

NOTE2)Bracket assembly includes a bracket, bolts, nuts and washers. 12 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved 13

CAN_H Drain CAN_L VWhite Drain Blue Black Red MNS I/O connection is established (On line status) Green ON Red flashing I/O connection / time out (Minor communication error) V+ CAN_H Drain CAN_L VMAC ID duplication error or BUS OFF error (Serious communication error) Red ON White Drain Blue Blac Red Figure 1 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Description No.1 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 0 HW Set the address and speed in a local with switch on the SI unit Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 1 S / W mode Set address and communication speed by network1. : SW1-1 to 8 are invalid. Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.