Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32, 40 Manufacturing intermediate strokes Intermediate strokes can be manufactured in 1mm increments by installing spacers in a standard stroke cylinder.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Micromesh element 1 20 0.7 2 3 40 SUS316 L EM5, 6 0 to 250 74 30 105 (Absolute) 2 4 HEPO II element Precision cleaning R 0 to 80 0.5 30 PP EJ 6 13 1 Series FQ1 Quick Change Filter Specifications Model FQ1011 FQ1012 FQ1010 1 (L125) 1 (L250) 2 (L250 x 2) No. of built-in elements (L: Element length in mm) Operating pressure Maximum 1MPa Operating temperature Maximum 80C (Not exceeding boiling

Trimmer Auto Switch Series D-
7K/D-R
K

D-RNK 21.1 6 30 2-3.5 46 5 Connector for sensor e-con 3

Mechanically Jointed Rodless Cylinder Series MY1

Load mass Allowable moment MY1H/m MY1H/M MY1H/M MY1H/M 2 1 3 40 50 50 40 50 40 50 4 40 5 30 30 30 30 20 20 20 20 MY1H40 MY1H32 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H40 MY1H40 MY1H32 MY1H40 MY1H32 MY1H32 MY1H32 MY1H32 5 4 MY1H25 MY1H25 10 MY1H40 MY1H40 Load mass kg Moment Nm Moment Nm Moment Nm 5 4 5 4 MY1H32 MY1H32 MY1H25 MY1H25 MY1H25 3 MY1H25 MY1H25 MY1H20 MY1H20 3 3 2 MY1H25 MY1H25

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(M5) One touch fitting lot Ve' tube r: :-,1 o.o97 \44) r{vJ3l38 2 position sinqle solenoid 0.066 (30) 0.073 (33 NVJ323&2 oosition double solenoid o.o9o (41 0.103 (47 NW333& 3 Dosition closed center 0.097 \44 ) 0.110 {50) llVJ3.Bg 3 oosition exhaust center NVJ353E3 oosition oressure center 0.123 (59) \0.066 (30)) 0.130 (s9)(0.073(33)) NVJ324C 2 position double solenoid 0r47 (67) (0.090 (41

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

3 Port Solenoid Valve SYJ300/500/700 Series

Configurations P R O D U C T S Q Q Q Table of Contents Q Q Q Q Features & Benefits .pages 4-5 Q Preferred Option Program.page 7 Q Specifications.page 9 Q SYJ300 .pages 10-12 SYJ500 .pages 13-15 SYJ700 .pages 16-18 Q Q How To Order .page 19 Q SYJ300 .pages 20-21 SYJ500 .pages 22-23 SYJ700 .pages 24-25 SYJA .pages 26-27 Q Q Q Drawings.page 29 Q SYJ300 .pages 30

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

AC coil: No more than 10% of the rated voltage. 2 Energizing in a long run For use of long run energizing, the continuous energizing time should not exceed 30 days and the valve must be operated at least once per 30 days.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 12 Series XMH, XYH Stainless steel High Vacuum Angle/In-line Valve Dimensions XMH/Angle type C D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) H J B G A A (mm) Model A 100.5 114 162.5 179.5 B 38 48 66 79 C 1 1 2 2 D 30 40 55 75 Fn 34 70 Fc 17 26 41 52 G 35 40.5 57 70 H 18 21.5 30 35 J P.C.D L1 6-4.4 6-6.6 L2 XMH-16

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

Platform Cylinder Series CXT

CXT12 CXT16 CXT20 CXT25 CXT32 CXT40 0.015 0.019 0.044 0.180 0.123 0.109 3 7 12 20 30 50 60 70 125 125 140 170 0.002 0.004 0.007 0.030 0.032 0.025 350 500 900 900 1100 1900 For moving and transferring workpieces. For moving the receptacle for workpieces used in stamping or press-fitting processes. For using as a Pick & Place unit in combination with other actuators.

FQ1

Micromesh element 1 20 0.7 2 3 40 SUS316 L EM5, 6 0 to 250 74 30 105 (Absolute) 2 4 HEPO II element Precision cleaning R 0 to 80 0.5 30 PP EJ 6 13 1 Series FQ1 Quick Change Filter Specifications Model FQ1011 FQ1012 FQ1010 1 (L125) 1 (L250) 2 (L250 x 2) No. of built-in elements (L: Element length in mm) Operating pressure Maximum 1MPa Operating temperature Maximum 80C (Not exceeding boiling

2-Color Display Digital Pressure Switch Series ISE70/75/75H

Note) Output -27 and -67 only Internal Circuits and Wiring Examples Output -27 Output -43 2 settings NPN open collector 2 outputs Max. 30 V, 80 mA, Residual voltage 1 V or less Fixed setting NPN open collector 1 output + PNP open collector 1 output (The pressure set point for switching the output signal is common to NPN and PNP.)

)], Connections, Inlet: MV8 (1/2 Inch Face Seal, Male), Connections, Outlet: MV8 (1/2 Inch Face Seal, Male), Gauge Port, Inlet: 1 [-30 in.Hg to 100 psig (-0.1 to 0.7 MPa)], Gauge Port, Outlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa)], Pressure Gauge Unit: psig/bar (or None in the Case of No Gauge), Seat Material: PCTFE, Standard, Flow Specification: Standard

MICRO MIST SEPARATOR

DIMENSIONS (Accessory) (Port size) Maintenance space Drain Dimensions Model Standard specifications 1/81/4 1/43/8 1/43/81/2 , AFD20-A 40 87.6 9.8 20 45 AFD30-A 53 115.1 14 26.7 30 50 AFD40-A 70 147.1 18 35.5 38.4 75 AFD40-06-A 75 149.1 20 35.5 38.4 75 3/4 Model Bracket mount dimensions AFD20-A 30 27 22 5.4 8.4 40 2.3 28 AFD30-A 41 35 23 6.5 13 53 2.3 30 AFD40-A 50 52 26 8.5 12.5 70 2.3

03-ckqg_ckqp-e

hole (Round/Without Shim) CKQG-R178 CKQG-R298 CKQG-R179 CKQG-R299 CKQG-R180 CKQG-R300 CKQG-R175S CKQG-R295S CKQG-R297S CKQG-R177S For 18 hole (Round/With Shim) For 30 hole (Round/With Shim) CKQG-R298S CKQG-R178S CKQG-R299S CKQG-R179S CKQG-R300S CKQG-R180S CKQG-D175 CKQG-D295 CKQG-D297 CKQG-D177 For 18 hole (Diamond/Without Shim) For 30 hole (Diamond/Without Shim) CKQG-D178 CKQG-D298 CKQG-D179

Booster Relay Series IL100

How to Order IL 100 02 Suffix Booster relay Nil Standard Thread type T High temperature (5 to 100C) Nil Rc N NPT* L Low temperature (30 to 60C) F G* * Semi-standard S Copper-free ST Copper-free/ High temperature (5 to 100C) Port size 02 1/4 03 3/8 SL Copper-free/ Low temperature (30 to 60C) Accessories Nil None B With bracket Standard Specifications Flow-rate Characteristics Supply pressure

0.01

LED level meter Easy-to-operate large dial Above set position Set position Below set position Red Green Green Extraneous material W W W Scale provides guidelines for set position. 2 wiring methods Centralized Wiring Individual wiring Minimum operating pressure 30 kPa (ISA2-G) Energy consumption can be reduced compared with the conventional models (Conventional models: 50 kPa) Position of

Fluoropolymer Tubing Variations

Fluoropolymer Fittings LQ series 20C 100C 200C 260C 0.5 0.19 0.09 0.04 2.0 400 290 0.7 0.26 0.12 0.05 2.8 220 160 1.0 0.43 0.20 0.08 4.6 95 60 1.0 0.62 0.28 0.12 6.7 60 30 1.0 0.73 0.34 0.14 7.9 35 20 1.0 0.62 0.28 0.12 6.7 25 20 1.0 0.92 0.42 0.17 9.9 10 6 1.0 0.59 0.27 0.11 6.4 20 12 0.6 0.24 0.11 0.05 2.6 220 160 0.7 0.27 0.12 0.05 2.9 130 110 0.9 0.33 0.15 0.06 3.6 100 65 1.0 0.43 0.20

HAW

Accessory (Option) Basic size Symbol Description Nil Applicable air compressor kW Symbol F With screw flange Screw type Reciprocating type D With auto drain Port size 2 2.2 7.5 7 Caution on Design HAW2 Size Applicable model 04 Symbol Rc 06 14 20 30 22 37 55 75 22 37 55 75 110 15 22 37 55 75 1 2 Rc 3 4 Rc 1 1 2 Rc 2 Warning HAW7 HAW22, 37 HAW55, 75 HAW110 1.