Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: [Included] Presence, Valves: No,

Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: [Included] Presence, Valves: No,

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: [Included] Presence, Valves: No,

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: [Included] Presence, Valves: No,

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

Weightkg/ Top mounting Series LEG25M LEG32M LEG40M Strokemm 30 50 100 30 50 100 30 50 100 Product weightkg 2.9 3.1 3.6 5.3 5.7 7.1 6.4 7.0 8.5 Additional weight with lock/Coverkg 0.3 0.6 0.6 Weightkg/ In-line Series LEG25MD LEG32MD LEG40MD Strokemm 30 50 100 30 50 100 30 50 100 Product weightkg 2.8 3.0 3.5 5.0 5.5 6.9 6.2 6.7 8.2 0.3 0.6 0.6 Additional weight with lock/Coverkg -5- 1.3 Construction

Suction Guard (Produced upon receipt of order) FHG Series

L-type block (75) (50) W R P Q Port size Weight (kg) d K W Y AE (mm) (75) (50) W J W (mm) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 47 47 47 50 50 50 50 50 70 70 70 85 85 85 105 105 9 9 9 9 9 9 9 9 62 62 62 65 65 65 65 65 3.5 3.5 3.5 6.2 6.2 6.1 11.9 11.9 Port size Weight (kg) E J P Q Port size Weight (kg) E 69

LECP6_C

B RESET 49 - +JOG +1-052 B RESET 1-096 C RESET (1-097) C RESET OFF JOG OFF 1-098 OFF DRV C RESET ON SVRE ON DRIVE ON 1-099 SETOFF DRV C RESET 12 (1-103) C RESET 1 [] A [a ] 2 [SW] [] A [a ] () (1-106) C RESET SVON 1 1-144 RESET SVON (1) D 50 - ON (M24V) 1-145 RESET SVON (1) D 1-146 RESET SVON (1) D (C24V) RESET SVON (1) 1-147 D (1-148) RESET SVON

Cylinder with lock

(P.20) < Applicable Auto switches > Solid state switch D-M9N(V)M9P(V)M9B(V) D-M9NW(V)M9PW(V)M9BW(V) D-M9NA(V)M9PA(V)M9BA(V) Reed switch D-A90(V)A93(V)A96(V) How to mount and move the auto switch Fig. 8 Note 1) For the tightening of the mounting screws (M2.5), use a precision screwdriver with a handle diameter of approximately 5 to 6 mm.

Digital Flow Switch (Integrated display type) ( compatible)

[ CoL] Display colour (OUT2) [1SoG] ON: Green, OFF: Red (OUT2) Page 50 With temperature sensor [ oUt2] Output mode (OUT2) [ tHYS] Temperature hysteresis Page 46 [ 2ot] Switch operation (OUT2) [ 2_n] Reverse output Page 46 [ tn_2] Set value (OUT2) 50% of maximum rated flow [ 50] 50 oC (for all ranges) Page 50 [ tH_2] Hysteresis (OUT2) 0% of maximum rated flow [ 5] 5 oC (for all ranges) Page

K35-OMW0030

/s] average speed [mm/s] Piston rod moving Piston rod moving 100 100 50 50 0 0 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 8 9 Speed adjustment rotary switch set value Speed adjustment rotary switch set value (5) IN-777-200TF-300F*-HL (6) IN-777-250TF-350F*-HL 150 150 average speed [mm/s] average speed [mm/s] Piston rod moving Piston rod moving 100 100 50 50 0 0 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 2 mounting screws (for mounting brackets) are included in bracket part no. 17-2-12 7 Series VCA Direct Operated 2 Port Solenoid Valve For Air Dimensions Grommet: G Conduit: C Q F D Q F 300 280 D VC G1/2 C R C R L VDW IN E E VQ Manual override A B B A 2-P Port size 2-P Port size VX2 VX Manual override

CEx-OMG0106

Supply Pressure: 0.5MPa (for both brake and driving purposes) d.

VK3000

Port size (P, A and B port) Rated voltage M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz R1, R2: M5 4 Option 5 6 24 VDC 12 VDC Nil None With bracket (Not assembled) 7 240 VAC, 50/60 Hz 9 Other Option F Option Part No. Description Part no.

Rotary Table Series MSU

9, D-T99 D-9A, D-S99, S9P High precision type MSUA 90 3 Single vane 7 180 D-R73, D-T79 D-R80, D-S79, S7P 20 1 D-9, D-T99 D-9A, D-S99, S9P 90 Single vane 3 MSUB Double vane 180 7 D-R73, D-T79 D-R80, D-S79, S7P 20 Double vane is available with 90 rotation setting only.

Standard Combinations

K 30 41 50 A 3 4 5 Applicable model ACG20 ACG30 ACG40 Part no.

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

-52-1A SX5000-52-1A For D side End block assembly L SX3000-53-1A SX5000-53-1A For U side 5 Connector box VZ3000-106-1A For 24VDC only 6 Rail stopper TXE1-SMC Maybe by Kasuga Electric Works SY3000-43-1ASY000-43-2AType D, 2 to 8 stations Type u, 9 to 16 stations SY3000-43-2ASY3000-43-3AType D, 9 to 16 stations Type u, 2 to 8 stations 7 Connector assembly SY3000-43-1NASY3000-43-2NAType D, 2

HRX-OM-X010

Table 3-5 Facility water temperature range Installation conditions Facility water temperature range(deg C) Ambient Relative temperature(deg C) humidity(%) 70 29 to 30 60 27 to 30 35 50 24 to 30 40 20 to 30 30 15 to 30 70 24 to 30 60 22 to 30 30 50 19 to 30 40 15 to 30 30 11 to 30 70 20 to 30 60 17 to 30 25 50 14 to 30 40 11 to 30 30 10 to 30 70 15 to 30 60 13 to 30 20 50 10 to 30 40 30 70

Fieldbus System

(Only for units compatible with M12 PROFIBUS DP , CC-Link communication connectors) SY3000/5000 VQC1000/2000/4000 S0700 SV1000/2000/3000 D D D D Note) The SY3000/5000, VQC1000/2000/4000, and S0700 are not yet UL-compatible.

3

H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

High Purity Fluoropolymer

Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)