Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

(With stroke adjuster at extension end) 3.5 (With stroke adjuster at retraction end) 26 58 35 62 48 5H9 ( ) depth 4 +0.030 0 F 20 18 N 1 x F 2 2 x M6 x 1 thread depth 10 41 +0.030 0 5H9 ( ) depth 4 30 M 0.5 37.5 40 Z ZZ (NN 1) x H G 10.5 24 10.5 24 H B A 10.5 10.5 5.1 9.5 26 1 5H9 ( ) depth 4 +0.030 0 6 NN x M6 x 1 thread depth 12 B A 5H9 ( ) depth 4 +0.030 0 Section AA Section BB GA HA

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

Cylinder with Lock Series CNG

HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)

Series CE1

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No. No.

Thermo-con/Rack Mount Type

Signal contents N 100-240 VAC L 100-240 VAC E PE 1. Power supply connector IEC60320 C14 (or equivalent) N L 8 7 6 5 4 3 2 Pin no. Signal contents 1-2 Unused 3 Terminal A of resistance temperature detector 4 Terminal B of resistance temperature detector 5 Terminal B of resistance temperature detector 1 E 2.

Modular Type Lubricator Series AL

2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification Metal bowl B 82 121 142 176 176 250 268 Model Metal bowl with level gauge B 162 196 196 270 288 Metal bowl with drain cock & level gauge B 186 220 220 294 312 With drain cock B 85 123 153 187 187 261 279 With barb fitting B 161 195

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

C D Side support B MY-SB 2-J 2-H C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 G 6.5 8 9.5 11 A 61 67 81 100 120 142 172 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B M10 x 1.5 55 14.8 8.5 9 14 80 MY-S40A B M12 x 1.75 70

VZ1000

Type 21P Single base/B mount Common SUP/Common EXH 3 to 12 stations Valve Rc 1 8 M5 x 0.8 Model Manifold type P(SUP), R(EXH) Valve stations A, B port location 1(P), 3(R) port 4(A), 2(B) port Port size Valve (1) effective area (mm2) (Cv factor) 1 4: 0.48, 4 3: 0.85 VZ1120 Socket: 26 pins MIL, with strain relief (Conforming to MIL-C-83503) Applicable flat ribbon cable connector Internal wiring

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

) (B dimension range)1 (137) (2.4) (116.5) 44 (8.5) 5H9 ( +0.030 C C 5.5 +0 ) depth 8 60 (Depth of counterbore 3) Motor cable 42 70 (122) L (62) A (Table traveling distance)2 10 62 55 64 [(66)]4 (66) [64]4 Stroke 70 [Origin]4 2 [(4)]4 (4) [2]4 Origin3 (59.9) (8.5) 48 (59.9) (63) 30 Auto switch groove5 M4 x 0.7 thread depth 8 (F.G. terminal) 6.5 46.8 63 (1 row per side) 7.5 15 B D x 150 (=

High-precision Digital Pressure Switch ( compatible)

Normal output Reversed output P_1(P_2)=A-(A-B)/4 n_1(n_2)=B+(A-B)/4 A = Maximum pressure H_1(H_2)= (A-B)/2 H_1(H_2)= (A-B)/2 B = Minimum pressure If setting is not necessary press the UP and DOWN buttons simultaneously for 1 second or longer. -36No.PS-OMV0004-H [F 6] Fine adjustment of display value This function is to manually perform a fine adjustment of the displayed pressure value.

Applicable Auto Switch Model

/D-Y7P(V) D-Y7NW(V)/Y7PW(V)/Y7BW(V) D-Y7BAL BU-1 BU-1 BU-1 BU-1 A B A B Reed switch D-A90(V)/A93(V)/A96(V) Solid state switch D-F9N(V)/F9P(V)/F9B(V)/F9NW(V)/ F9PW(V)/F9BW(V)/F9BAL How to mount and move the auto switch How to mount and move the auto switch Note) Use a watchmaker driver whose grip dia. is 5 to 6mm when tightening the auto switch mounting screw.

Refrigerated Air Dryer

Dimensions (mm) A B C D E F G K L M N P Model IDFA100F IDFA125F Port size R2 670 460 335 107 700 1120 1276 267 1375 20 712 752 R2 1/2 700 655 350 78 935 IDFA150F E D B 10 note) A G F C N M L K Note) In addition to the overall length of the body, the filter mounting part (bracket) projects 10 mm.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Auto Switch Proper Mounting Position (mm) Auto switch model D-M9 D-M9W D-A9 A A B B Bore size 6 10 16 (4.5) 5.5 (4.5) 5.5 (0.5) 1.5 (0.5) 1.5 (5) 6 (5) 6 (1) 2 (1) 2 (5.5) 6.5 (5.5) 6.5 (1.5) 2.5 (1.5) 2.5 The values in ( ) are measured from the end of the auto switch mounting bracket.

VZ5000

Note 1) At rated voltage Note 2) Plug-in should be ZNR 3-3-68 5 Port Solenoid Valve Base Mounted Series VZ5000 (2) Flow Characteristics/Weight Flow characteristics (1) Port size Valve model Type of actuation Weight (g) 1 4/2 (P A/B) 4, 2 (A, B) 1, 5, 3 (P , EA, EB) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Grommet 200(120) 240(160) C [dm3/(sbar)] Cv b Cv b Single Double Closed center Exhaust

70pvvna

B (9.5) B (12.7) B (19.1) B (25.4) B (31.8) B (38.1) B (50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 3 8 1 2 3 4 10A 15A 20A 25A 32A 40A 50A 1 2 VNA01 VNA02 VNA03 VNA1 Port 12 (P1) 1 1 1 2 External pilot External pilot External pilot External pilot External pilot Pilot exhaust Bleed port Bleed port 1 4 1 2 10 (P2) Installing a silencer to the

EX510

Unit type Compliant sensor 1 2 N P B 1 connector, 2-input type NPN output Replaceable fuse (EX9-FU10) 1 connector, 1 input type PNP output 2-wire type Note) B (2-wire type) is available with 1 connector, 2-input type only.

VZA2000

0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9 1.9 Body ported Base mounted (With sub-plate) 2 position 1/8 Body side M5 x 0.8 3 position 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 0.54 0.19 2.2 0.56 0.23 2.4 Sub-plate side Single 0.54 0.19 2.2 0.56 0.23 2.4 Body side 2 position 0.54 0.19 2.2 0.56 0.23 2.4 Sub-plate side Double 0.54 0.19 2.2 0.56 0.23 Body side 2.4 M5

A

Quick exhaust Normal operation High speed supply B 1/2 PP PA C D PA PP 1(P) 2 2(A) 1 1/2 PP = approx.

Hand Valve Series VH

SlA 7 VlA 8 1 (P) SlA 4 (B) 2 (A) 2 3 (R) VlA VH300 / 400 5 6 VM/VR 4 3 VH 1 8 7 4 (B) 3 (R) 1 (P) 2 (A) 2 VH600 6 5 4 1 7 1 (P) 2 (A) 4 (B) 2 3 (R) Component Parts Material VH200/300/400 Zinc die cast Aluminium die cast VH600 Cast iron Description No.