Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Hexagon socket head cap screw End block L End block R 1 2 3 Refer to How to Order below. Refer to Table (1) (including 1 pc. of y). Refer to Table (1) (including 1 pc. of t). Table (1) ZQ13M--(-Q)Note 1) 4 Ejector assembly (1 pc. each in t and y is included.)

Fieldbus system CC-Link compatible SI unit

I0 O15..O0 0 AI0 AO0 Station I15..I0 O15..O0 0 AO0 System + unit diagnosis AO2 1 1 AI1 AO1 1 1 AO1 1st division 2 AI2 AO2 2 3 AI3 AO3 3 AI0 AO3 Station I31..I16 O31..O16 0 AI4 AO4 Station I31..I16 O31..O16 0 AI1 AO4 2 I47..I32 O47..O32 1 AI5 AO5 2 I47..I32 O47..O32 1 AI2 AO5 2 AI6 AO6 2 AI3 AO6 3 AI7 AO7 3 AI4 AO7 Station I63..I48 O63..O48 0 AI8 AO8 Station I63..I48 O63..O48 0 AI5 AO8 1 1

A-HEC-OM-J004

1-2 1.1.3 Symbols. 1-2 1.2 Hazard Warning Labels . 1-4 1.2.1 Location of hazard warning labels . 1-5 1.3 Location of Model Label. 1-7 1.4 Safety Measures . 1-8 1.4.1 Precautions. 1-8 1.4.2 Protective Equipment . 1-9 1.4.3 Long-term Storage . 1-10 1.4.4 Disposing of Product . 1-10 1.5 Interlock List . 1-10 Chapter 2 Description and Function of Each Part . 2-1 2.1 Liquid Tank/Controller. 2

IDX-OM-W016

. 3 2 3 6 Precautions for long-term non-operation . 3 2 Chapter 4 Checks and Maintenance 4 1 Daily Check Points . 4 1 4 2 Periodical maintenance . 4 1 4 2 1 Cleaning of ventilation grille (suction grille) . 4 1 4 2 2 Service parts . 4 1 4 2 3 Cleaning of Auto Drain Strainer . 4 1 Chapter 5 Troubleshooting . 5 1 IDFA Series Table of Contents 1 IDX-OM-W016 Air dryer Table of Contents Chapter

EXxx-OMN0029CN

EX600-ZMB2 (3)DIN DIN (4)DIN (5)(M4X20)(EX600-ZMA2) 0.70.8 Nm DIN DIN EX600-ZMA2 -16No.EX-OMN0029CN-D M12 M8 M12 SPEEDCON SPEEDCON (1)(/)BA (2)C (3)B180(1/2) (1) (2) (3) A B C (EX600-ZT1) -17No.EX-OMN0029CN-D SI EX600-S A SI 1 PNP() 2 NPN() TM DN DeviceNet No. 1 LED 2 3 4 (BUS OUT) 5 6 (PCI) 7 8 9 10 () 11 (BUS IN) 12 (2 ) (BUS OUTPCI) -18No.EX-OMN0029CN-D

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

JIS Symbol 15-9-43 2 Series AS-FG How to Order AS 1 0 3 2 F G 01 06 Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Option Type Nil S None With seal 2 3 Elbow Universal M5 and U10/32 are not available with seal. Control type Applicable tubing O.D.

EXxx-OMQ0015CN

Byte 0 System diagnostic status 0 Byte 1 System diagnostic status 1 Byte 2 Unit diagnostic status 0 Byte 3 Unit diagnostic status 1 -66No.EX-OMQ0015CN System diagnostic status0 7 6 5 4 3 2 1 0 Byte 0 Bit No. 0 1 1 1 2 1 3 1 4 1 5 1 6 1 7 1 System diagnostic status1 7 6 5 4 3 2 1 0 Byte 1 Bit No.

Sensor Monitor

Display MPa kPa Pa Kgf/cm2 bar mbar psi inHg mmHg mmH2O Fine differential pressure 2 kPa 0.002 0.001 1 0.01 0.001 0.1 Vacuum -101 kPa -0.1 0.001 0.1 0.001 0.001 0.01 0.1 1 Compound 100 kPa F0.1 0.001 0.1 0.001 0.001 0.02 0.1 1 Low pressure 100 kPa 0.1 0.001 0.1 0.001 0.001 0.01 500 kPa 0.5 0.001 1 0.01 0.01 0.1 Positive pressure 1 MPa 1 0.001 1 0.01 0.01 0.1 2 MPa 2 0.001 1 0.01 0.01 0.2

Sensor Monitor

Display MPa kPa Pa Kgf/cm2 bar mbar psi inHg mmHg mmH2O Fine differential pressure 2 kPa 0.002 0.001 1 0.01 0.001 0.1 Vacuum 101 kPa -0.1 0.001 0.1 0.001 0.001 0.01 0.1 1 Compound 100 kPa F0.1 0.001 0.1 0.001 0.001 0.02 0.1 1 Low pressure 100 kPa 0.1 0.001 0.1 0.001 0.001 0.01 500 kPa 0.5 0.001 1 0.01 0.01 0.1 Positive pressure 1 MPa 1 0.001 1 0.01 0.01 0.1 2 MPa 2 0.001 1 0.01 0.01 0.2

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M5 x 0.8 AS231FG-01 AS221FG-01 R 1/8 AS231FG-02 AS221FG-02 R 1/4 AS331FG-02 AS321FG-02 R 1/4 AS331FG-03 AS321FG-03 R 3/8 AS431FG-04 AS421FG-04 R 1/2 AS131FG-U10/32 AS121FG-U10/32 10-32 UNF AS231FG-N01 AS221FG-N01 NPT 1/8 AS231FG-N02 AS221FG-N02 NPT 1/4 AS331FG-N02

Compressed Air Preparation Filter

Unit: Nm Recommended Torque Connection thread 1/8 1/4 3/8 1/2 3/4 1 1 1/2 2 Torque 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 48 to 50 48 to 50 * After tightening by hand, use a tightening tool to tighten an additional 1/6 turn. 2. Select according to the maximum flow rate of the system. 2.

Regulator

2 37.5 57.5 37.5 58.5 37.5 58.5 AR30-D 1/8 53 86.5 30.5 26.5 26.5 3.5 37.5 63 37.5 64 37.5 64 AR40-D 1/8 70 91.5 35.5 35.5 35.5 42.5 73 42.5 73 42.5 73 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 M421.5 M381.5 AR40-06-D 1/8 75 93 35.5 35.5 35.5 42.5 73 42.5 73 42.5 73 AR50-D 1/8 90 125 43 45 45 42.5 82.5 42.5 82.5 42.5 82.5 AR60-D 1/8 95 155 45 45 45 42.5 82.5 42.5 82.5 42.5 82.5 3/4 M421.5 3/4, 1 1

Air Filter

Recommended tightening torque Unit: N m Thread size 1/8 1/4 3/8 1/2 3/4 1 Torque 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 (4) Before using an SMC fitting and S coupler, please refer to "Tightening the threaded portion of the connection thread" of the Fittings & Tubing Precautions. -5- (5) Do not apply torsion or bending moment other than the weight of the product itself.

Digital Pressure Switch

Output mode Display resolution Hysteresis mode 1/10 of P_1(n_1) Window comparator mode 1/4 of P1HP1L(n1Hn1L) Positive pressure, vacuum pressure: Rated maximum pressure 1/7 of the atmospheric pressure Compound pressure: Rated maximum pressure 1/4 of the atmospheric pressure Error output Positive pressure, vacuum pressure: Rated maximum pressure 1/7 of the atmospheric pressure Compound pressure

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 3.2 to 12 1 to 4 M5 to 1/2 1/8" to 1/2" Refer to the Web Catalog for details.

AKH/AKB Series

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

REGULATOR

AR-OMT0015 PRODUCT NAME REGULATOR MODEL/ Series AR20K-(F,N)01 (F,N)02(B,E,G,H,M)(-1,N,R,Y,Z)-B AR25K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR30K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)02 (F,N)04(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)06(B,E,G,H,M)(-1,N,R,Y,Z)-B AR50K-(F,N)06 (F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B AR60K-(F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B Contents PAGE 1.

High Vacuum L Type Valve

Heater specifications Item XLC-25-2 XLC-40-2 XLC-50-2 XLC-63-2 XLC-80-2 Rated voltage of the heater 90 to 240 ACV Heater assembly number XL1A25-60S-1 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

High Vacuum L Type Valve

Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

Micro Mist Separator

Dimensions (Port size) Semi-standard specifications With element service indicator Clearance for maintenance Optional specifications With auto Standard specifications Model Bracket mount drain P A B C D E G J M N Q R S T U V B AFD20-D 1/8, 1/4 40 87.6 17.5 21 45 21 30 27 22 5.4 8.4 60 2.3 28 104.9 AFD30-D 1/4, 3/8 53 115.4 21.5 26.5 30 50 26.5 41 35 25 6.5 13 71 2.3 32 157.1 AFD40-D 1/4,