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URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 SET 2 secs. Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved PS-OMW0010

Green 1 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 6 9 5. Apply a thickness gauge again and check that the Green turns on.

Sumitomo 3M OMRON Series Tyco Electronics SMC corporation PSE53# 3-1473562-4 Connector for sensor lead wire Lever PSE54# 37104-3101-000FL ZS-28-C 1-1473562-4 PSE550 XN2A-1430 For low differential pressure For low pressure For positive pressure For compound pressure For vacuum URL https://www.smcworld.com Pressure range PSE56# 1473562-4 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

[July 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010-2018 SMC Corporation All Rights Reserved No.PS-OMG0009-D

[December 2020] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com NOTE: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. EtherNet/IPTM is a trademark of ODVA. 2018-2020 SMC Corporation All Rights Reserved. No.EX-OMV1026-B

If the product has failed, then please return the valve without any modifications. 41 No.JSY1000V-OMW0002-B Revision history Renewal 2021.11 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC

No.JSY1000V-OMW0004-A One-touch Fittings, Clip, Port Plate, Tube Releasing Tool Refer to How to Replace One-touch Fittings on page 13 for the replacement method. 21 No.JSY1000V-OMW0004-A Manifold Options 22 No.JSY1000V-OMW0004-A 23 No.JSY1000V-OMW0004-A 24 No.JSY1000V-OMW0004-A 25 No.JSY1000V-OMW0004-A Revision history DIN terminal, M12 connector added. 2023.4 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 21 No.SY3000V-OMM0002-B Revision history A Safety instructions Po B NEW SY7000 Safety instructions Tightening torque Construction WQ 1st Printing :oS 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications

SY7000 16 No.SY3000V-0MY0001 2 2 2 2 3 // 3 3 3 SY3000 SY5000/ SY7000: /HNBR SY3000 SY5000 SY7000 P.145 17 No.SY3000V-0MY0001 (E) () () (PE) 18 No.SY3000V-OMY0001 No. 1(ISO VG 32) (R) 19 No.SY3000V-OMY0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to

P AorB ) )VP4350 () VP4450() A B EA EB () ()0() DIN 1 1) 1)() 2) 2)2a 2b 3)3a 3)2a 2b 4) 2. 0.5Nm20% 1) 90 2) No.12 (+/-) 3)3e 3f(Y ) DIN DIN , +COM-COM 3f 0.5Nm15% 1 A 2 B 3 COM 8 VP4_50-OMU0001 (EA,EB ) () (PE) 9 VP4_50-OMU0001 Ass'y 1 (ISO VG-32) Ass'y Ass'y Ass'y 1. 2. 3. 4. 5. 6. 10 VP4_50-OMU0001 Revision history :Vo 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

) DIN ) DIN 0.40.6Nm No.VQ1000V-OMV0001 9 - 1) 2) 1) 1) 2) OFF DC 3% AC 8% 3 Assy Assy 1) OFF DC 3% AC 8% 2) 3) 1 1-1) VQ1000 : 0.250.35Nm VQ2000 : 0.50.7Nm 1-2) 1-3) 10 No.VQ1000V-OMV0001 2 2-1) 2-2) 2-3) 2-4) Assy 3R 1set 200cc (at 0.5MPa) 3-1) VQ1000 : 0.250.35Nm VQ2000 : 0.50.7Nm 3-2) 4 11 No.VQ1000V-OMV0001 Revision history VT 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Insufficient bolt tightening After stopping air and re-tighten the bolts. 21 No.VQC5000V-OMU0002 S Revision history 1st printing : UT 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation

16 No.VQZ100V-OMT0001 Revision history TW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved No.VQZ100V-OMT0001

No. 15 No.VFS4000-OMY0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved No.VFS4000-OMY0001

VFR3000 Series Series Series Series 4 4 4 4 01F D 01C COM A B 1)8 2) +COM -COM 3) D U D 1 COM A B 1)8 2) +COM -COM 3)D U D 1 11 VFR3000-OMJ0001-A () X () [3(EB) 4(EA)] ( (PE) 12 VFR3000-OMJ0001-A No. 1(ISO VG 32) [3(EB),5(EA),PE] X(30.20.9MPa0.10.9MPa) 1. 2. 3. 4. 5. 6. 7. 13 VFR3000-OMJ0001-A Revision history A Renewal Qo 1st printing:JX 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

.50 4) 2 5) P A B ARBF5000 ARBF5000 P A B 10 VFR5000-OMN0001 VFR5000 Series/ 01F D COM A B 01C COM A B 1)8 2)+COM -COM . 3)D U D 1)8 2)+COM -COM . 3)D U D 11 VFR5000-OMN0001 () X () [3(EB)4(EA) ] () (PE) 12 VFR5000-OMN0001 o. 1(ISO VG 32) [3(EB),5(EA),PE] X(30.2~0.9MPa0.1~0.9*MPa) 1. 2. 3. 4. 5. 6. 7. 13 VFR5000-OMN0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 12 VFR6000-OMA0001-B Revision history A Renewal MZ B Safety Instructions PQ 1st printing: AZ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

AC ( )() DC24V 16Nm 9 VFR6000-OMQ0001 VFR6000 Series/ / / / ) DIN DIN DIN DIN / / / / DIN 90 10 VFR6000-OMQ0001 () X () [3(EB)4(EA) ] () (PE) 11 VFR6000-OMQ0001 o. 1(ISO VG 32) [3(EB),5(EA),PE] X(30.2~0.9MPa0.1~0.9*MPa) 1. 2. 3. 4. 5. 6. 7. 12 VFR6000-OMQ0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com

If the product has failed, then please return the valve without any modifications. 11 No.DOC1003125 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

Ass'y 1(ISO VG 32) [3(R),PE] N.O.1(P) Ass'y Ass'y (P,A,X) X(0.2~0.9MPa) X() 1) 2) 3) 4) 5) 6) 7) -10No.VG300**-OMI0001-A Revision history A Renewal QR 1st printing:iy 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on