(mm)Additional mass of adjuster optionAdditional mass of functional option 102030405075100125150Rubber stopperShock absorberWith bufferWith end lockAxial piping type S: Stroke (mm) Extension endRetraction endExtension endRetraction endMXS25166016801690184020902650327041404710150125215300240540220+0.45S

(mm)Additional mass of adjuster optionAdditional mass of functional option 102030405075100125150Rubber stopperShock absorberWith bufferWith end lockAxial piping type S: Stroke (mm) Extension endRetraction endExtension endRetraction endMXS680100115155180????

mass of adjuster optionAdditional mass of functional option 102030405075100125150Rubber stopperShock absorberWith bufferWith end lockAxial piping type S: Stroke (mm) Extension endRetraction endExtension endRetraction endMXS8150160190235285410???

(mm)Additional mass of adjuster optionAdditional mass of functional option 102030405075100125150Rubber stopperShock absorberWith bufferWith end lockAxial piping type S: Stroke (mm) Extension endRetraction endExtension endRetraction endMXS20960980101011001250163021502670319010071170205140310150+0.45S

(mm)Additional mass of adjuster optionAdditional mass of functional option 102030405075100125150Rubber stopperShock absorberWith bufferWith end lockAxial piping type S: Stroke (mm) Extension endRetraction endExtension endRetraction endMXS20960980101011001250163021502670319010071170205140310150+0.45S

(mm)Additional mass of adjuster optionAdditional mass of functional option 102030405075100125150Rubber stopperShock absorberWith bufferWith end lockAxial piping type S: Stroke (mm) Extension endRetraction endExtension endRetraction endMXS20960980101011001250163021502670319010071170205140310150+0.45S

(mm)Additional mass of adjuster optionAdditional mass of functional option 102030405075100125150Rubber stopperShock absorberWith bufferWith end lockAxial piping type S: Stroke (mm) Extension endRetraction endExtension endRetraction endMXS20960980101011001250163021502670319010071170205140310150+0.45S

(mm)Additional mass of adjuster optionAdditional mass of functional option 102030405075100125150Rubber stopperShock absorberWith bufferWith end lockAxial piping type S: Stroke (mm) Extension endRetraction endExtension endRetraction endMXS20960980101011001250163021502670319010071170205140310150+0.45S

(mm)Additional mass of adjuster optionAdditional mass of functional option 102030405075100125150Rubber stopperShock absorberWith bufferWith end lockAxial piping type S: Stroke (mm) Extension endRetraction endExtension endRetraction endMXS20960980101011001250163021502670319010071170205140310150+0.45S

(mm)Additional mass of adjuster optionAdditional mass of functional option 102030405075100125150Rubber stopperShock absorberWith bufferWith end lockAxial piping type S: Stroke (mm) Extension endRetraction endExtension endRetraction endMXS20960980101011001250163021502670319010071170205140310150+0.45S

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

(mm)Additional mass of adjuster optionAdditional mass of functional option 102030405075100125150Rubber stopperShock absorberWith bufferWith end lockAxial piping type S: Stroke (mm) Extension endRetraction endExtension endRetraction endMXS12325325325385480660890??

(mm)Additional mass of adjuster optionAdditional mass of functional option 102030405075100125150Rubber stopperShock absorberWith bufferWith end lockAxial piping type S: Stroke (mm) Extension endRetraction endExtension endRetraction endMXS12325325325385480660890??