SMC Corporation of America
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(between lead wire and case) Ambient temperature Sensor unit: 0 to 150 oC, Amplifier unit: 0 to 60 oC Enclosure Sensor unit: IP67, Amplifier unit: IP63 (IEC60529) Standards CE, RoHS -17No.D-S-OMS0002-B Dimensions -18No.D-S-OMS0002-B Revision history A: Modified errors in text. B: Add the note.

D-A9V D-M9V 5 2 pcs. 10 1 pc. 15 10 5 D-M9 2 pcs. 15 10 1 pc. 15 10 D-M9W 2 pcs. 15 10 1 pc. 10 D-M9WV 2 pcs. 10 1 pc. D-Z7 D-Z80 10 5 2 pcs. 15 10 1 pc. D-Y59 D-Y7P 10 5 2 pcs. 15 10 1 pc. D-Y69 D-Y7PV 5 2 pcs. 5 1 pc.

View A-A Bore size (mm) Stroke range (mm) AF AE AD AC AB AA A G F E D C B AP H 20 25 32 40 50 75, 100, 125, 150, 200 25 62 15.5 13 11 84 5.6 90 45 24 106 M5 x 0.8 depth 10 9.5 depth 6 22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8

B P_1 or P_2 H_1 or H_2 Released P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 Work 1 Work 2 Work n Atmosphere H_1 (H_2) = (A-B)/2 D Peak and bottom display function C Precision indicator setting function (F 6) Fine adjustment of the indicated value of the pressure sensor can be made within the range of 5% of the read value. (The scattering of the indicated value can be eliminated.)

(inch) a b Note 2) Effective area (mm2) Applicable tube b Weight (g) D Note 1) L M1 M2 Model Applicable tube a KQB2H01-03 KQB2H03-07 KQB2H07-09 KQB2H09-11 KQB2H11-13 1/8" 5/32" 1/4" 5/16" 3/8" 5/32" 1/4" 5/16" 3/8" 1/2" 25.6 27.1 30.6 33.7 36.1 9 12 14 16 20 12 12.6 13.5 16.1 16.6 12.6 13.5 16.1 16.6 18.5 3.4 5.6 13.1 26.1 41.5 6.8 11.9 16.8 23.9 38.8 D M2 M1 L Note 1) D is maximum diameter

LEKF-OMZ0008-B PRODUCT NAME Electric Actuator / Slider type Battery-less absolute encoder type (Step motor 24VDC) MODEL / Series / Product Number LEKFS Series Applicable models LEKFSE Controller 1 Series #This manual describes the actuators operation in combination with the JXC*1 series controllers.

JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993:*2) 1. 2. 3. 1. 2. 3. 4. 2 - RS2H / 1 1.5 *3) 1 1 () 3 - 1. 1-1. (mm) 50 63 80 / 1.5MPa 1.0MPa -1060() () 1.4 0 (Rc,NPT,G) 1/8 1/4 1/4 1-2. (N) 50 63 80 40.3 78.5 88.2 139.5 174.6 217.3 1-3. (mm) 50 30 63 30 80 40 1-4. (mm) (Kg) 50 1.70 / 63 2.78 80 4.96 4 - RS1H 1. mA 2. V(m/min) (Kg) 3.

x 103 1 x 106 1 x 105 1.0197 x 105 9.8692 x 106 1.0197 x 101 7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1 x 101 9.8692 x 101 1.0197 x 104 7.5006 x 102 1 1.0197 1.4503 x 10 9.8067 x 104 9.8067 x 101 9.6784 x 101 1 x 104 7.3556

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

Dimensions Option Port size A D OUT IN C B Metal bowl Metal bowl with level gauge Without drain cock B B B Drain cock barb fitting Drain cock thread piping With drain guide E Maintenance space B B B 1/4 Barb fitting Applicable tubing T0604 1/4 Width across flats 17 Option/Dimensions N.O N.C B (With auto drain) Model A B C D N.O N.C E AF800 AF900 150 200 408 488 33 46 140 170 448 528 448 528

Product Description 1 1-1 Model 1 1-2 Specifications 1 1-3 Effective Torque 2 1-4 Key (Keyway) Position and Rotation Range 2 2. Internal Construction and Description of Individual Parts 3 2-1 Single Vane Type 3 2-2 Double Vane Type 4 3. Basic Circuit 5 3-1 Circuit Configuration 5 3-2 Preferred Components 5 4.

H 4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 200 VAC 800/40 800/50 800/100 Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

9 @0 @1 Replacement Parts MHC2-25 MHC25-PS MHC-A2503 MHC-A2502 MHC-A2501 P3311445C MHC2-20 MHC20-PS MHC-A2003 MHC-A2002 MHC-A2001 P3311345B MH-A1606 MHC2-16 MHC16-PS MHC-A1603 MHC-A1602 MHC-A1601 P3311245B MHC2-10 MHC10-PS MHC-A1003 MHC-A1002 MHC-A1001 P3311145B MH-A1006 Main parts !8!9@0@1 rtyui!3 weui!0!1!8!9@0 w!0!1 e !

9 @0 @1 Replacement Parts MHC2-25 MHC25-PS MHC-A2503 MHC-A2502 MHC-A2501 P3311445C MHC2-20 MHC20-PS MHC-A2003 MHC-A2002 MHC-A2001 P3311345B MH-A1606 MHC2-16 MHC16-PS MHC-A1603 MHC-A1602 MHC-A1601 P3311245B MHC2-10 MHC10-PS MHC-A1003 MHC-A1002 MHC-A1001 P3311145B MH-A1006 Main parts !8!9@0@1 rtyui!3 weui!0!1!8!9@0 w!0!1 e !

SF-OMZ0013-B Operating Environment Warning 1. Do not operate under the conditions listed below due to a risk of malfunction.

4 t #8 @2 @1 y q #9 $0 Single acting (TL, TM) Double acting spring type (BL, BM) !0 r #7 @5 !1 !

position 4-5.5 mounting hole Handle Operated Type VBA2100-03, VBA4100-04 Pressure gauge (Option) IN port OUT port 4-12 mounting hole E D Silencer (Option) EXH port: 1 position EXH port: 1 position D 73 116 O 39 56 A 300 404 B 170 207.5 C 53 96 E 118 150 F 98 130 G 46 62.8 H 43 62 I 60.5 90 J 18 17 K 15 15 L N Rc 1/16 Rc 1/8 M 31 40 Model Port size Rc 3/8 Rc 1/2 VBA2100-03 VBA4100-04 20 14

SP ZCUK (mm) W B D-A9, D-A9V D-M9, D-M9W D-M9V, D-M9WV Bore size (mm) AMJ B A W 16.5 A B W A 10 16 20 25 32 0.5 7.5 2.5 7.5 3 12.5 16.5 1.5 (1) AMV 0 8 1.5 8 20 4 16 20 2 (0.5) 2 10 0 10 24 6 20 24 4 (1.5) AEP 3.5 11.5 1.5 11.5 26.5 7 22.5 26.5 5.5 (3) 4.5 12.5 2.5 12.5 27.5 8 23.5 27.5 6.5 (4) HEP Note 1) Figures in the table above are used as a reference when mounting the auto switches

(mm) Stroke range A Bore size (mm) P AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM S ZZ NA 20 1/8 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 83 124 29 to 200 25 1/8 22 19.5 17 50 18.5 10 36 5.5 6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 83 129 29 to 300 32 1/8 22 19.5 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 85 131 35.5 to 300 40 1/8 30