ITV

AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Block Diagram IR OUT. (Set pressure) ATM VAC.

MGC

Rear plate A W U A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AB V AP Y + Stroke Z + Stroke WH (Max.)

E-P HYREG ® Series VY1 1

AV AU AF AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR VEX AMR P1 port ITV IC Component Parts R(3) port VBA No.

MTS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data Cylinder with ball spline 8-10-1 2 with Internal Guide Function.

MXW

0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !6 !4 !1 !3 !2 @0 !9 o u i Component Parts No.

.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area [mm2]: 1260,

.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area [mm2]: 1260,

.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area [mm2]: 1260,

.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area [mm2]: 1260,

Table of Contents

HA AT Series AME, AMF ID 250 CA A AME AMF AMG AFF Body size AM 150 250 350 450 550 650 850 Misc. 14-20-59 Series AFF-CA, AM-CA Dimensions Series AFF, AM, AMD, AMH, AMG Size: AFF2B to 37B, AM150 to 650 (B) (B) (B) (C) (A) (A) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

AFF

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Refer to Made to Order Specifications on pages 14-20-55 to 14-20-57.

Electro-pneumatic Proportional Valve Series VEF/VEP 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.03 s or less 0.03 s or less 0.05 s or less 0.05 s or less Response time Hysteresis 3% F .S. IR Repeatability 3% F .S. VEX Sensitivity 0.5% F .S.

VNH

VX2 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping Caution VX3 When high temperature fluids are used, use fittings and tubing with heat resistant features. (Self-align fittings, Teflon tubing, Copper tubing, etc.)

V100

[Standard] Press in the direction of the arrow Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector Socket Lead wire Caution Hook When operating with a screwdriver, turn it gently using a watchmakers screwdriver.

Table of Contents

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-A9V D-M9V D-F9WV 5 (7) ( ): Denotes the values of D-M9V, D-F9WV.

ZSE F/ISE

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Helium leakage test Helium leakage test is conducted on the welding parts.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY on ti rp so on ad a ZQ sl or an l f ea te d ZF id wo pe rk ZP ty su nt ZCU oi rf ac l j AMJ al e s B Misc.

Table of Contents

ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 1(PV PS PD) PD Table (2) PE ZY Part no.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load weight (kg) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com m1 m2 m3 Moment (Nm) M3 = F3 x L3 F3 M1 = F1 x L1 F1 M2 = F2 x L2 F2 L1 L2 L3 1.

C76

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Replaceable Rod Seal Strong, Corrosion-proof Barrel Rod seal can be quickly replaced, greatly extending the cylinder life.