m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.83

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

m, AFM: 0.3 ?m (99.9% filtered particle size)MAX 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 2) Note 3)200PolycarbonateSemi-standard (Steel)Relieving type0.38

m, AFM: 0.3 ?m (99.9% filtered particle size)MAX 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 2) Note 3)200PolycarbonateSemi-standard (Steel)Relieving type0.38

m, AFM: 0.3 ?m (99.9% filtered particle size)MAX 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 2) Note 3)200PolycarbonateSemi-standard (Steel)Relieving type0.38

m, AFM: 0.3 ?m (99.9% filtered particle size)MAX 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 2) Note 3)200PolycarbonateSemi-standard (Steel)Relieving type0.38

m, AFM: 0.3 ?m (99.9% filtered particle size)MAX 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 2) Note 3)200PolycarbonateSemi-standard (Steel)Relieving type0.38

m, AFM: 0.3 ?m (99.9% filtered particle size)MAX 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 2) Note 3)200PolycarbonateSemi-standard (Steel)Relieving type0.38

Nozzle Nominal Size: ø0.7, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 6 (12VDC), Electrical Entry: M (M Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: B (w/o Pressure Sensor), Air Pressure Supply, P Port

: M (w/o Supply Adapter, for Manifold), Vacuum, V Port: 2 (ø4, Straight)

.), Air Pressure Supply, P Port: M (w/o Supply Adapter, for Manifold), Vacuum, V Port: 2 (ø4, Straight)

Nozzle Nominal Size: ø0.7, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Y (DC Low Wattage Type (0.5W), Power Supply Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: B (w/o Pressure Sensor), Air Pressure Supply

Nozzle Nominal Size: ø0.7, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Y (DC Low Wattage Type (0.5W), Power Supply Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: B (Locking Type), Suction Filter: F (Suction Filter), Pressure Sensor Specs: B (w/o Pressure Sensor), Air Pressure Supply,

Nozzle Nominal Size: ø0.7, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: B (w/o Pressure Sensor), Air Pressure Supply, P Port

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Y (DC Low Wattage Type (0.5W), Power Supply Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: B (w/o Pressure Sensor), Air Pressure Supply

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: J1 (Supply: NC, Release: None), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: B (Locking Type), Suction Filter: F (Suction Filter), Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S.