Fieldbus System

(Except double wiring) Note 2) 16 C8 C10 C12 02 03 B CM 16 stations With 8 One-touch fitting With 10 One-touch fitting With 12 One-touch fitting Rc1/4 Rc3/8 Bottom ported Rc1/4 Mixed Note 1) Built-in silencer type does not satisfy IP67. Note 2) Specify wiring type of each station on the manifold In the case of the 16-output SI unit Symbol 01 Stations Note 1 station specification sheet.

AS

Inch size Metric size 01 02 23 2 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 03 05 07 09 11 13 Control type 04 06 08 10 12 0 1 Meter-out Meter-in Use 1/8" tube.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50 How to Order 30 03 RZ VHS Made to Order Standard Nil Body: Red X1 Built-in silencer (EXH port) X502 Pressure relief Optional specifications 3 port valve Des

Body size Port size Thread type Nil N F Symbol Port size Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 A spacer or spacer with bracket is required if the valve is combined with modular FRL. SUP SUP Applicable air preparation equipment Spacer with bracket part no. Pressure relief 3 port valve VHS20 VHS30 VHS40 VHS40-06 VHS50 IN OUT Spacer part no.

Motor฀Operated฀Auto฀Drain ADM200 Series

HowtoOrder 03 ADM200 1 Threadtype Operatingtime/Applicablecompressor Nil N F Rc NPT G Nil 2 sec/min (1 time/min) /3.7 to 37 kW 4 sec/min (2 times/min) /37 to 75 kW 6 sec/min (3 times/min) /75 to 110 kW 8 sec/min (4 times/min) /220 to 370 kW 4 6 8 Portsize Voltage OUT IN Symbol 04 03 3 8 3 8 100 VAC Hz 1 50 60 200 VAC Hz 50 60 240 VAC Hz 50 60 110 VAC Hz 50 60 220 VAC Hz 50 60 24 VDC 12 VDC

Series AMP

Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket Note) The bracket is not attached.

AS-R/AS-Q

Thread type G adopts face seal method. 02 1/4 03 3/8 04 1/2 Only meter-in type is available. The meter-out version is not available and therefore is not shown in this How to Order. 10

AFJ20 to AFJ40

Vacuum Filter AFJ20 to AFJ40 Symbol Vacuum lter SP AFJ40 AFJ30 AFJ20 How to Order ZCUK AMJ AFJ 30 q 03 e 80 B T Option/Nominal ltration rating/Type/Semi-standard: Select one of each for a to f. Semi-standard: When more than one specification is required, indicate in alphanumeric order.

AQ

Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Mass (g) Model IN OUT OUT EXH AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 M5 x 0.8 2 2.8 25 1 8 4 5.8 45 1 8 25 25 110 1 4 35 40 105 1 4 40 42 215 8 3 60 70 205 1 2 105 115 690 3 4

Miniature Regulator ARJ310 Series

Inch size ARJ310F-N01 5/32" 1/4" 03 07 674

Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 Series Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Series Regulator Symbol Regulator with backflow function

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 1 1 2 12 2 1 2 1 3 1 2 1 14 2 4 12 L 10 5 1 3 How to Order ARP 30 03 BE K Option / Semi-standard: Select one each for a to f.

ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow

■How to Order ASP-X369 Series ASP330F－01－06S－X369 Applicable tubing O.D. Body size Metric size Inch size Port size φ6 3 φ1/4” 06 07 1/8 standard Symbol Cylinder side φ8 4 φ5/16” 08 09 1/4 standard 01 R1/8 φ3/8” φ10 5

Rc1/4 2571 Body O.D.;52 03 Rc3/8 1239 Body O.D.:84 04. Rc1/2 1719. Body O.D.:98 06 Rc3/4 10 Rc1 Model Port size Rc1/4 Rc3/8 Rc1/2 Rc3/4 Rc1 XTO-2571 XTO-1239 XTO-1719

AS-R/AS-Q

Thread type G adopts face seal method. 02 1/4 03 3/8 04 1/2 Only meter-in type is available. The meter-out version is not available and therefore is not shown in this How to Order. 10

D

Note) Type 01 02 03 04 Inch size Metric size Elbow Universal 2 3 1/8" AS 23 01 3.2 03 05 07 09 11 13 04 06 08 10 12 4 5/32" 6 3/16" Control AS-FE U10/32 N01 N02 N03 N04 8 1/4" Meter-out Meter-in 0 1 10 5/16" Made to Order Refer to the below for details. KE 12 3/8" 1/2" With One-touch fitting AS-FG Note) For applicable tubing O.D. selection, refer to the Model on page 734.

Speed Controller: Standard Type Large Flow In-line Type AS Series

Free flow Controlled flow Weight (kg) Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Critical pressure ratio Critical pressure ratio Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) 1/4 3/8 1/2 3/4 1 1 1 10 3,600 4,800 6,700 8,100 16,900 38,500 47,500 60,800 AS420-02 AS420-03 AS420-04 AS500-06 AS600-10 AS800-12 AS900-14 AS900-20 2,500 5,000 6,600 6.9 13.9 18.3 28.1

AS-X785

Port size on the valve side 6, 8, 1/8 6, 8 10, 1/4 8 10, 3/8 10 12, 1/2 Sonic conductance [dm3/(sbar)] 0.8 1.3 1.4 3.1 3.2 5.1 5.8 Critical pressure ratio 0.25 0.25 0.25 0.25 0.25 0.25 0.25 How to Order 2 200 S AS 01 X785 Pilot port Port size Body size Thread type Seal method 2 1/8, 1/4 3 3/8 4 1/2 Nil R, Rc G G Nil Without sealant (for G) S With sealant (for R) Cylinder side 01 1/8 02 1/4 03

Filter Regulator Stainless Steel 316 and Special Temperature Environment (–40°C) Specifications AW30/40-X2622

How to Order 2 AW X2622 30 03 Option/Semi-standard: Select one each for a to d. Option/Semi-standard symbol: When more than one specication is required, indicate in alphanumeric order.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Regulator How to Order ARP 30 03 BG K 10 Less particle generation in a clean room Grease:Fluorinetype Packaging:Doublepackaging Clean room compliant Specialapplications 10 Clean room compliant, copper-free, fluorine-free, silicone-free Less particle generation in a clean room Wettedparts:Aluminumdie-cast Stainless steel, HNBR, NBR Grease:Lithiumsoapbasedtype Clean room compliant Clean room

How to Order E210/310/410 Series Modular Adapter

Modular Adapter How to Order E210/310/410 Series AC-A AF-A AF-A E310 03 U AR-A Size AL-A Piping port size 210 310 410 Size 310 Port size Uni thread AW-A Symbol 410 210 01 02 03 04 1/8 1/4 3/8 1/2 AC-B Thread AF-A Uni thread U AF-A AR -A -B Specifications AL-A Model E210 E310 E410 AW -A -B Port size 3/8 1/4 1/4 1/4 3/8 1/2 1/8 AW Piping I.D. 10 8 8 8 10 12 6 AG Fluid Air Ambient and fluid

FH150

(Including O-ring for element) 5 m 10 m 20 m Model FH150-02 FH150-03 FH150-04 Element size EP910-005N EP910-010N EP910-020N 55 x 90 Note 1) The symbol at the end of the element part no. indicates the hydraulic fluid type. N: Petroleum, V: Phosphoric ester, W: Water-glycol, Emulsion (10 m only) Note 2) Refer to page 528 for micromesh elements.