Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

mm L = 100 mm L = 80 mm L = 60 mm L = 40 mm 40 L = 240 mm L = 200 mm L = 160 mm L = 120 mm L = 80 mm L = 180 mm L = 140 mm L = 100 mm L = 60 mm 30 50 20 10 Workpiece weight (kg) Workpiece weight (kg) Workpiece weight (kg) 5 10 10 5 5 1 1 1 0.5 5 40 30 20 10 5 40 30 20 10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements

CLS

H BY B RR Z + Stroke ZZ + Stroke BW With rod boot 180, 200, 250 BV e BZ BG BE l f 15 h + l 4-MA Effective thread depth MB (To attach eyebolt) Z1 + l + Stroke ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) 125 140 160 180 200 250 B E FA GA L A AL BA BB BC BD BE BG BZ BV BW BP CDH10 C CX CT D EA F GB GC H J K KA M BY 0.1 0.3 +0.084 0 32 36 40 50 50 63 14 14 14 17 17 20 50 50 56 63 63 71

PF2M7.eng

Setting of OUT1 [1ot] OUT1 output configuration setting [HYS] Hysteresis mode [1_P] Normal output [ ] 50% of maximums rated flow PF2M701: 0.5 L/min, PF2M702: 1.0 L/min PF2M705: 2.5 L/min, PF2M710: 5 L/min PF2M725: 12.5 L/min, PF2M750: 25 L/min PF2M711: 50 L/min, PF2M721: 100 L/min [ ] 5% of maximums rated flow PF2M701: 0.05 L/min, PF2M702: 0.1 L/min PF2M705: 0.25 L/min, PF2M710: 0.5 L/min

LFE-OMZ0011

min 2.5 to 100 L/min 5 to 200 L/min Display flow range 0.424.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Set flow range 0.424.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Zero-cut flow *2 0.4 L/min 2.0 L/min 4 L/min Min. setting unit 0.1 L/min 0.5 L/min 1 L/min Accumulated volume per pulse (Pulse width:50ms) 0.1 L/pulse 0.5 L/pulse 1 L/pulse Operating Fluid temperature *3 0 to 85oC (No condensation

HRX-OM-Q026

less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L]

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

MHR3-10R/MDHR3-10 MHR3-15R/MDHR3-15 0.6 L L L L 0.6 Pressure ( MPa) Pressure ( MPa) 0.5 0.5 Gripping point 0.4 L: Distance to the gripping point 0.4 Internal grip 0.3 0.3 0.2 0 10 20 30 40 50 0.15 0.2 0 10 20 30 40 50 Gripping point L (mm) Gripping point L (mm) Gripping point Effective Gripping Force Guidelines for the selection of the gripper with respect to component mass Selection of

Rotary Gripper Series MRHQ

0.7MPa 0.5MPa 40 Gripping force N 0.6MPa 40 Gripping force N 0.5MPa 0.4MPa 0.4MPa 30 30 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal gripping Pressure 0.7MPa Pressure 0.7MPa 60 100 Pressure 0.7MPa Pressure 0.7MPa 0.6MPa 0.6MPa 0.6MPa 0.6MPa 50 80 0.5MPa 0.5MPa Gripping force N 0.5MPa 0.5MPa

Compact

45 L 15 50 CQ-M3 x 50 L 20 55 CQ-M3 x 55 L 25 60 CQ-M3 x 60 L 30 65 CQ-M3 x 65 L 35 70 CQ-M3 x 70 L 40 75 CQ-M3 x 75 L 45 80 CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12

Single Axis Electric Actuator Series LJ1H

Nil W Axial Right Left Top Bottom F R L T B Cable length Motor specification 2m 3m 4m 5m 2 3 4 5 Motor output Standard motor Matsushita Electric Industrial Co., Ltd.

Compact Cylinder with Air Cushion

Knuckle Pin (common with double clevis pin) Rod End Nut d d Dd9 C m l L t m t H B Material: Carbon steel mm Material: Carbon steel mm Part no. Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 Applicable bore size (mm) Snap ring l D d H B C Part no.

CNS

L Applicable bore size (mm) Applicable cotter pin Dd9 L l Part no.

PF-OMN0011_C

min (20 L/min 0) 7112 L/min (7 L/min 0) 3.545.0 L/min (3.5 L/min 0.0) 1.718.0 L/min (1.7 L/min 0.0) 0.354.50 L/min (0.35 L/min 0.00) 0.354.50 L/min 1.718.0 L/min 3.545.0 L/min 7112 L/min 20280 L/min 0.01 L/min 0.1 L/min 1 L/min 2 L/min (50 ms) 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse L/minL 0.5F.S. 0.5F.S. 0.5F.S. 0.5%F.S.(25 ) 9.9 L 9 L 1 0.1L 0.5L 1L NPN

LV50-OMQ0002

min 2.5 to 100 L/min 5 to 200 L/min Display range 0.424.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Set point range 0.424.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Zero-cut flow *2 0.4 L/min 2.0 L/min 4 L/min Min. setting unit 0.1 L/min 0.5 L/min 1 L/min Accumulated volume perpulse (Pulse width=50ms) 0.1 L/pulse 0.5 L/pulse 1 L/pulse Fluid temperature *3 0 to 85oC (No condensation or freezing

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

the right. 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L (mm) Gripping point L (mm) F1 F1 F1 12-5-20 21 3 Finger Rotary Actuated Air Gripper Series MHR3/MDHR3 Construction !

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Features 1 In-line Air Filter Filter Variations Flow rate under vacuum condition Flow rate under positive pressure Series AF AF10 AF20 to 350 L/min (ANR) For positive pressure For vacuum pressure to 100 L/min (ANR) to 350 L/min (ANR) ZFC77 Flexible mounting orientation Easy to install to the line Spacesaving to 20 L/min (ANR) to 100 L/min (ANR) ZFC54 to 100 L/min (ANR) ZFB ZFA to 200 L/min

LEC-OM071xx

D i s p l a y a n d SigmaWin+TM 2.

Cylinder with Lock Series CNS

G FA Unlocking port 2-Rc(PT) P Cylinder port Width across flats KA MM D EA E VA AL CX CZ CT N N U A K F BN L RR S + Stroke H ZZ + Stroke Z + Stroke 2-MA Effective thread depth R CL T GR GL With rod boot Q V 75 15 40 l C B 4-J h + l ZZ1 + l + Stroke Z1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CDH10 CL CT CX CZ D E EA F FA 125 140 160 50 47 145 205 1/2 3/8 115 25

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Knuckle pin (Common with double clevis pin) Rod end nut d d Dd9 C m L m l t t H B Metric Threads Metric Threads Bore size (mm) Bore size (mm) Snap ring d H B C t Dd9 l m Part No. Part No.

LZ-OM004xx

F G H [Tightening torque] No.LZ-OM00401 B (1/3) Electric Cylinder LZC series L[]ZC[]3[] 1.5 8 M4 x 0.7 x 6 deep [0.75Nm ] L[]ZC[]5[] 3 13 M5 x 0.8 x 8 deep [1.5Nm ] L[]ZC[]3[] M4 screw 0.75Nm M4 screw 0.75Nm L[]ZC[]3[] 4.5 8 2 7.5 11.5 12 L[]ZC[]5[] 6.5 13 3.2 10.7 16.7 15 L[]ZC[]5[] M5 screw 1.5Nm M6 screw 2.6Nm Model no.