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(mm) Model KQGE04-00 KQGE06-00 KQGE08-00 KQGE10-00 KQGE12-00 4 6 8 10 12 KQGL04-M5 KQGL04-01S KQGL06-M5 KQGL06-01S KQGL06-02S KQGL08-01S KQGL08-02S KQGL08-03S KQGL10-02S KQGL10-03S KQGL12-03S KQGL12-04S M5 4 R1/8 M5 6 R1/8 R1/4 R1/8 8 R1/4 R3/8 R1/4 10 R3/8 R3/8 12 R1/2

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

(Example) SS3YJ7-20-03 . 1 set (manifold base) SYJ712-5LZ-01 . 2 sets (valve) SYJ700-10-1A . 1 set (blanking plate assembly) SS3YJ7-42R-03-01 . 1 set (manifold base) SYJ714R-5G . 2 sets (valve) SYJ700-10-2A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

PSE530/200

Specifications Model PSE530-M5 PSE531-M5 101 to 101 kPa PSE532-M5 PSE533-M5 Rated pressure range 0 to 1 MPa 0 to 101 kPa 0 to 101 kPa Proof pressure 1.5 MPa 500kPa Air/Non-corrosive gas Fluid 12 to 24 VDC (Ripple 10% or less) Power supply voltage Current consumption 15 mA or less Output specification Analog output (1 to 5 V, Output impedance: Approx. 1 k) Accuracy 2% F .S. or less (Within

Digital Pressure Switch

For detecting fine pressures, warm up the product for 10 to 15 minutes. Check if the product satisfies the specified accuracy after 10 minutes warm up time.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Specifications Model PSE530-M5 PSE531-M5 101 to 101kPa PSE532-M5 PSE533-M5 Rated pressure range 0 to 1MPa 0 to 101kPa 0 to 101kPa Proof pressure 1.5MPa 500kPa Air, Non-corrosive gas Fluid 12 to 24VDC (Ripple 10% or less) Power supply voltage Current consumption 15mA or less Output specification Analog output (1 to 5V, Output impedance: Approx. 1k) Accuracy 2% F.S. or less (within rated pressure

JCRB-OM00003

[J] 0.00015 0.001 0.003 0.02 0.04 Radial 15 15 25 30 60 Shaft load N Thrust 10 10 20 25 40 Port size M5 0.8 (90, 180 ) M3 0.5 (270 ) M5 0.8 B Note1) Size 10 requires at least 0.35 MPa of operating pressure to reach the minimum rotation time (0.03 s/90).

ZSE40/ISE40

female threads) T1: NPT 1/8 (With M5 female threads) ZSM Rc 1/8 Reverse pressure two directions B R 1/8, NPT 1/8 PF2 M5 x 0.8 female threads Panel mount (ZS-22-A) Rc 1/8 IF Data E M5: M5 x 0.8 (Female threads) C4: With 4 One-touch fitting C6: With 6 One-touch fitting Wall mount Wall mount Panel mount + Front protective cover (ZS-24-C) M5 x 0.8 F 4, 6 One-touch fitting Option When optional

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

0X: M5 x 0.8 0XY: M6 x 1.0 ISG 0X: M5 x 0.8 0XY: M6 x 1.0 ZSM Connector type ZSE3-0X-C 7 50.6 Vacuum supply port Vacuum pad connection port 20.5 RESET button DOWN button SET button Pneumatic circuit UP button Lead wire length 600 50 (3000) 10 58 PV 18 10.2 8 6.5 10.25 10 22.6 5.75 ZSE3-0X-C-D Vacuum pad connection port 2 x 3.3 Mounting hole Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1.0 0X

Material: C (Aluminum Cover, SPCD Case, NBR Gasket/O-ring, Nylon Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 10 μm

Material: C (Aluminum Cover, SPCD Case, NBR Gasket/O-ring, Nylon Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 10 μm, Element Seal Material: N (NBR), Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: G [Fiber (Honeycomb), Glass Fiber Material], Nominal Filtration Accuracy: 10 μm

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: S (Sintered Metal, Stainless Steel Material), Nominal Filtration Accuracy: 10 μm, Element Seal Material: N (NBR), Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 04 (1/2 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket)

Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket)

Material: C (Aluminum Cover, SPCD Case, NBR Gasket/O-ring, Nylon Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 10 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)

Material: C (Aluminum Cover, SPCD Case, NBR Gasket/O-ring, Nylon Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket), Made to Order: X78 (Differential Pressure Indication Switch)