Ejector Valve Unit Series ZYY/ZYX 1

plug connector: M, MN, MO ZF 0.5 W (With indicator light: 0.6 W): Series ZYY3000 Power consumption ZP 0.6 W (With indicator light: 0.65 W): Series ZYX3000 Effective area (Cv factor) 4.68 mm2 (0.26) ZCU Series ZYX3000 AMJ Misc. 13-8-7 8 Series ZYY/ZYX Electronic Vacuum Pressure Switch Specifications ZSE1-00-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 Model -X129 (-

Modular Type Regulator Series AR

w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

:ri r:r, ':,:: r:, L Type Plug Connector (L) r' M Type Plug Connector(M) NW5J3-S46+!!

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

port 3 22.5 3 22.5 84 96 e ng e ng ra 3 ra on on ti A port ta 3 ti 90 4 ro ta 7 ro m 1 A port A port u Clockwise m e e m g s 3 u i ni n w im k C ra c l o Mi 6 3 8 ax n o 1 ti M ta ro e m g u m n ni Mi 180 e ra C s l i o w c k n tio ta ro m mu xi Ma Positioning pin hole Positioning pin hole Position of bottom positioning pin hole Position of bottom positioning pin hole With external shock

AR Series Modular Type Regulator

w Component Parts No.

Heavy Duty Stopper Cylinder Series RSH/RS1H

Transfer direction 270 Port 180 Port Transfer direction Flange Transfer direction Axial direction Option With cancel cap With lever detection switch With lock mechanism V m/min Work W Work W Work W ON OFF Work W Work W Cancel cap Lever detection switch Bracket The cancel cap holds the lever horizontally allowing a pallet to pass.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Please consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 5 m Z (Example) M9NWZ None N (Example) H7CN 3 m L (Example) M9NWL Since there are other applicable auto switches than listed above, refer to page 14 for details.

HEC_W-E

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N

OMU0023

[m] Note1) 1 More than 0 Note 1) No D9115 4 AREA B position 2 [m] Note1) 1 More than 0 Note 1) No D09117 Writing is not available. to D0911F Note 1: The maximum value is the same as for the Card Motor maximum stroke [m].

ML2B

RZQ Symbol Specifications MI W S -X416 Holder mounting bracket I 5 m, 10 m, 15 m, 20 m Cable: 7, 6 core twisted pair shielded wire, oil, heat and frame resistant cable Extension cable (Option) CEP1 -X417 Holder mounting bracket II Note) Digital error under Controller (CEU2), Counter (CEU1 or CEU5) is included.

ML2B

RZQ Symbol Specifications MI W S -X416 Holder mounting bracket I 5 m, 10 m, 15 m, 20 m Cable: 7, 6 core twisted pair shielded wire, oil, heat and frame resistant cable Extension cable (Option) CEP1 -X417 Holder mounting bracket II Note) Digital error under Controller (CEU2), Counter (CEU1 or CEU5) is included.

MLGC

e r t y u i o !

MLGC

e r t y u i o !

SZ3000

(Max. 20 stations) Symbol 02 Stations 2 stations Supply/exhaust block assembly mounting position Symbol D U B M Valve stations Layout (for special specifications) wq q w e n m Pilot system Symbol Nil R ... ...

CJP

Y-P010 Y-P015 -XC19 Intermediate stroke (Spacer type) (25) 93 148 -XC22 Fluoro rubber seals 5 mm stroke is with one switch.

CJP

Y-P010 Y-P015 -XC19 Intermediate stroke (Spacer type) (25) 93 148 -XC22 Fluoro rubber seals 5 mm stroke is with one switch.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-m-L3m-mmm : 0 x 00016F (367) PF2M701-m-L4m-mmm : 0 x 000170 (368) PF2M725-m-Lm-mmm : 0 x 00017D (381) PF2M725-m-L2m-mmm : 0 x 00017E (382) PF2M725-m-L3m-mmm : 0 x 00017F (383) PF2M725-m-L4m-mmm : 0 x 000180 (384) PF2M702-m-Lm-mmm : 0 x 000171 (369) PF2M702-m-L2m-mmm : 0 x 000172 (370) PF2M702-m-L3m-mmm : 0 x 000173 (371) PF2M702-m-L4m-mmm : 0 x 000174 (372) PF2M750-m-Lm-mmm : 0 x 000181

REC

Example) If P = 0.6 MPa, a max. stroke = the respective stroke in the graph x MVGQ 49 45 39 30 0.7 Rod side flange style: F Head side flange style: G 259 237 211 168 0.3 Foot style : L L CC 0.6 0.5 199 183 162 129 0.5 W W W F RB Figure (1) 168 154 136 109 0.7 Load factor J 119 110 97 76 0.3 m 90 83 73 56 0.5 G D74 68 60 46 0.7 1) = 0.7 or less -X 20m Data 2) = 0.5 or less m 3) = 0.9

VQC

D-side w How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

It is recommended for vacuum application. w Cover y Coil Caution 1) Since this valve has slight air leakage, it can not be used for holding vacuum (including positive pressure holding) in the pressure container. 2.