Regulator for 2 MPa ARX 20

ARX20-02 0.90 0.80 0.90 0.80 Downstream pressure MPa Downstream pressure MPa 0.70 0.70 0.60 0.60 0.50 0.50 0.40 0.40 0.30 0.30 0.20 0.20 0.10 0.10 0 0 100 200 300 400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 Flow rate l/min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15

EXxx-OMU0020CN

Valve diagnostics 1 . 5-4 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01() 1 Valve 2, 3 diagnostics 01() 2 Valve 4, 5 diagnostics 01() 3 Valve 6, 7 diagnostics 01() 4 Valve 8, 9 diagnostics 01() 5 Valve 10, 11 diagnostics 01() 6 Valve 12, 13 diagnostics 01() 7 Valve 14, 15 diagnostics 01() 5.1.1.4.

Guide Cylinder/Compact Type Series MGC

l Allowable eccentric load W (N) Allowable eccentric load W (N) Eccentric distance from center of cylinder to load center of gravity l (mm) Eccentric distance from center of cylinder to load center of gravity l (mm) (Set the maximum allowable load so that it does not exceed the following percentages of the theoretical output: 40% for 20, 50% for 25 and 32, 55% for 40 and 60% or less for 50

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

(ANR)) Air flow (l/min (ANR)) One-touch fitting connection One-touch fitting connection Inlet pressure (MPa) Inlet pressure (MPa) Air flow (l/min (ANR)) Air flow (l/min (ANR)) Noise Level (Initial conditions) Measuring conditions: Inlet pressure 0.5 MPa Measuring distance: 1 m ahead obliquely at 45 Sound source: Orifice plate (JIS B 8379) for sound source When Series ANA1 is mounted Without

VS7-6

Silencer for pilot EXH 1.19-22 VS7-8 Manifold/Dimensions L: Dimensions Common EXH n L L1 Equation n: stations L1=56n+64 L2=56n+80 n: stations L1=56n+90 L2=56n+106 M if ld i ht l f l M 0 96 0 77 (k ) Size 1 2 3 4 5 6 7 8 9 10 120 176 232 288 344 400 456 512 568 624 1 2 L2 136 192 248 304 360 416 472 528 584 640 L1 146 202 258 314 370 426 482 538 594 650 3 4 SV L2 162 218 274 330 386 442 498

25

The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

BP1000

47.0 2.35 01 59.7 Hastelloy is a registered trademark of Haynes International.

NCQ8

Dd9 L m d t l JM-01 JM-02 JM-03 JM-04 JM-05 JM-08 JM-10 056(9/16") 075(3/4") 106(1 1/16"),150(1 1/2") 200(2"), 250(2 1/2") 300(3") 400(4") PS-015 PS-02 PS-03 PS-05 PS-08 PS-10 -0.030 -0.060 -0.040 -0.076 -0.040 -0.076 -0.050 -0.076 3/16 5/16 3/8 1/2 3/4 7/8 0.63 0.827 1.614 1.969 2.52 2.83 0.175 0.29 0.352 0.468 0.70 0.82 0.057 0.065 0.065 0.075 0.102 0.102 0.018 0.029 0.029 0.039 0.046 0.046

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Series VCL

J L Bracket part no.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

J L Bracket part no.

Speed Controller with

AS2002F-04 When connecting 4 pcs. and mounting L-brackets on both sides Speed controller AS2002F-04 4 pcs. L-bracket AS-20L 2 pcs.

Micro-Mist Separator with Prefilter Series AMH

:l 3/86 female thread Maintenance l--I space ~ Drain H I I Dimensions with mounting bracket Model Port size A B C D E F G I J 1 K 1 L 1 MI N I 01 P I 01 RI s B AMH850 11 /2 , 2 460.5 42 348 220 57.5 220 10 463.51 180 I 30 I 15 I 24 I 13 1120 1184 1 220 1110 1 18 I 6 6 SeriesAMH Made to Order Specifications ICD With Differential Pressure Gauge (GD40-2-01) I@ With IN-OUT Flange For ease of

ML1

CE2 ML2B ML1C Mounting Position (Stroke End)/Reed Switch Mounting Position (Stroke End)/Solid State Switch D-E73A (L), D-E76A (L), D-E80A (L) D-M5B (L), D-M5N (L), D-M5P (L) D-M5BW (L), D-M5NW (L), D-M5PW (L) D-M5NTL, D-M5PTL REA REC RHC MTS CC Lead wire clamp/Lead wire cap (option) Series Lead wire clamp Lead wire cap ML1C LC-01 LP-01 Unit: mm Lead wire clamp/Lead wire cap (option) 25 32

Speed Controller with

AS2052F-A AS1002F-A AS2002F-A 500 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 01, 23, 03, 04, 06, 07 100 08, 09 06, 07 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 400 200 06, 07 03, 04 300 50 200 100 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002F-A AS4002F-A 1500

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-06 AS121FG-U10/32-07 18.3 23.1 11.7 13.5 18.1 22.9 11.6 12 6 1/4" 13.5 AS221FG-01-04 AS221FG-N01-01 12.7 20.4 27.5 9.3 4 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 14.3 13.5 20.4 27.5 11.6 6 5/32" 14.2 31.1 36.1 12 32.1 27.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 12.7 14.3 23.1 30.2 19 18.5 25.3 32.4 15.2 11.4 36.1 8 3/16" 31.1 32.1 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01

S

-01-00 plus Actuator Type XT34 32 Push ButtonExtended 33 Push ButtonFlush 34 Twist Selector 36 Key Selector P U S H B U T T O N C O L O R R Red G Green B Black S Steel K E Y T O DIMENSIONAL T A B L E S S A F E T Y F.O.F.

NCQ8

L M9NL 197in (5 m) .

PSxx-OMG0001CN

kPa MPa(500 kPa kPa) ZS-28-A 2 m ZS-28-B (M35 L 2 ) ZS-28-C 1 ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-27-01 1 -8No.PS-OMG0001CN-H LCD OUT1 OUT2 UP SET DOWN (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 (UP)ON/OFF (DOWN)ON/OFF (SET) -9No.PS-OMG0001CN-H M3X5 L(2) 0.50.7 Nm M35L ZS-28-B M35L M38 L(2 ) M38L ZS-27-01 ZS-27-C 90 2 -10No.PS-OMG0001CN-H 1 a a1DIN b (b -

SRP

min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Fluid: Air Initial setting