5 Port Solenoid Valve Series SQ1000/2000

position One-touch fitting Effective area mm (Cv factor) Single/Double Double (Latching/ Double solenoid) Pressure center Exhaust center Series Closed center C3 C4 C8 C6 Dual 3 port valve (3.2) (4) (8) (6) Single SQ130 Metal seal SQ131 Rubber seal SQ230 Metal seal SQ231 Rubber seal 3.2 (0.18) 4.5 (0.25) 11.7 (0.65) 14.8 (0.82) 18 Series SQ1000/2000 How to Order Manifolds SS5Q 3 (-00T) JD0 1 08

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Symbol Nil 1 Clean packaging equivalent to Class M3.5 Standard packaging equivalent to Class M5.5 Size 1 2 3 4 5 6 7 Packaging K Symbol 1 Type Male M Applicable tubing size H Metric Size Inch Size Applicable tubing size Applicable tubing size 3 x 2 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 25 x 22 Size Size Symbol Symbol KK 03 07 11 13 19 25 32 03 04 06 08 10 12 19 25 1/8" x 0.086" 1/4" x

KF

KFN-04 KFN-06 KFW-04 KFW-06 KFV-04 KFV-06 KFS-04 KFS-06 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in8R 1/4-02-08AS2211FG-02-08-02-08-02-08

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in8R 3/8-03-08AS3211FG-03-08-03-08-03-08

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in8R 1/4-02-08AS2211FG-02-08-02-08-02-08

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in8R 3/8-03-08AS3211FG-03-08-03-08-03-08

Fieldbus System

623 635.5 648 648 660.5 673 685.5 698 710.5 723 723 735.5 748 760.5 773 785.5 585.5 598 610.5 623 623 635.5 648 660.5 673 685.5 685.5 698 710.5 723 735.5 748 748 760.5 773 785.5 798 810.5 810.5 823 635.5 648 648 660.5 673 685.5 698 710.5 710.5 723 735.5 748 760.5 773 785.5 785.5 798 810.5 823 835.5 848 848 860.5 873 40 For Series EX600 Series VQC2000 RoHS How to Order Manifold VV5QC 2 1 08

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Inch size Metric size 3.2 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 With One-touch fittings Use 1/8" tube. 2 Speed Controller with One-touch Fittings Panel Mount Type, In-line Type Needle Valve/Flow Characteristics AS1001F AS2001F AS2051F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (/min (ANR)) Flow rate

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Note) Made to Order Refer to page 743 for details. 1/4 standard Metric size Inch size 3/8 standard 3.2 01 03 05 07 09 11 13 23 04 06 08 10 12 1/8" 1/2 standard 5/32" 4 Caution 3/16" 6 With One-touch fittings 1/4" 8 Be sure to read this before handling the products.

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

CL

BT-08 BT-12 BT-12 BT-16 Rod side flange style CA-F06 CS1-F16 CS1-F14 CS1-F12 CA-F05 CA-F10 CA-F04 CA-F08 DBD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BS1-125 BS1-140 BS1-160 CA1-F06 CS1-F16 CS1-F14 CS1-F12 CA1-F05 CA1-F10 CA1-F04 CA1-F08 Head side flange style CA1-C06 CS1-C16 CS1-C14 CS1-C12 CA1-C05 CA1-C10 CA1-C04 CA1-C08 Single clevis -X BA-04 BA-05 BA-06 BA-08 BA-10 Double clevis CA1-D06

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

) E F H J M Q QL S W Y Z AA Model 23 25 38 33.5 37 28 8 5 42 23.5 45 2 11-/22-MXP6-51 30 35 53 48.5 47 37 11 10 42 30 60 9.5 11-/22-MXP6-10 834 Air Slide Table MXP/MXPJ6 1122Dimensions: MXP10 11222 x M3 x 0.5 depth 5 Z 3 Metal stopper V K C 4 5 C Max. 5.5 20 G Without stroke adjuster N M Max. 3.5 C Stroke: S 2 x M3 x 0.5 depth 3 11-/22-MXP10-10 A Width across flats 1.5 H 13 (Plug: MGP12-08

VZM500

Panel mounting hole Toggle lever VZM550-01-08 T.T.

SJ3A6

Symbol Stations 02 08 2 stations 8 stations 2 stations 8 stations 1 3 2 D side U side Stations G: Flat ribbon cable (PC wiring, with power supply terminal) Symbol Stations 02 08 2 stations 8 stations SS3J3-V60PD2-06D 1 set (Manifold part no.)

RB/RBL/RBQ

/Cap (Resin part only) RBC C 08 Applicable model 08 10 14 20 27 RBC2015 RBC2725 RBC0805, 0806 RBC1006, 1007 RBC1411, 1412 Cap Cap cannot be mounted for basic type. Please place an order with cap type from the beginning.

Table of Contents

BA-10 BA -01 BA -02 BA -32 BA -04 BM2 -020 BM2 -025 BM2 -032 BM2 -040 BA -05 BA -06 BA -08 BA -10 BA01 BA02 BA32 BMA2-050 BMA2-063 BMA2 -020 BMA2 -025 BMA2 -032 BMA2 -040 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available.

CL

BT-08 BT-12 BT-12 BT-16 Rod side flange style CA-F06 CA-F05 CA-F10 CS1-F12 CA-F04 CA-F08 CS1-F14 CS1-F16 DBD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BS1-125 BS1-140 BS1-160 CA1-F06 CA1-F05 CA1-F10 CS1-F12 CA1-F04 CA1-F08 CS1-F14 CS1-F16 Head side flange style CA1-C06 CA1-C05 CA1-C10 CS1-C12 CA1-C04 CA1-C08 CS1-C14 CS1-C16 Single clevis -X BA-04 BA-05 BA-06 BA-08 BA-10 Double clevis CA1-D06

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Model K VCKL0604-02F H KFN-06-X2 K VCKL0806-02F H KFN-08-X2 K VCKL1075-02F H L Union nut C3604BD + Ni plated 1 1 set unit KFN-10-X2 K VCKL1008-02F H K VCKL1209-02F H KFN-12-X2 K VCKL-02F H K VCKL0604-02F H KFS-06 K VCKL0806-02F H KFS-08 K VCKL1075-02F H M Sleeve Nylon 1 1 set unit KFS-10 K VCKL1008-02F H K VCKL1209-02F H KFS-12 N Gasket VCKK-4-1 Nylon 1 10 set unit 23 Troubleshooting (Valve

HRX-OM-X010

Fuse Cutout FLT 08 ALARM09 Reservoir High Temp. FLT 09 ALARM10 Return High TempWRN 10 ALARM11 Reservoir High Temp.