Stations: 04 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: without Option, Exhaust: F (Individual Port Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: without Option, 1st Nominal Nozzle Size: 1 (ø0.7), 1st Selection

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: BD (with Manifold Options B & D), Exhaust: Q (Vacuum Pump System), Pressure Switch for Vacuum/Pressure Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: JK (with Unit Options J & K), 1st Nominal Nozzle Size: 0 (for

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: without Leadwire, Unit Options: without Option, 1st Nominal Nozzle Size: 4 (ø1.5), 1st Selection Supply Valve and Release Valve

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: without Option, 1st Nominal Nozzle Size: 3 (ø1.2), 1st Selection Supply Valve and

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: K (Vacuum Break Flow Adjusting Needle, Screwdriver Operation

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: F (Individual Port Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: E (Vacuum Break Flow Adjusting Needle, Screwdriver Operation Type Long Lock

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: without Option, 1st Nominal Nozzle Size: 3 (ø1.2), 1st Selection

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: K (Vacuum Break Flow Adjusting Needle, Screwdriver

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: J (Vacuum Break Flow Adjusting Needle, Round

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: K (Vacuum Break Flow Adjusting Needle, Screwdriver

AC Servo Motor Driver (SSCNET Type)

(Default) Spare (SW2-2) Rotary axis setting switch (SW1) Description Display 0 Axis No.1 01 1 Axis No.2 02 2 Axis No.3 03 3 Axis No.4 04 4 Axis No.5 05 5 Axis No.6 06 6 Axis No.7 07 Down 7 Axis No.8 08 (Be sure to set to the 8 Axis No.9 09 "Down" position.) 9 Axis No.10 10 A Axis No.11 11 B Axis No.12 12 C Axis No.13 13 D Axis No.14 14 E Axis No.15 15 F Axis No.16 16 -12- 5.

ATX-OM-F003E

CDecember 2021 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved

IDX-OM-O004C

ILS FM OLR PTC OLR ILS PTC PTC CM PRS TB C11 C11 FM PRS P 6.4 2 6 3 7.A A 7.1 7.2 A (10) 7.3 7.4 IDF15E1-10/20-A m 3/min(ANR) 1) 50Hz 1.2 60Hz 1.3 10 1) ANR 65% 2) 7 1 8.C C 8 8.1 8.2 8.3 1) 2) 81 9.K K 9 9.1 ( ) 9.2 1.6MPa AD48-8-X2110 KQ2H10-02S 10 IDF15E1-10-K IDF15E1-20-K 1) IDF-S0086 N.O. () 1) IDF-S0002 1 9 1 10.L L 10 10.1 ( ) 10.2 1.6MPaADH4000-04

IDX-OM-X011

Description Contents of check Date IDF60/70/80/90 Series 11.1 Inspection record 11-1 Revision Rev ANobember,2020 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved

IDX-OM-Y002

Description Contents of check Date IDF60/70/80/90 Series 11.1 Inspection record 11-1 Revision Rev AApr,2023 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2023 SMC Corporation All Rights Reserved

IDX-OM-W014

2) IDU Series 7-1 71 IDX-OM-W014 8 K 8 K 8-1 ( ) 8-2 1.6Mpa AD48-8-A-X2112 10 KQ2H10-02AS IDU3E/6E/8E-*-K N.O. () 0.151.6MPa IDU Series 8-1 8 1 IDX-OM-W014 8 K IDF-S1926 () 1 AD48-8-A-X2112 1 1) 2019 3 2019 2 SERIAL No.XP AD48-8-X2110 IDF-S0086() SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S0529 1 IDU Series 8-2 8 2 IDX-OM-W014 9 L 9 L 9-1 ( ) 9-2 1.6MPaADH4000-04

IDX-OM-W023

2) IDU Series 7-1 71 IDX-OM-W023 8 K 8 K 8-1 ( ) 8-2 1.6Mpa AD48-8-A-X2112 10 KQ2H10-02AS IDU8E/11E/15E1-*-K N.O. () 0.151.6MPa IDU Series 8-1 8 1 IDX-OM-W023 8 K IDF-S1926 () 1 AD48-8-A-X2112 1 1) 2019 3 2019 2 SERIAL No.XP AD48-8-X2110 IDF-S0086() SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S0529 1 IDU Series 8-2 8 2 IDX-OM-W023 9 L 9 L 9-1 ( ) 9-2 1.6MPaADH4000-04

IDX-OM-W053

(Ex.) 12-2 (Rc1/2) 25mm (R1/2) (R1/2 (L ) 12 1 12 L ADH4000-04 N.O() 1.6MPa 0.05 1.6MPa 400cc/min(0.7MPa ) 12-3 1. Rc1/2 1) R3/4: 28 30Nm R1/2 ,R3/4 2. 3. (27mm)(22mm) () () () 12-4 1. (1 ) 2. 3. 0 12 2 13 R 13 R R (GFCI) GFCI 1 GFCI 13-2 13-1 1. 2. 3. 4.

IDX-OM-W031

Heavy duty auto drain (ADH4000-04) Ball valve Drain tube Heavy duty auto drain assembly IDFA Series 9-1 Safety instructions 9 1 IDX-OM-W031 Air Dryer 9 Specification for Option L Model IDFA22E to 75E-23-L Operating pressure Note) 0.15 to 1.6MPa Auto drain type Floating type Auto drain valve type N.O.

Main Line Filter

. -10- FGX-OM-P003-A Revision history New : 2012/04 The overall revision Ver.A: 2012/07 P7 Change of How to Order URL http://www.smcworld.com 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: +81 3 5207 8249 Fax: +81 3 5298 5362 Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2012 SMC Corporation All Rights Reserved -11-