/

T 67.5 U 30 30 33 T 62.5 U 48.5 T 63.5 U 65.5 V 53.5 T 62.5 V 69.5 a 42 51 56 b 66 78 86 d 57 74 81 e 34 51 58 f 39 63 80 90 14 17 20 28 35 42 3/8, 1/2 3/4 1 30 30 35 27 27 32 34 43 47 103.5 19.5 44.5 24 29 33 3.5 4.5 4.5 29 37 43 VXED2140 VXED2150 VXED2260 115 19.5 51.5 74 69 48.5 70 65.5 53.5 69 100.5 69.5 45.5 133 22.5 60 88 83 51.5 84 68.5 56.5 83 103.5 72.5 49.5 31 Pilot Operated 2 Port

CATALOG VC10

Holes #8-32 UNC THD x .23 (5.8) DEEP . .30 (7.6) 2 PLACES AS SHOWN. .20 (5.1) .30 (7.6) ADD .232 (5.9) FOR SPADE TERMINAL COIL OPTION * 3-Way Normally Closed Piped Exhaust 42 SOLENOID VALVES . . . Table A LW 2.5 Watts MAXIMUM OPERATING PRESSURE DIFFERENTIAL MODEL TYPE FLOW CONFIGURATION VALVE SUFFIX NO.

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

PRESSURE SWITCH WITH PIPING ADAPTERIS10E-20-D to IS10E-60-D Port size A B C D E F 1/81/43/8 24 77.8 60.3 42 24 1/43/81/2 27 85.8 64.3 53 30 1/43/81/23/4 30 93.8 68.3 71 36 3/4 36 1 46 3/4 39 46 1 1/41 1/2 42 63 9.5 106.8 74.8 90 Model IS10E-20-D IS10E-30-D IS10E-40-D 8.5 31 96.8 69.8 71 IS10E-50-D IS10E-60-D -21- Revision history 50,60 size added,Corrected. May. 2021.

Digital Flow Switches

Tighten screws 1/4 to 1/2 turn after the heads are flush with the panel. 6 Red CH3_OUT1 5 Gray CH2_OUT1 4 White N.C. 3 Black CH1_OUT1 2 Blue DC () 1 Brown DC (+) Panel mounting adapter Panel (ZS-26-B) Waterproof seal (accessory) 2 m 42 Digital Flow Switch for Deionized Water and Chemicals Series PF2D A single controller can monitor the flow rate of 4 different sensors.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

10, 16, 20 (mm) Bore size (mm) Stroke range (mm) A B FD FT FV FX FV 10 10 to 40 49.5 31.5 4.5 5.5 30 45 FX FT L B + Stroke 16 10 to 60 54 34 6.6 8 39 48 FZ 20 10 to 60 57.5 37.5 6.6 8 42 52 A + Stroke 2-FD 25 10 to 50,75,100 64 42 5.5 8 48 56 30 10 to 50,75,100 70.5 48.5 5.5 8 54 62 25, 30, 40 40 10 to 50,75,100 72 50 6.6 9 67 76 Bore size (mm) FZ L M FV 10 55 18 FX FT L B + Stroke 16 60

Compact Type Dual-Rod Cylinder Series CXSJ

Dimensions/Weight Overall length Reverse mounting Width Symmetric mounting CXS standard CXSJ Height Note) Bore size (mm) Dimensions (mm) Weight (kg) Series Height Width Overall length 0.057 CXSJ6 42 + Stroke 32 13.4 6 CXS6 0.095 58.5 + Stroke 37 16 0.114 CXSJ10 56 + Stroke 42 15 10 CXS10 0.170 72 + Stroke 46 17 Reverse mounting mechanism 0.219 CXSJ15 70 + Stroke 54 19 Reverse mounting 15

Cylinder with Lock Series MNB

Bore size (mm) Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH DD A B A+ B+ 90 Z H10 (Aperture) 32 40 50 63 80 100 54 42 32 22 44 14 62 9 6.6 7 33 224 10 15 + 0.058 0 10 32, 40 MB-B03 45 25 160 63 42 32 22 44 14 62 9 6.6 7 33 235 10 15 + 0.058 0 10 75 53 43 30 60 20 81 10.5 9 8 45 271 11.5 18 + 0.070 0 14 50, 63 MB-B05 60 40 190 90 53 43 30 60 20 81 10.5 9 8 45 285 11.5 18 + 0.084 0

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

9 174 140 45 38 36 22 28 17 38 M33 x 2 40 3/4 94 159 12 43 36 (mm) Bore size (mm) Z ZZ TT TX TY TZ V W 40 123 246 24 70 65 95 7.5 8 50 131 262 26 83 78 108 10 9 63 140 280 26 90 86 115 12 10 80 156 312 36 112 106 162 16 13 100 170 340 42 140 130 204 20 16 125 170 340 42 170 162 234 20 16 160 187.5 375 52 212 200 284 24 20 111 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

Manifolds,"Side Ported Type 41 Type S41 Type 42 1o-32No'n{Msf ,!!L 10-32 No.n, (i,ts) Common EXH. Manifolds,,/Side Ported Type S32 .4 1 r ! t I I I I I I Common EXH. Manifolds,,/Side Ported Common EXH. Manifold,/ Top Ported The EXH.

3 Way Direct Acting NVKF 300 Series

None 20stafrcns Bracket vK300-43-1A Port size 01T 1/s NPTF E With brackel ' (Not mounted) NVV3KF3-o42-@-@ Applicable valves NVKF334O .ooo Base mounted / Type 42 (A port: side porting) Base mounted / Type S42 /Position ol solenoid \ \same as A port side./ Applicable blank plate ass'y vK300-42-1A Position ol solenoid .

Compact Cylinder with Air Cushion and Lock Series RLQ

A A1 E1 L1 MM RR1 U1 NZ L 42 56 16 20 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 42 56 14 18 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 I-G04 I-G05 Y-G04 Y-G05 36 41.6 +0.5 +0.3 +0.058 0 -0.3 -0.5 +0.058 0 44 50.6 +0.5 +0.3 +0.070 0 Knuckle pin and snap ring are included. -0.3 -0.5 +0.070 0 Knuckle Pin (Also used as double clevis pin) Rod End Nut d d Dd9 C m m l L t t H B Material: Carbon

3 Port Solenoid Valve SYJ300/500/700 Series

SYJ300/500/700 Preferred Option Summary Option Light and surge voltage suppressor Series Type of actuation Voltages Electrical entry Manual override Manifolds L type plug connector SYJ300 Type 42 N.C. N.O.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (

Slider Type Ball Screw Drive/11-LEFS Series

Note 2) Check SpeedWork Load Graph (Guide) on page 42 for details. Furthermore, if the cable length exceeds 5 m, then it will decrease by up to 10% for each 5 m. Note 3) A reference value for correcting an error in reciprocal operation.

Speed Controller with Indicator

19.2 47 (48) AS321FS-02-08 (S) 8 13.2 22.7 33 14.2 AS321FS-02-10 (S) 10 15.9 26.7 37 35.7 15.6 38 (39) AS321FS-02-12 (S) 12 18.5 29.7 40 34.5 17 50 (51) AS321FS-03-06 (S) 6 1/4 19 16.6 13.3 10.4 21.8 32.1 28.7 55.4 54 50.2 48.8 24.5 28.5 9.3 19.2 38 (39) AS321FS-03-08 (S) 8 13.2 22.7 33 14.2 AS321FS-03-10 (S) 10 15.9 26.7 37 28 15.6 29 (40) AS321FS-03-12 (S) 12 18.5 29.7 40 26.8 17 41 (42

Rotary Actuator/Vane Style Series CRB2

Mass (g) DVane type Single vane Double vane CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D CRB2BW15-S CRB2BW20-S CRB2BW30-S CRB2BW40-D CRB2BW10-S Model 90 180 180 90 100 90 270 270 180 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Rotating angle Body of rotary actuator 26.3 26.0 400 446 387 365 25.7 49 376 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange

CXS

MTS Smaller and lightweight MY CY Dimensions/Weight Note) Bore size (mm) Dimensions (mm) Weight (kg) Series Height Width Overall length MG Overall length 0.057 CXSJ6 42 + Stroke 32 13.4 CX Basic type 6 Additional dimension for each bore size compared to the basic type 2 mm (20) 3 mm (25) 5 mm (32) CXS6 0.095 58.5 + Stroke 37 16 Series CXS 6, 10, 15, 20, 25, 32 D0.114 CXSJ10 56 + Stroke 42

ARM10/11

B C D E F G H I J K L M N O P Symbol Model A ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 Dimensions by the Number of Stations Manifold stations 10 Model Symbol 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294 252 210 168 126 84 L1 592

CXS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.057 CXSJ6 42 + Stroke 32 13.4 CX Basic type 6 Additional dimension for each bore size compared to the basic type 2 mm (20) 3 mm (25) 5 mm (32) CXS6 0.095 58.5 + Stroke 37 16 Series CXS 6, 10, 15, 20, 25, 32 D0.114 CXSJ10 56 + Stroke 42 CXS basic type

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 8.5 11 12 15 18 23 28 23 23 30 30 42 42 50 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 8-25-24