48

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2022 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

MGQ

OUT 113 23 34 45 57 68 79 90 102 113 12 6 IN 85 17 26 34 43 51 60 68 77 85 OUT 201 40 60 80 101 121 141 161 181 201 Symbol Specifications 16 8 IN 151 30 45 60 76 91 106 121 136 151 -XA Change of rod end shape OUT 314 63 94 126 157 188 220 251 283 314 Heat resistant cylinder (150C) -XB6 20 10 Low speed cylinder (10 to 50 mm/s) -XB9 IN 236 47 71 94 118 142 165 189 212 236 Intermediate stroke

Fieldbus system EtherNet/IP compatible SI Unit

Port 2 Port 1 Port 4 Port 3 Port 2 Port 1 Byte 1 Reserved (fixed value: 0) Reserved (fixed value: 0) Input process data Output process data 2 to 129 2 to 39 2 to 65 Process data is assigned to each port based on the process data mapping size setting Process data is assigned to each port based on the process data mapping size setting 40 66 130 Port 1 status (PQI) Reserved (fixed value: 0) 41

EX600-WEN_WSV.eng

SWITZERLAND (41) 052 396 31 31 Dorfstrasse 7, CH-8484, Weisslingen, Switzerland Diagnostic Step 3 Connection to PLC UNITED KINGDOM (44) 0845 121 5122 Note) Refer to the operation manual of the PLC manufacturer for connection to PLC and Configurator.

EXxx-OMU0020CN

EX245-SPN1 GSD . 41 EX245-SPN1 Diagnostics type 1 4 (IN) 1 5.1.1. Diagnostics type 1 Diagnostics type 2 4 (IN) 1 5.2.2. Diagnostics type 2 Valves (16 coils) 2 (OUT) 12 6.3. Valves (32 coils) 4 (OUT) 12 EX245-DX1-X36 2 (IN) 210 7.4. EX245-DY1-X37 1 (OUT) 210 8.4.

EXxx-OMV0028.eng

Remote connection system status Specification Str Frunzei 29, Sector 2, Bucharest, Romania W-MS SLOVAKIA (421) 41 321321 1 Remote (EX600-WSV#) can be used regardless of the communication specification of the base. (3) Set the "base" system.

SI Unit

F_Par_CRC i-Parameters There are no i-parameters in this product 41 No.EX##-OMY0011-A Appendix C: Checklists The checklists listed in this section provide support when carrying out the following tasks on the SI unit: planning, assembly and electrical installation, commissioning, parameterization, and validation.

EXW1-NT1_eng

(46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden SWITZERLAND (41) 052 396 31 31 Dorfstrasse 7, CH-8484, Weisslingen, Switzerland UNITED KINGDOM (44) 0845 121 5122 Vincent Avenue, Crownhill, Milton Keynes, Buckinghamshire MK8 0AN, United Kingdom URL https://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81

PFxx-OMJ0005CN

No.PF-OMJ0005CN-I () // PFM7## 2 10 13 14 14 16 17 20 22 22 F0 23 F1 OUT1 24 F2 OUT2 27 F3 28 F4 29 F5 30 F6 31 F7 32 F8 35 F9 36 F10 38 F11 39 F12 40 F13 41 F98 42 F99 44 45 49 50 53 54 54 57 59 73 -1No.PF-OMJ0005CN-I (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

Digital Flow Switch (Remote type monitor unit)

[July 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2018 SMC Corporation All Rights Reserved No.PF-OMJ0018-F

Digital Flow Switch

[August 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012-2018 SMC Corporation All Rights Reserved No.PF-OMP0002-H

PFxx-OMP0001CN

No.PF-OMP0001CN-F // PFMB7501 PFMB7102 PFMB7202 2 10 11 12 14 14 16 17 [] 21 OU1OUT2 {3 ] 22 22 [] 24 25 F0 26 F1 OUT1 28 F2 OUT2 36 F3 41 F10 42 F13 43 F20 44 F22 45 F30 46 F31 47 F80 OFF 48 F81 49 F90 50 F98 52 F99 53 54 58 59 61 62 62 65 67 -1No.PF-OMP0001CN-F (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

PFxx-OMX0007

text FloW sensor Initial value is indicated as 8-digit. 16 octets fixed character string 0x0015 (21) 0 R Serial number Example: "x" (22) 0 R Hardware version HW-Vx.y x: Large revision number y: Small revision number 0x0016 (23) 0 R Software version FW-Vx.y x: Large revision number y: Small revision number 0x0017 (36) 0 R Device status parameter Refer to "Device state parameters" on page 41

Digital Flow Switch (Manifold type)

Width across flats of attachment With across flats of the main port 3/8 20.9 mm 1 41 mm 1/2 23.9 mm 3/4 29.9 mm After hand tightening, tighten the hexagon head bolt 2 to 3 rotations by using a spanner. Refer to the table below for the tightening torque.

Digital Flow Switch (Remote type monitor unit)

[March 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2022 SMC Corporation All Rights Reserved No.PF-OMN0012-H

LFE-OMZ0012

Apply a tool Width across flats of attachment Port size Width across flats 3/8 24 mm 1/2 28 mm 3/4 35 mm Turn the pipe 1 41 mm Ensure that the piping is tightened to the required torque. The tightening torque for connection threads is shown in the table below.

LFE-OMZ0013

Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product Parts 10 Definition and Terminology 11 Mounting and Installation 13 Installation 13 Wiring 14 Setting the Detected Flow Rate 17 Function Setting 19 Default Setting 19 F 0 Selection of sensor 21 F 1 Setting of OUT1 22 F 2 Setting of OUT2 30 F 3 Response Time 36 F10 Sub screen display 37 F20 External input 41

DOC1001322

Product Warranty HRS Series 9-2 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

High Vacuum L Type Valve

XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 9 XL*-OMJ0005-C 5.