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Box 6165 Karachi 74000 Pakistan TEL: 021-243-9070/8449 FAX: 021-241-4589 ISRAEL (Distributor) Baccara Automation Control Kvutzat Geva 18915 Israel TEL: 04-653-5960 FAX: 04-653-1445 SAUDI ARABIA (Distributor) Assaggaff Trading Est. P.O. Box 3385 Al-Amir Majed Street, Jeddah-21471, Saudi Arabia TEL: 02-6761574 FAX: 02-6708173 14-21-21

N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40W-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50W-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D Contents Page 1.

rInterface tInterface with bracket 225 173 130 97 129 169 30 eAFM20-A 41 wAF20-A eAFM30-A qIR100--X170 wAF30-A eAFM40-A 50 qIR20--X170 qIR30--X170 wAF40-A 820 Made to Order IR1000/2000/3000 Series With Digital Pressure Switch 7 Manifold Specifications (Except IR2120 and IR3000 series) 8 With digital pressure switch (model no: ISE30A-01--ML).

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

No.PF-OMP0001CN-F // PFMB7501 PFMB7102 PFMB7202 2 10 11 12 14 14 16 17 [] 21 OU1OUT2 {3 ] 22 22 [] 24 25 F0 26 F1 OUT1 28 F2 OUT2 36 F3 41 F10 42 F13 43 F20 44 F22 45 F30 46 F31 47 F80 OFF 48 F81 49 F90 50 F98 52 F99 53 54 58 59 61 62 62 65 67 -1No.PF-OMP0001CN-F (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

Specifications 41 Dimensions 43 Accessories 46 -1No.EX-OME0015-F Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Figure 5-41 Serial Communication Setting Screen 2 [Tips] The setting has not taken effect while the box is flashing. 2. Touch the [Enter] key. The MESSAGE screen is displayed. Figure 5-42 Serial Communication Setting Screen 2 3. Touch the [YES] key. The setting takes effect.

Part no. 25 32 40 50, 63 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 CD-MU02 CD-MU03 CD-MU04 CD-MU05 25 32 40 50, 63 8 10 10 14 18.2 22.2 26.2 32.2 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 17 19 22 27 6 7 8 11 19.6 21.9 25.4 31.2 23 27 31 38 16.5 18 21 26 7.6 9.6 9.6 13.4 NT-03 NT-MU03 NT-04 NT-05 A nut is attached with rod end male thread as standard. (Double rod type: 2 pcs.)

B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 8 9.2 6 15.5 5 9.2 M5 x 0.8 4 10 10 20.5 8 8 9.2 8 16.5 6 11.5 M6 x 1.0 5 16 16 22.5 10 8 9.2 10 18.5 6 15 M8 x 1.25 5 20 20 24.5 13 10 11.5 12 22.5 11 19.6 M10 x 1.25 6 25 25 33.5 17 14 16 16 28.5 12 25.4 M14 x 1.5 8 30, 40 30, 40 40.5 22 Applicable bore size (mm) Part no.

Basic style Width across flats 3.5 23 9 4.5 4.5 MXH MXU 6.5 3.5 2 x M3 x 0.5 (Port size) MXS 2 x M3 x 0.5 MXQ (Port size for axial piping type MTS8-P) 0.2 2 x M3 x 0.5, effective length 5 9 5 MXF +0.035 +0.025 4 MXW 22 12 16 MXJ M2.5 x 0.45 12 41 + Stroke MXP 53 + Stroke 9 15 MXY MTS 0.2 9 4 x M3 x 0.5, effective length 5 10 15 Rod end male thread Width across flats 3.5 +0.035 +0.025 4 M3

ISO 9002] SMC Taiwan [ISO 9002] SMC UK [ISO 9001/ISO14001] SMC US [ISO 9001] 15 Table of Contents Page Page Actuators Valves Pin Cylinder/Series CJ1 38 Gas and Chemical Liquid Valve/Series LVM 17 Miniature Cylinder/Series CJP 39 High Purity Chemical Valve/Series LV 18 Mini Free-Mount Cylinder/Series CUJ 40 Ultra Compact Valve. 3 Port Solenoid Valve 19 Electric Actuator/Series LG, LJ, LX 41

B(9.5) B(12.7) B(19.1) 1B(25.4) 1 B(31.8) 1 B(38.1) 2B(50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 Caution Warning 1Piping When operation is suspended, surge pressure will be generated between the cylinder and VNA11A.

Size B d d C l 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 8 10 10 14 M10 X 1.25 19.6 21.9 25.4 31.2 16.5 18 21 26 25 32 40 50, 63 6 7 8 11 23 27 31 38 25 32 40 50, 63 17 19 22 27 7.6 9.6 9.6 13.4 18.2 22.2 26.2 32.2 CD-MU02 CD-MU03 CD-MU04 CD-MU05 NT-03 NT-MU03 NT-04 NT-05 M12 X 1.25 M14 X 1.5 M18 X 1.5 A nut is attached with rod end male thread as standard.

Antistatic specifications (FGDE, FGDF) Note) For a comparison with the nominal filtration accuracy according to the element category, refer to pages 41 and 42. 24 C

Accessory (Option) Basic size Symbol Description Nil Applicable air compressor kW Symbol F With screw flange Screw type Reciprocating type D With auto drain Port size 2 2.2 7.5 7 Caution on Design HAW2 Size Applicable model 04 Symbol Rc 06 14 20 30 22 37 55 75 22 37 55 75 110 15 22 37 55 75 1 2 Rc 3 4 Rc 1 1 2 Rc 2 Warning HAW7 HAW22, 37 HAW55, 75 HAW110 1.

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 4) H Mounting Without mounting option With bracket With set nut a + Without auto drain Float type auto drain (N.C.)

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 4) H Mounting Without mounting option With bracket With set nut a + Without auto drain Float type auto drain (N.C.)

with light/surge voltage supressor Valve size 1 to 7 358 Series VNA Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control Model Flow characteristics Measured by air Measured by water Note) Mass (kg) Orifice diameter (mm) Air operated Model Port size Rc Cv Av x 10-6 m2 b External pilot solenoid C [dm3/ (barsec) ] VNA1-6A VNA1-8A 1 8 1 4 10 0.88 1.5 1.9 3.8 4.8 7.5 25 41

Type: 41 (Feedback Sensor Type), Bar Length: 340mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 04 (ø4), Bracket: B (Bracket), Sensor: G (Auto Balance Sensor, High Accuracy for Types 41 & 42)