VQC

MIL-C-24308) 2-C8 3(R) port n 1 2 3 4 5 6 7 Stations D-side 8 U-side DIN rail clamp screw 62.5 60 40.5 35 18.5 25 7.5 9.5 (7.5) (12) 2-C8 1(P) port 20.5 2n-C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 34 P = 10.5 Formulas: L1 = 10.5n + 45, L2 = 10.5n + 102 n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 55.5 112.5 137.5 148 2 66 123

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

ZP

8 9 4.7 10.1 13 15 18.5 27.5 8.7 19 7.5 ZPT16B-B5-A10 16 18 20 29 9.9 21 8.5 Dimensions by Stroke Dimensions by Stroke F: M3 x 0.5 F: M5 x 0.8 C D E G H E G Model 10 13 16 H Model G ZPTB 6-B-A8 F E E E F F 19 47 15 45 ZPTB10-B5-A10 ZPTB10-B-A8 75 40.5 36.5 39 80 72.5 76.5 23 24 78 85 3 6 5 8 ZPTB20-B5-A10 ZPTB15-B-A8 49 113 50.5 46.5 110.5 114.5 29 43 83 51 ZPTB30-B5-A10 ZPTB25-B-A8 59 123

REA/REB

4.9 5.4 C J G5-S REAH25 5.3 6.0 6.6 7.3 8.0 9.4 REAHT25 6.2 7.3 8.3 9.4 10.4 12.5 14.6 CV REAHT32 9.6 10.7 11.9 13.0 14.2 16.5 18.8 MVGQ Theoretical Output Magnetic Holding Force CC (N) RB Operating pressure (MPa) Piston area (mm2) Bore size (mm) 10 15 20 25 32 Bore size (mm) 0.3 0.2 0.4 0.5 0.6 0.7 J 10 Holding force (N) 15 23 78 31 39 54 46 53.9 137 231 363 588 D35 52 15 176 70 88 123

MU

X 0.8 M6 X 1 M8 X 1.25 M10 X 1.5 NE 4.3 5.1 6.9 8.7 10.5 S 55 58 60 74 75 ZZ 69 72 75 92 96 M10 X 1.25 M8 X 1.25Depth13 M12 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M8 X 1.25Depth13 M10 X 1.5Depth15 M10 X 1.5Depth15 M12 X 1.75 2.4-4 Plate Cylinder/Double Acting Single Rod Series MU Dimensions (mm) ZZ 109 122 133 159 169 LY 56 71 89 109 129 Y 6 8 10 11 14 LD 5.5 6.6 9 11 13.5 LS 79 90 96 116 123

MY1

MY1 HT MY1 W MY1 W MY1CW (Cam follower guide type) 16, 20 25, 32, 40, 50, 63 MY2C MY2 H/HT MY3A MY3B MY3M B A B A Proper Auto Switch Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y7W D-Y7BA D-M9V D-M9WV D-M9AV D-A9 D-Y69/Y7PV D-Y7WV D-M9 D-M9W D-M9A Bore size (mm) A B A B A B A B A B 16 20 25 32 40 50 63 74 86 70 90 94 106 90 110 102 118 102 118 97 123 97 123 132 148 132 148 127 153

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Station n L1 L2 Station 2 35.5 28.5 Station 20 224.5 217.5 3 46 39 4 56.5 49.5 5 67 60 6 77.5 70.5 7 88 81 8 98.5 91.5 9 109 102 10 119.5 112.5 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 1-5-20 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 C4 N3 Type 32 Manifold: Side Ported/SS5YJ3-32Stations -M5, [ ]: AC (Lead

VZ3000

suppressor 3-3-47 Series VZ3000 Type 43 Manifold: Side Ported VV5Z3-43Station 1-C4 Manual override (Non-locking) Grommet (G), (H) (PE port) (Pitch) (Mounting hole) (1(P), 3/5(R) port) 4-Rc 1/8 G: 300 mm H: 600 mm (Lead wire length) 2n-One-touch fitting (4(A), 2(B) port) Applicable tubing model: T0425 (Pitch) (mm) Stations 2 3 52 43 68 59 20 340 331 L1 L2 4 84 75 5 100 91 6 116 107 7 132 123

VQ20/30

L 62 6 9 12 15 18 21 24 27 30 33 36 39 42 45 47 50 53 56 59 785.5 85.5 123 160.5 198 235.5 273 310.5 348 385.5 423 460.5 498 535.5 573 598 635.5 673 710.5 748 DIN rail mounting bracket VVQZ100-DB-5 This bracket is used for mounting the manifold on the DIN rail. DIN rail mounting bracket is attached on the manifold. 1 set of DIN rail mounting brackets for 1 manifold includes 2 brackets.

LX

X12 100/110VAC Tamagawa Seiki Co., Ltd. 111.5 80.5 X13 200/220VAC MSD3A1P1E MSD3A1P1E MSD3A3P1E MSD3A3P1E MR-C10A1 MR-C10A1 MR-C10A MR-C10A SGDE-A3BP SGDE-A3BP SGDE-A3AP SGDE-A3AP X15 100/115VAC Matsushita Electric Industrial Co., Ltd. 123 91 X16 200VAC 30W X18 100/115VAC Mitsubishi Electric Corporation 111.5 87.5 X19 200/230VAC X21 100/115VAC Yaskawa Electric Corporation 91.5 123 X22 200

e

Nominal size Stroke Nominal size: 16 101.7 (74.7) (40) 60 80 Workpiece mounting center line 70 27 27 74.7 (60) LJ1 LJ1 72 40 Motor 102 42 60 LG1 LG1 43.5 71 (60) 60 LTF LTF 123 43 129 72.4 4 x counterbore depth 3.5 22 21.3 40 LC1 LC1 32 3.5 through 9.8 LC7 LC7 4 5 6 16.5 28 4 x M4 x 0.7 depth 7 LC8 LC8 T-slot section for mounting 4 5.6 (Max. 8.6) 14.4 152 + Stroke LXF LXF Encoder cable on

Fieldbus System

123 135.5 148 148 160.5 173 173 185.5 198 198 210.5 223 223 235.5 248 40 Series EX260 Specific Product Precautions 1 Be sure to read before handling.

Floating Joint: Standard Type JA Series

eccentricity U (mm) Operating pressure temperature Standard/Thread nominal size JA6-3-050 JA10-4-070 JA15-5-080 JA15-6-100 JA20-8-125 JA30-10-125 JA40-14-150 JA63-18-150 JA80-22-150 JA100-26-150 JA140-30-150 JA160-36-150 6 10 10, 15 15 20 25, 32 40 50, 63 80 100 125, 140 160 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M36 x 1.5 19 54 123

ITV

(For details, refer to "Specific Product Precautions 1" on page 849). 2 (mm) 3 4 5 6 7 8 9 10 Manifold stations n L1 L2 60 75 90 105 120 135 150 165 180 110.5 123 148 160.5 173 185.5 198 223 235.5 Weight of DIN rail (g) 20 22 27 29 31 34 36 41 43 813 Electro-Pneumatic Regulator Series ITV1000/2000/3000 RoHS How to Order ITV 3 0 1 0 S 0 1 2 Model 1 2 3 1000 type 2000 type 3000 type Pressure

Hand Valve Series VH

13.5 4-Rc 1/4, 3/8 VH32-02/03 (Bottom ported) 2 (A) 44 3 (R) 1 (P) 4-Rc 1/4, 3/8 4 (B) 5-8-10 Hand Valve Series VH Dimensions: Body Mounted VH40-02 to 04 VH40-06 ( ): Long handle type ( ): Long handle type 4 (B) 2 (A) 4 (B) 2 (A) 25 (32) 25 (32) 1 (P) 3 (R) 1 (P) 3 (R) SA 102 88 102 89 VA SA 4-6.6 VA 4-6.6 VM 81 88 94 VR VH 144(191) 144(191) 97(145) 97(145) VHS 8 (10) 8 (10) 125(136) 123

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

EXH port: PE 4 x Rc 1/8 Pilot EXH port: PE 4 x Rc 1/8 Pilot EXH port: PE (With light/surge voltage suppressor: 104.5) (With light/surge voltage suppressor: 119.5 (121.5)) (With light/surge voltage suppressor: 109) (With light/surge voltage suppressor: 114) (With light/surge voltage suppressor: 128.5 (130.5)) (With light/surge voltage suppressor: 119) ( ): Y, YZ n: Station 2 77 92 3 108 123

Modular/F.R.L. Units Series AC

flats 17 Width across flats 14 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure switch Round type pressure gauge Round type pressure gauge (with color zone) H J H H J H J J P1 P2 A B C E F G J K AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 26 1/16 M5 x 0.8 0 26 87 85 26 28 35 13 27.8 28 Note) 65 37.5 40 65 29.5 1/8, 1/4 1/8 2 37.5 126 123

ZP

8 9 4.7 10.1 13 15 18.5 27.5 8.7 19 7.5 ZPT16B-B5-A10 16 18 20 29 9.9 21 8.5 Dimensions by Stroke Dimensions by Stroke F: M3 x 0.5 F: M5 x 0.8 C D E G H E G Model 10 13 16 H Model G ZPTB 6-B-A8 F E F E E F 19 47 15 45 ZPTB10-B5-A10 ZPTB10-B-A8 75 40.5 36.5 39 80 72.5 76.5 23 24 78 85 3 6 5 8 ZPTB20-B5-A10 ZPTB15-B-A8 50.5 49 113 46.5 110.5 114.5 29 43 83 51 ZPTB30-B5-A10 ZPTB25-B-A8 59 123

Dual Rod Cylinder Series CXSJ/CXS

M5 x 0.8 thread depth 7.5 (Opposite side: Same) (mm) 11.5 19 CXT Z ZZ SS S Model CXSW32-10 CXSW32-20 CXSW32-30 CXSW32-40 CXSW32-50 CXSW32-75 CXSW32-100 CXSW32-125 CXSW32-150 CXSW32-175 CXSW32-200 20 9 143 10 213 83 CXSJ 153 233 20 93 Standard stroke Long stroke (-XB11) 56 163 253 103 30 CXS 56 173 273 113 40 (Opposite side: Same) 2 x 2 x Rc 1/8 thread depth 6.5 (Piping port) 183 50 293 123

CG5-S

(mm) Bore size (mm) WA WB WH W ZZ 20 22 16 23 30 118 25 22 16 25 30 123 32 22 16 28.5 25 125 40 22 16 33 20 143 50 25 18 40.5 20 167 63 25 18 47.5 20 167 80 30 22 60.5 20 201 100 31 22 71 20 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS S + Stroke H GA GB Width across flats B1 2P H1 D B LH I AL A K KA MM Width across flats NA LT M X Y X Y 8-J 4-LD C 0.1 LS + Stroke LX LZ ZZ