Series: VP500, Exhaust Type: Common Exhaust, Pilot Type: External Pilot, Stations: 8 Stations, Symbol: 1, Port Size: 3/8, Thread Type: NPTF

Series: VP500, Exhaust Type: Individual Exhaust, Pilot Type: External Pilot, Stations: 2 Stations, Symbol: 3, Port Size: 3/8, Thread Type: NPTF

Series: VP500, Exhaust Type: Common Exhaust, Pilot Type: External Pilot, Stations: 2 Stations, Symbol: 1, Port Size: 3/8, Thread Type: NPTF

Series: VP500, Exhaust Type: Common Exhaust, Pilot Type: Internal Pilot, Stations: 4 Stations, Symbol: 1, Port Size: 3/8, Thread Type: NPTF

Series: VP500, Exhaust Type: Common Exhaust, Pilot Type: External Pilot, Stations: 4 Stations, Symbol: 1, Port Size: 3/8, Thread Type: NPTF

Series: VP500, Exhaust Type: Common Exhaust, Pilot Type: External Pilot, Stations: 6 Stations, Symbol: 1, Port Size: 3/8, Thread Type: NPTF

Series: VP500, Exhaust Type: Individual Exhaust, Pilot Type: External Pilot, Stations: 4 Stations, Symbol: 3, Port Size: 3/8, Thread Type: NPTF

Series: VP500, Exhaust Type: Common Exhaust, Pilot Type: External Pilot, Stations: 13 Stations, Symbol: 1, Port Size: 3/8, Thread Type: NPTF

Series: VP500, Exhaust Type: Individual Exhaust, Pilot Type: External Pilot, Stations: 8 Stations, Symbol: 3, Port Size: 3/8, Thread Type: NPTF

Series: VP500, Exhaust Type: Common Exhaust, Pilot Type: Internal Pilot, Stations: 11 Stations, Symbol: 1, Port Size: 3/8, Thread Type: NPTF

SMC's VP300/500/700 series solenoid valve, offers high flow capacity and reduced power consumption (1.55W standard, 0.55W with power saving circuit).  The VP series may be used as either a selector valve, or a divider valve.  It is available in a normally closed or a normally open style. The series is vacuum applicable up to –101.2kPa., "MANIFOLD, 3 PORT SOLENOID VALVE

A_HEC-OM-K001

Host STX 47H Setting data ETX Check sum CR 103 102 101 100 (H) (L) Chemical Thermo-con ACK CR Host SOH UT STX 47H Setting data ETX Check sum CR 103 102 101 100 (H) (L) Chemical Thermo-con ACK UT CR Note) The setting range is from -100 to 0%.

Clean Room Rodless Cylinder Series CYP ø15, ø32

L1 M2 = m g (L1 + B) 103 2. Static moment m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.

Peltier-type Chiller Thermo-con/ Compact Type

Cooling capacity = Considering a safety factor of 20%, 93.3 W x 1.2 = 112 W Circulating Fluid Typical Physical Property Values Ethylene Glycol Solution 20% Temperature [C] Density [kg/m3] Specific heat C [J/(kgK)] 10 1.03 x 103 3.93 x 103 20 1.03 x 103 3.95 x 103 30 1.02 x 103 3.97 x 103 40 1.02 x 103 3.98 x 103 50 1.01 x 103 4.00 x 103 60 1.01 x 103 4.02 x 103 Water Density : 1 x 10 3

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

L1 M2 = m g (L1 + B) 103 2. Static moment m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.

Air Cylinder

Applicable bore size TX Rod trunnion Head trunnion CD LX LZ Z + Stroke Z + Stroke CS2 CM-B020 20 32 36 108 8 66 82 CM-B032 25 40 40 112 9 74 90 32 114 CM-B040 40 53 44.5 143.5 10 87 103 CM2U/CM2T (Rod/Head trunnion) Note) A pivot bracket pin and retaining rings are not included with the pivot bracket.

1

Pressure units conversion (Approximation) 17 Unit Pa (N/m2) kPa MPa bar kgf/cm2 atm mmH2O or mmAq mmHg or Torr PSI 1 x 103 1 x 106 1 x 105 1.0197 x 105 9.8692 x 106 1.0197 x 101 7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Static moment M2 = m g (L1 + B) 103 m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 and M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We(L2 + A) 103 3.

ZSM1-115/121

1 x 106 1 x 105 1.0197 x 105 9.8692 x 106 1.0197 x 101 7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1 x 101 9.8692 x 101 1.0197 x 104 7.5006 x 102 1 1.0197 1.4503 x 10 9.8067 x 104 9.8067 x 101 9.6784 x 101 1 x 104 7.3556 x

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Static moment M2 = m g (L1 + B) 103 m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 and M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We(L2 + A) 103 3.