REC

150 to 700 20 FX 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 REC 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to1000 26 20, 25, 32 40 36 5 66 82 22 14 24 21 52 41 16 12.5 50 200 to1000 32 RHC NA S Z ZZ NN P H1 H2 I K MM N Bore size Stroke range 1 8 30 20 M20 X 1.5 146 37 200 150 to700 M8 X 1.25 5 8 33.5 5 20 MTS 1 8 34.5 M26 X 1.5 25 146 41 204 150 to700 M10 X 1.25 6 8 37.5 5.5

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Model no. of switch rail accessory is listed on pages 8-15-32 and 8-15-41.

10

47.3 39 NT-12M 125 M27 x 2 16 41 47.3 39 CJ2 JCM Note 1) Split pins and flat washers are included.

Cylinder with Lock

Locked Manual lock released Refer to page 41 for the manual lock release.

SQ1000/2000

P. 42 P. 43 C8 N9 P R D side U side Silencer (for EXH port) Port plug VVQZ100-CP Individual SUP spacer SSQ1000-P-3EXH block plate SSQ1000-B-R P. 39 P. 41 P. 42 P. 43 C6 L6 P R D side SMC AN200 U side Built-in silencer (-S) Back pressure check valve (-B) SSQ1000-BP Special wiring specification (-K) Individual EXH spacer SSQ1000-R-3P. 40 P. 41 P. 42 P. 49 C6 L6 Terminal number D-sub connector

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Type SS5YJ5-42 Type SS5YJ5-43 Adapter gasket SYJ500-6-1 Adapter gasket SYJ500-6-1 Applicable manifold base Type SS5YJ5-40 Type SS5YJ5-41 Type SS5YJ5-42 Type SS5YJ5-43 Applicable manifold base Type SS5YJ5-20 Refer to page 92 prior to handling.

Battery-less

1500 500 500 400 400 400 Positioning repeatability [mm] 0.015 0.08 0.02 0.02 0.01 0.05 0.05 Drive motor Step motor V V V V V V V 8 V 16 V V V V V 25 V V V V V V V Size 32 V V V V 40 V V V 8 2 (6) 16 15 (4) 1 35 (8) 35 (7.5) 8 (12) Max. work load [kg] The values in parentheses are for when mounted vertically. 25 30 (15) 10 70 (30) 70 (29) 12 (20) 5 (5) 12 (4) Size 32 50 (20) 19 80 (43) 80 (41

CHKD/CHKG

Bore size (mm) 30 d 20 NTH-020 13 15 M8 x 1 12.5 5 20 NTH-025 17 19.6 M10 x 1.25 16.5 6 25 NTH-032 19 21.9 M12 x 1.25 18 7 32 NTH-040 22 25.4 M16 x 1.5 21 10 D C 40 NTH-050 27 31.2 M20 x 1.5 26 12 50 NTH-060 32 37 M24 x 1.5 31 14 63 NTH-080 41 47.3 M30 x 1.5 40 17 H B 80 NTH-100 55 63.5 M39 x 1.5 54 20 100 NTH-125 70 80.8 M48 x 1.5 69 26 Note) There may be a slight difference between the

CLS

46 56 14 14 14 17 17 20 35 35 39 39 39 49 Up to 1000 3 5 30 46 M14 x 1.5 M30 x 1.5 161 78 18 110 146 128 16 114 64 110 27 Up to 1000 M16 x 1.5 M36 x 1.5 182 95 23 132 169 144 18.5 130 74 120 30.5 Up to 1200 16 21 35 5 5.5 6 30 34 42 25 31 41 M18 x 1.5 M40 x 1.5 204 106 36 167 195 162 18.5 149 86 135 35 Up to 1200 M12 x 1.75 118 226 124 40.5 187 216 182 18.5 165 97 135 M20 x 1.5

MNB

10 46 45.5 54 97 Up to 500 12 13 83 13 13 19.5 D38 40 8 16 10 30 22 1/8 35 14 52 52.5 63 104 Up to 500 12 13 91 16.5 14 27 46.5 50 11 20 12.5 35 27 1/4 40 18 65 58.5 75 120.5 Up to 600 15 14 104.5 19 15.5 32 -X 56.5 63 11 20 17.5 35 27 1/4 45 18 75 68 90 134.5 Up to 600 12 14 119.5 23 16.5 32 72 80 13 25 22 40 32 1/4 45 22 95 81 102 169 Up to 750 18 20 150 19 33 37 2089 100 16 30 25 40 41

MGP

Contents Contents 20 25 32 40 50 63 80 100 MGP63-B-PS MGP80-B-PS MGP100-B-PS MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Items 32 and 33 are not included for bores sizes 80 and 100.

MXQ

42 41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

0.4

IP20 enclosure compliant P. 41 Integrated-type serial transmission system (for Output) IP20 enclosure compliant P. 45 P. 45 S kit Serial unit: EX120/123/124 Dust-tight, Water-jet-proof (-W) IP65 enclosure compliant P. 45 P. 45 Dust-protected (-XP) Integrated-type serial transmission system (for I/O) Serial unit: EX240 IP65 enclosure compliant P. 49 Circular connector M IP65 (Dust-tight,

One-touch Fittings

P.41 KQ2W P.37 KQ2K Bulkhead union Bulkhead connector P.45 KQ2E P.45 KQ2E Use to connect a male thread and tubing through a panel, etc. Use to connect tubing through a panel, etc. Nipple Reducer nipple P.47 KQ2N P.47 KQ2N Use to connect One-touch fittings of different sizes. Use to connect One-touch fittings.

Basic type / Direct mount type Series CY3B/CY3R

51 62 80 90 HS 5 8.5 7.5 6.5 7 8 9 9.5 HT 28 33.5 41 50 56 63.5 L 38 53 62 70 76 90 110 118 Model CY3RG10 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 CY3RG50 CY3RG63 CYP QW 14 18 17 20 26 34 48 60 PW 26 32 38 43 54 64 82 94 Q 68 84 95 105 116 134 159 171 N 4.5 6 7 6.5 8.5 11 15 16 WP 13 16 19 21.5 27 32 41 47 MM M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 W 20 25

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold base mounted, 2

Series KG Stainless Steel One-touch Fittings

8 KGY08-03 17 47 30.5 37 1 8 KGY10-01 27 49.5 31 R(PT) 1 4 3 8 KGY10-02 KGY10-03 50.5 52 30 32 17 29 10 21 28.4 40.0 18.5 26.5 17 39 1 2 KGY10-04 36 54.5 66 31 41 22 1 4 3 8 KGY12-02 KGY12-03 53.5 55 31 33 17 12 22 45.4 57.4 20.9 17 28.5 1 2 KGY12-04 37 57.5 22 68 3 8 KGY16-03 26.5 38 20.9 34 25 81 (81) 113 (113) 65.5 112 16 22 1 2 KGY16-04 41 67 116 Reference dimensions after R(PT) thread

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

MNB

10 46 45.5 54 97 Up to 500 12 13 83 13 13 19.5 D38 40 8 16 10 30 22 1/8 35 14 52 52.5 63 104 Up to 500 12 13 91 16.5 14 27 46.5 50 11 20 12.5 35 27 1/4 40 18 65 58.5 75 120.5 Up to 600 15 14 104.5 19 15.5 32 -X 56.5 63 11 20 17.5 35 27 1/4 45 18 75 68 90 134.5 Up to 600 12 14 119.5 23 16.5 32 72 80 13 25 22 40 32 1/4 45 22 95 81 102 169 Up to 750 18 20 150 19 33 37 2089 100 16 30 25 40 41

7ND9071en

9.4 Adjustment.41 9.5 Removal of the limit switches for accessing the valve controller.41 9.6 Circuit diagrams.41 9.7 Maintenance .41 10 TOOLS.41 11 ORDERING SPARE PARTS .41 12 DRAWINGS AND PARTS LISTS.42 12.1 Exploded view ND9100, ND9400, ND7100 .42 12.2 Exploded view ND9100_/D__, ND9100_/I__, ND9100_/K0_ and ND9100_/B06.43 12.3 Exploded view ND9200, ND9300, ND7200 44 12.4 Exploded view