XM, XY

viscous flow) Shows flow rate when P= 0.1 MPa 20 18 XMD/XYD-63 XMD/XYD-80 16 14 XMD/XYD-50 12 10 XMD/XYD-40 8 6 XMD/XYD-25 4 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.4 4.0 4.5 5.0 5.5 6.0 Adjustment nut rotations (n) 490 Stainless steel High Vacuum Angle/In-line Valve XMD, XYD Series Dimensions XMD/Angle type D C L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) A B K S M J H G A (mm) Model A 123

Stability of suction position,

31.2 Model Weight [g]/Pad material N/U/CL S F ZP3E-T50BMl-B8 41.0 39.5 51.5 ZP3E-T50BMl-B10 39.6 38.1 50.1 ZP3E-T63BMl-B12 ZP3E-T63BMl-B18 ZP3E-T80BMl-B12 ZP3E-T80BMl-B18 Width across flats 24 32 61 Width across flats 24 32 50 A A 43 57.5 12 B 35 49.5 12 B 18 12.5 85 80 57 68 63 45.8 Dimensions Dimensions Model A B Weight [g]/Pad material N/U/CL S F ZP3E-T63BMl-B12 M12 x 1.75 12 103 100 123

MY2

2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 1/8 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123

MK

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 Accessory Bore size (mm) Clamp stroke (mm) 12 16 20 25 32 40 50 63 J 10 20 50 70 100 250 280 500 595 Clamp bolt Hexagon socket head cap screw Hexagon nut Spring washer MK-A020 87 123 290 320 525 640 1100 1520 D1350 1805 MK-A032 (g) Additional Weight 12 -X MK-A050 16 20 25 32 40 50 63 Bore size (mm) 20Both ends tapped style 6

RB/RBL/RBQ

-X 123 147 172 270 295 368 614 Taking into consideration the corresponding weight of the impacting object Me, calculated using Data D and collision speed , check provisional model compatibility with the condition of application. If this is satisfactory, then the said provisional model will be the applicable one. 177 212 247 389 424 530 884 7.

RZQ

. 10-10-3 4 Series RZQ Theoretical Output Theoretical Output Table 1 [N] Air pressure [MPa] (with same air pressure applied to each port) Piston area [mm2] First stage Extension Retraction Extension Retraction Second stage Bore size (mm) Piston B Piston A Front side q Rear side w Front side e Rear side r 0.3 0.5 0.7 0.3 0.5 0.7 0.3 0.5 0.7 0.3 0.5 0.7 32 40 50 63 119 276 197 118 287 205 123

C85

101 to 150 51 to 100 101 to 150 1 to 50 65.2(71.2) {75.2(81.2)} 65.2(69.2) {75.2(79.2)} 76(79.5) {86(89.5)} 82(85.5) {92(95.5)} 97.5(101) {118(121.5)} 113(116.5) {144(147.5)} 68(74) {78(84)} 68(72) {78(82)} 78(81.5) {88(91.5)} 84(87.5) {94(97.5)} 73(79) {83(89)} 73(77) {83(87)} 86(89.5) {96(99.5)} 92(95.5) {102(105.5)} 99.5(103) {120(123.5)} 115(118.5) {146(149.5)} 107.5(111) {128(131.5)} 123

CQS

20DCM Cylinder weight: CQSB20-20D101 g Option weight: Rod end male thread 10 g : Rubber bumper 2 g : Double clevis style 92 g Cylinder stroke (mm) Bore size (mm) 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 12 29 36 42 49 56 63 93 100 113 147 180 107 16 38 47 56 64 73 82 119 128 145 187 229 136 201 g 20 63 75 88 101 114 127 140 153 178 306 370 434 498 562 627 166 25 91 107 123

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

13 Series CY1F Theoretical Output Weight Unit: kg Unit: N Piston area (mm2) Operating pressure [MPa] Standard adjustment bolt weight Weight of adjustment bolt for 25 mm adjustment Basic weight Model Bore size (mm) Additional weight per each 50 mm of stroke 0.2 0.3 0.4 0.5 0.6 0.7 CY1F10 78 23 31 39 46 54 0.520 0.095 0.004 0.012 10 15 CY1F15 176 0.815 0.133 0.004 0.012 15 35 52 70 88 105 123

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Holding force (N) CY1H10 1.0 1.3 1.6 CY1H15 2.2 2.7 3.2 3.6 4.1 Theoretical Output CY1H20 3.0 3.5 4.0 4.4 4.9 5.4 CY1H25 4.6 5.3 6.0 6.6 7.3 8.0 9.4 (N) CY1HT25 5.1 6.2 7.3 8.3 9.4 10.4 12.5 14.6 Operating pressure (MPa) Piston area (mm2) Bore size (mm) CY1HT32 8.4 9.6 10.7 11.9 13.0 14.2 16.5 18.8 0.3 0.7 0.6 0.5 0.4 0.2 10 15 23 54 39 31 78 46 Shock Absorber Specifications 15 35 52 123

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 1/8 1/4 MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

range [C] 5 to 40 Operating humidity range [%RH] 90 or less (No condensation) Motor size m42 m56.4 Electric specifications Motor type Battery-less absolute (Step motor 24 VDC) Encoder Battery-less absolute (4096 pulse/rotation) Rated voltage [V] 24 VDC 10% Power consumption [W]*4 38 50 100 Standby power consumption when operating [W]*5 16 44 43 Max. instantaneous power consumption [W]*6 57 123

01-mxp-e

GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide unit Cylinder unit 123

Compact Cylinder

530 551 572 592 100.0 Mass of Cylinder Moving Parts: With Magnet for Auto Switch [g] 100 Allowable lateral load at rod end [N] 80 Bore size [mm] Cylinder stroke [mm] 63 5 10 15 20 25 30 35 40 45 50 50 40 32 12 6 7 8 9 10 11 10.0 16 7 8 9 10 11 12 20 16 17 19 21 23 25 27 29 31 33 25 25 25 28 31 34 37 40 43 46 49 53 20 32 43 48 52 57 61 66 70 75 79 83 16 40 69 75 81 87 93 99 105 111 117 123

INFORMATION Step Motor Controller 5 types of communication protocols New New

Dimensions JXCL1 35 4.5 For body mounting (Screw mounting) (11.5) 67 32.5 1.2 84.2 64.2 35 193.2 (When removing DIN rail) 187.3 (When locking DIN rail) 152.5 161 170 Mountable on DIN rail (35 mm) 77 17.5 4.5 For body mounting (Screw mounting) L 5.25 12.5 (Pitch) 7.5 5.5 (25) (35) 1.25 L Dimensions [mm] No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 23 35.5 48 60.5 73 85.5 98 110.5 123

Multi-Axis Step Motor Controller

Refer to the dimension drawings on pages 7 and 10 for the mounting dimensions. (35) (25) 5.5 8 (1.5) L Dimension No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 L 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 398 410.5 423

Integrated Controller

Dimensions [mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S T U V X2 CV Without lock With lock Without lock With lock 25 15 to 100 243.4 283.4 102.9 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 46.5 1.5 57.8 126 166 66.6 101 to 400 268.4 308.4 127.9 32 20 to 100 257.8 302.8 116.3 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1 10 60 61 1 69.8 123 168 83.8 101 to 500 287.8 332.8

Refrigerated Air Dryer

AFF Symbol Nil 10 mm Coating color White 1 AM Weight lbs (kg) 119 (54) 137 (62) 258 (117) 271 (123) Compliant standards UL, CSA AMD Note 1) ANR is under the conditions of 68F (20C) at atmospheric pressure and relative humidity of 65%. Note 2) Air flow capacity for each outlet air pressure dew point is indicated.

Slider Type Ball Screw Drive/11-LEFS Series

Ball screw /Linear guide portion Low particle generation grease Motor size 28 42 56.4 Motor type Step motor (Servo/24 VDC) Electric specifications Encoder Incremental A/B phase (800 pulse/rotation) Rated voltage [V] 24 VDC 10% Power consumption [W] Note 6) 22 38 50 100 Standby power consumption when operating [W] Note 7) 18 16 44 43 Max. instantaneous power consumption [W] Note 8) 51 57 123

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

: 10 mm/s2 1.0 Cycle time [s] Cycle time [s] LEL 1.0 LEM 0.5 0.5 LEY Acceleration/Deceleration: 20 mm/s2 Acceleration/Deceleration: 20 mm/s2 LES 0.0 0.0 Stroke [mm] 0 3000 500 1000 1500 2000 2500 Stroke [mm] 0 2000 500 1000 1500 LEPY LEPS Maximum speed/acceleration/deceleration values graph for each stroke LER LEH LEY -X5 11LEFS 11LEJS 25ALEC LEC S LEC SS-T LEC Y Motorless LAT LZ LC3F2 123