Rubber seal 5 Port Solenoid Valve Series SYJ7000

C6, N7 C8, N9 Grommet (G), (H): SYJ7 20-01 Built-in one-touch fitting: SYJ7 20G: Approx. 300 H: Approx. 600 (Lead wire length) 122 [126.4] 54.5 [56.7] 45.3 32.3 3 13 B A B A Manual override 17 35 17 1/8 (A, B port) 2-3.2 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 6, 1/4" : 8, 5/16" (4.9) 35 2-3.2 (For mounting) (Light/surge voltage suppressor) 36 + 28 18

Wedge Cam Operation Gripper Series MHK2

16 34 11.0 O.D. holding:17.8 (79) I.D. holding :20.2 (90) MHKL2-25D 25 22 19 41 19.8 MHKL2-12S 90 12 2.0 (9) 11 9 20 3.7 Normally open Normally closed MHKL2-16S 16 3.8 (17) 14 14.6 28.6 5.8 MHKL2-20S 20 7.2 (32) 18 16 34 11.1 MHKL2-25S Single acting 25 11.9 (53) 22 19 41 19.9 MHKL2-12C 12 2.5 (11) 11 9 20 3.7 MHKL2-16C 16 4.9 (22) 14 14.6 28.6 5.9 L1 MHKL2-20C 20 9.0 (40) 18 16 34 11.1 L2

Series AS-FM/AS-M/ASD-FM

M5 x 0.8 AS120M-M5 9 9 8 10 28.2 24.8 10.3 29.8 33.2 10-32UNF AS120M-U10/32 AS220M-01 12 Rc1/8 R1/8 14.3 14.6 18 31.4 27.4 14.1 32.4 36.4 NPT1/8 AS220M-N01 12.7 AS220M-02 17 Rc1/4 R1/4 18 19.5 27.2 35.9 29.9 18 34.9 39.9 NPT1/4 AS220M-N02 17.5 Dimensions for R and NPT threads after installation 8 Speed Controller for Low Speed Operation Series AS-FM In-line Type Models Applicable tubing

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

2-M5 x 0.8 Clevis pin ( ) MM CA CB D NA A CX + 0.2 + 0.1 U BA S + Stroke Z + Stroke ZZ + Stroke BB H R (mm) CD (Cd) A BA BB CA CB CX D GA GB H MM NA NB R S U Z ZZ Bore size (mm) 10 15 15 12 17 14 3.3 3.2 4 8 18 28 M4 x 0.7 12.5 22.5 5 46 8 82 87 16 15 18 18 20 20 5 6.5 5 8 23 28 M5 x 0.8 12.5 27.5 8 47 10 85 93 Clevis pin and snap ring are packed together. 5 Stainless Steel Cylinder Series

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Without brake 85 18 Mitsubishi Electric Corporation With brake 3.2 Yaskawa Electric Corporation Cable length 18 05 5m Applicable cables LJ1 (non-standard motor), LXP/LXS (AC servomotor) 35 Model Manufacturer part no. 16 MFMCA0050AEB (for motor) MFECA0050EAB (for encoder) LJ1-1-G051 4.5 101 110 18 MFECA0050FAB (for motor) MFMCA0050AEB (for encoder) MFMCB0050CET (for brake) LJ1-1-G05B LJ1-7

3 Position Cylinder Series RZQ

RZQ Foot type/RZQL Foot type (mm) B + Full stroke L Bore size (mm) A LH LS L LD LG B 30 18 6.6 4 107.7 82.5 66.5 32 Special cap bolt 33 18 6.6 4 92 76 117.2 40 39 22 9 5 96.5 73.5 126.7 50 LY 46 102 28 11 5 76 138.2 63 LH Bore size (mm) LX LY LZ X Y X Y X Y LS Full stroke LG LZ LX 4-LD 57 57 71 11.2 5.8 32 A + Full stroke 64 64 78 11.2 7 40 79 78 95 14.7 8 50 95 91.5 113 16.2 9 63 Front

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note) Indicate on a manifold specification sheet in case of mixed sizes. 12 12 stations 18 Base Mounted Type Series VQ5000 U side D side Stations . 3 2 1 How to Order Manifold Assemblies (Example) How to Order Valves Enter part numbers for valves and options to be mounted below the manifold base part number.

High Purity Chemical Valve

36.5 11.5 19 34 M4 5.5 219 266 313 360 47 36.5 93.5 76 27.5 57.5 17.5 39 53.5 24 27.5 47 M5 6.5 118 177 236 295 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 LLC5A 60 47 111.5 95 33.5 70.5 18 50 63.5 29 33.5 56 M6 7.5 130 189 248 307 75 59 131 114 33.5 70 27.5 62 64 34.5 27.5 56.5 M6 7.5 240 299 358 417 468 Series LVC 3 Port Standard Specifications LVC200 Model 4 Orifice diameter Av x 10-6m2 7.2 LVC Cv

25

-580 IZS4-640 IZS4-820 IZS4-1120 IZS4-1300 IZS4-1600 IZS4-1900 IZS4-2320 IZS4-2500 Part no. n 5 6 7 9 10 13 18 21 26 31 38 41 Applicable tube O.D.

Multi-Axis Step Motor Controller

Actuator side (14) (18) A1 B1 (17.7) A 10*1 (13.5) B 15*1 A6 B6 1 2 C 20*1 Connector D (14.7) 15 16 Connector A (30.7) L (11) (10) *1 Produced upon receipt of order (Robotic cable only) Cable color Connector C terminal no. Brown 2 Red 1 Orange 6 Yellow 5 Green 3 Blue 4 Signal Connector A terminal no.

HRL

19 18 26 18 Heating capacity3 [kW] 1.5 1 4.5 1 6.5 1 Temperature stability4 [C] CH1: 0.1/CH2: 0.5 Rated flow (Outlet) [L/min] 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum flow rate [L/min] 120 16 130 16 180 16 Maximum pump head [m] 50 49 55 49 68 49 Settable pressure range5 [MPa] 0.10 to 0.50 0.10 to 0.49 0.10 to 0.55 0.10 to 0.49 0.10 to 0.68

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

17 18 21 22 21 22 16.5 13.7 12.7 16.5 17 16.5 17 18 17 18 21 21 22 22.4 25.2 6.2 12.3 27.6 28.6 29.5 29.6 30.5 27.6 33.3 34.1 35.3 43.5 44.9 32.6 33.6 34.5 34.6 35.5 32.6 38.3 39.1 40.3 51 52.4 5.2 6.2 7.1 6.2 7.1 8.1 7.4 8.2 9.5 10.3 11.6 12.3 15.5 15.5 20.6 20.6 27.6 11.3 Note 1) Reference dimensions 27.6 Note 1) Reference dimensions 701 Dual Speed Controller with One-touch Fittings Stainless

COQ2BP

(mm) ,. 50 43.5 M8x1.25 MBK1.2S 99 6.6 67 9 76 89 18 Ml0X1.5 15 , (mm) 63 104.5 43.5 Ml0xl .5 18 M1Ox1.5 9 9 18 80 92 108 Ml0X 1.5 15 I 122 80 53.5 M12x1.75 22 M12x1.75 11 11 99 116 20 M16X2.0 134 21 Series CDQ2BP High Magnetic Field Resistance Head Side Flange: C002GP 0 -0 OM-C:J (mm) FT FII FX FZ Ll H C ; Bote . ... (mm) H Th read C Depth R N FD ,.

E-P HYREG

Description 0 1 0 1 VY110 0 1 VY120 0 1 VY130 0 1 0 1 0 1 VY140 VY170 0 1 VY190 0 1 VY1D00 VY150 VY1B0 VY1A0 ITV B F G N AN120-M5 VEXA-18-2A VEX1-18-1A VEX3-32A VEX5-32A VEX7-32A VEX9-32A Bracket (With bolt, washer) IC VEXA-18-3A VEX1-18-2A G27-10-01 AN120-M5 G36-10-01 AN101-01 AN120-M5 G46-10-01 AN210-02 G27-10-R1-X207 Pressure gauge ITVH Pilot EXH port silencer ITVX Sub-plate and Base Gasket

REC

mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 REA Front trunnion: U Rear trunnion: T 32 42 48 52 0.3 Clevis: C, D C 22 30 35 37 0.5 REC Graph w Applicable max. stroke against lateral load* D 17 24 27 29 0.7 RHC W W W 500 82 103 116 127 0.3 Bushing (Bearing) MTS fR 62 79 89 97 U 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 CC 50 33 43 49 53 0.3 10 23 31 36 39 0.5 T 5 18

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Confirmation of allowable lateral load From the graph, the allowable lateral load at L = 50 mm and P = 0.4 MPa is 18 N. Because 2.1 N < 18 N, it is applicable. 30 20 D2. Confirmation of allowable lateral load In the same way, the lateral load at L = 50 mm and P = 0.4 MPa is 48 N from the graph.

REC

Stroke Against Lateral Load D RS H A 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 RZQ Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 MI W S 52 66 75 81 0.7 50 CEP1 33 43 49 53 0.3 23 31 36 39 T 0.5 10 CE1 5 18 25 29 31 0.7 REC40 REC32 REC25 REC20 CE2 Rod side flange style: F Head side flange style: G 182 167 148 118 0.3 Foot style : L 1 L ML2B 140 128 114

Digital Flow Switch ( compatible)

Name Lead wire colour Function 1 L+ Brown 18 to 30 VDC 2 N.C.

4-channel Flow Monitor ( compatible)

Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% 1 Electric spec.

HRX-OM-W058

PV SV 5.19 Communication function HRS-R Series 5-56 HRX-OM-W058 Chapter 5 Display and setting of various functions 18. Select BCC (simple communication protocol) from the table below with [] key or [] key, and confirm by pressing SEL.