ZR

19 31 H SET L H SET L 4 Suction filter Suction filter Vacuum pressure switch Pressure setting trimmer Vacuum pressure switch Pressure setting trimmer Individual spacer Individual spacer 28 52 28 52 20 31 31 32 74 44 63 Release valve (SOL.c) Vacuum valve (SOL.a) Release valve (SOL.c) Vacuum valve (SOL.a) Non-locking push type Manual override Vacuum valve (SOL.b) Vacuum valve (SOL.b) M5 PE

Plug-in Unit

16 stations) AS-i, 8 in/out, 31 slave modes, 1 power supply systems 1 to 4 stations (8 stations) (16 stations) Serial kit for PROFIBUS-DP Serial kit for DeviceNet/PROFIBUS-DP/CC-LINK AS-i, 4 in/out, 31 slave modes, 1 power supply systems 1 to 2 stations (4 stations) 2-2-19 Base Mounted Series VQC4000 How to Order Valves VQC 4 1 0 5 0 Manual override Series Nil: Non-locking push type (Slotted

MG

Made to Order Specification (For details, refer to page 8-31-1.) Data Description Refer to How to Order for the standard model numbers. Suffix -XB10 to the end of standard part number. Note) Part no.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

cover (2000) 32 ZSE20C(F)/ISE20C(H) Series Dimensions Panel fitting dimensions (Rear ported) Individual mounting 31 0 0.4 31 0 0.4 31 0 0.4 4 x R2 or less Multiple (2 pcs. or more) secure mounting Panel mount example 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 24 or more Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs.

Floating Joint

31 31 41 41 50 59.5 59.5 66 96 30 35 38 42 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 0.05 0.07 0.07 0.16 0.16 0.16 0.3 0.3 0.6 1.05 1.08 1.5 4.5 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 8 9 9 13 13 13 15 15 18 24 24 24 42 8 10 10 12 12 12 16 16 20 24 27 27 33 30.5 34 34 38 38 38 44.5 44.5

HRX-OM-W060

This produuct Your system Circulating fluid temperature 31 Serial communication Discharge temperature 31 Circulating fluid display temperature Heat 31 radiation 1 Circulating fluid set temperature 30 Offset temperature 30 1 HRL Series 5.4 Description of Screen 5-29 HRX-OM-W060 Chapter 5 Display and Setting of Various Functions Example of MODE 2 When the offset temperature is -1oC, circulating

Cylinder with Lock Series CNS

27 M12 x 1.75 M30 x 1.5 35 1/2 85.5 25 303 87.5 20 23 110 440 15 31 27 M12 x 1.75 M30 x 1.5 35 1/2 93.5 25 343 95 20 28 110 480 17 36 30.5 M12 x 1.75 M36 x 1.5 39 3/4 104 25 396 109 25 35 120 546.5 With rod boot (mm) Stroke range (mm) Bore size (mm) l ZZ1 h 125 140 160 463 0.2 stroke 133 to 1000 503 0.2 stroke 133 to 1000 567.5 0.2 stroke 141 to 1200 5 Cylinder with Lock Double Acting:

CHKD/CHKG

15 31 100 132 106 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 146 3/8 36 15 36 Note 1) Body dimensions are the same with or without auto switches.

CNS

19 85 393 8 100 M12 x 1.75 M30 x 1.5 35 1/2 25 303 20 23 45 20 110 478 87.5 157.5 85.5 15 31 19 100 433 9 112 M12 x 1.75 M30 x 1.5 35 1/2 25 343 20 28 45 30 110 528 95 180.5 93.5 17 36 19 106 496 9 118 M12 x 1.75 M36 x 1.5 39 3/4 25 396 25 35 50 25 120 591 109 197 104 With Rod Boot Long Stroke Stroke range (mm) Stroke range (mm) Bore size (mm) Bore size (mm) l ZZ1 h RT RY 125 140 160 125

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Bit6: The short circuit of the valve output or digital output 01h to 64h to Get Channel diagnosis 0Ah 83h Ch0 to 31 BYTE 1 2 has been detected.

PSxx-OMV0003CN

ON/OFF (31 ) ON/OFF 31 81 81 ON OFF Hysteresis / () () 25[]ON-OFF -11No.PS-OMV0003CN-G NPN () () ON ON 0 31 ON-OFF ON () (P1L~P1H)ON (31 ) () digit () () SI ON/OFF ON-OFF / ON/OFF 90 ON -12No.PS-OMV0003CN-G ON () (n1L~n1H)ON (31 ) 31 (0FF)(ON)(OFF)(ON) () 5%R.D.(5%) (0~1MPa 0.001MPa 1/1000 ()" () F () ripple -13No.PS-OMV0003CN-G ( M46L(2)) 0.760.1 Nm A

C76

b1 14 16 l 20 22 d7 19 22 Bore 32 40 Model KJ10DA KJ12DA Bore 32 40 dH71 10 12 10.5 12 13 13 CA2 CS1 C76 C85 Floating joint/Series JA JA25/40 C95 CP95 NCM NCA D-X (mm) 20M Max. operating tension and compression power (kN) Maximum screwed depth P Allowable eccentricity U A B D E F G H Bore Model Pitch Data Nominal thread dia. 32 40 JA25-10-150 JA40-12-175 10 12 1.5 1.75 49.5 60 19.5 20 24 31

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CRBU2W10-D 2 x M3 x 0.5 through 2 x 3.5 through 31 25 41 17 0 0.036 9h9 4g6 0.004 0.012 4 x 3.5 through 0.5 (2 on adjusting sides) 5 9 14 31 8 1 1 3 10.5 10.5 22 (9) B port A port 2 x M5 x 0.8 (Connection port) 0.5 0.004 0.012 4g6 CRBU2W10-DE 0 0.036 9h9 A port 29 B port 9.5 2 x M5 x 0.8 (Connection port) 8.5 6 x M3 x 0.5 depth 3

C76

b1 14 16 l 20 22 d7 19 22 Bore 32 40 Model KJ10DA KJ12DA Bore 32 40 dH71 10 12 10.5 12 13 13 CA2 CS1 C76 C85 Floating joint/Series JA JA25/40 C95 CP95 NCM NCA D-X (mm) 20M Max. operating tension and compression power (kN) Maximum screwed depth P Allowable eccentricity U A B D E F G H Bore Model Pitch Data Nominal thread dia. 32 40 JA25-10-150 JA40-12-175 10 12 1.5 1.75 49.5 60 19.5 20 24 31

HRX-OM-X037

This produuct Your system Circulating fluid temperature 31 Serial communication Discharge temperature 31 Circulating fluid display temperature Heat 31 radiation 1 Circulating fluid set temperature 30 Offset temperature 30 1 5.4 Description of the Screen HRL Series 5-30 HRX-OM-X037 Chapter 5 Display and Setting of Various Functions Example of MODE 2 When the offset temperature is -1oC, circulating

SFOD-OMT0009CN

5.1 . 31 (1) C PWR . 31 (2) M PWR . 31 (3) CI . 32 5.2 . 33 (1) . 33 (2) . 34 6.

CY1

CY1H10-PS CY1H15-PS CY1H20-PS CY1H25-PS Above Nos. 29, 30, 31, 32, 33, 34 Seal kits are sets consisting of items 29 through 34, and can be ordered using the order number for each bore size. 51 Series CY1H Construction Dual axis type/CY1HT !9 @0 !8 q !5 !4 !7 w #3 !6 e #1 @9 #0 i !0 !3 !1 !

PSxx-OMR0001CN

DCVX2 (2 )VX2 -37No.PS-OMR0001CN-J 3 ISA-19ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 2.6 ISA-14 -38No.PS-OMR0001CN-J 3 () ISA-19ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 ISA-20 E210-U01 2 ISA-17 2.6 2.6 Y200T-A -39No.PS-OMR0001CN-J 3 () 2 2 E210-U01 ZS-31-C ZS-31-C ZS-31-B Y200T-A Y200T-A ISA-18 2.6 ISA-15 ISA-16ISA-17 ISA-12-40No.PS-OMR0001CN-J 4 80 kPa220 kPa

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

8 15 KA 31 Stroke adjuster at extension end 54.5 (With stroke adjuster at extension end) N x M6 x 1 thread depth 13 (Insert) 7 22 Stroke adjuster at retraction end 7 2.5 (With stroke adjuster at extension end) 4.5 (With stroke adjuster at retraction end) 38 92 89 56 70 FF 38 24.5 F 6H9( ) depth 6 +0.030 0 31 6 x M6 x 1 thread depth 10 N 1 x F 2 +0.030 0 6H9 ( ) depth 6 55.5 2 x M8 x 1.25

SMC

8 15 KA 31 54.5 (With stroke adjuster at extension end) N-M6 x 1 thread depth 13 (Insert) Stroke adjuster at extension end 7 22 Stroke adjuster at retraction end 7 2.5 (With stroke adjuster at extension end) 4.5 (With stroke adjuster at retraction end) 38 92 89 56 70 FF 38 24.5 6H9 depth 6 +0.030 0 F 31 6-M6 x 1 thread depth 10 N 1 x F 2 6H9 depth 6 +0.030 0 55.5 2-M8 x 1.25 thread depth