Basic Type/Direct Mount Type

HR 17 24 30 36 41 51 62 80 90 HS 6 5 8.5 7.5 6.5 7 8 9 9.5 K 7 9 14 11 15 13 15 25 24 G 3 4 5 6 6 7 7 8.5 8.5 HA 17 24 30 36 41 52 62 80 92 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 B 6.5 8 9.5 9.5 11 11 14

CHKD/CHKG

(mm) Rod end male threads Water resistant type (mm) a b c e f g h Bore size (mm) B C N S g h A Bore size (mm) 20 20 12.5 15 M10 x 1.25 6 10 23 66 61 43 18 26.5 6 33 76 25 25 15.5 18 M12 x 1.25 6 12 26 71 63 45 18 30 6 36 81 32 32 22 25 M16 x 1.5 7 14 35 86 71 51 20 38 7 45 96 40 40 27 30 M20 x 1.5 7 19 40 95 75 55 20 45 7 50 105 50 50 32 35 M24 x 1.5 8 24 46 106 81 60 21 55 7 56 116 63 63

Rotary Actuator

Without air cushion With air cushion Angle adjustable type 50 P694020-49 P694020-50 P694020-51 63 P694030-49 P694030-50 P694030-51 80 P694040-49 P694040-50 P694040-51 100 P694050-49 P694050-50 P694050-51 Du, o, !0, !4, @5, @6, #3, $6 are included as a set. u, o, !0, !4, @5, @6, #3, #6 are included as a set. u, o, !0, !4, @5, @6, #3 are included as a set.

Vacuum Pad

A B D ZPB2J10-B5 34 47 23 ZPB2J20-B5 72 85 51 Part no. A B D ZPB2K10-B5 34 47 23 ZPB2K20-B5 72 85 51 Applicable pad with adapter part no. ZP3P-T20PTSF-B5 ZP3P-T25PTSF-B5 Applicable pad with adapter part no.

REA/REB

Model selected 10-2-51 51 Series REAH Model Selection 2 Caution on Design 1 The load mass allowable moment differs depending on the workpiece mounting method, cylinder mounting orientation and piston speed. In making a determination of usability, do not allow the sum (n) of the load factors (n) for each mass and moment to exceed 1.

CJ2

For details about auto switches with pre-wire connector, refer to page 6-16-60. 6-3-50 51 51 Series CJ2ZW Air Cylinder: Built-in Speed Controller Type Double Acting, Double Rod Specifications Space-saving air cylinder with speed controller built-in cylinder cover Double acting, Double rod Action Air Fluid 1.05 MPa Proof pressure 0.7 MPa Maximum operating pressure 0.1 MPa Minimum operating

HRX-OM-M090

5.17.1 Data reset function . 5-51 5.17.2 Method of resetting data reset function . 5-51 5.18 Accumulated time reset function . 5-52 5.18.1 Accumulated time reset function . 5-52 5.18.2 Method of resetting accumulated time reset function . 5-52 5.19 Communication function . 5-54 5.19.1 Communication function . 5-54 5.19.2 Communication function setting and checking . 5-54 Chapter 6 OptionOptional

HRX-OM-R016

5.18.1 Accumulated time reset function . 5-51 5.18.2 Method of resetting accumulated time reset function . 5-51 5.19 Communication function . 5-53 5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M

HRX-OM-W038

5.18.1 Accumulated time reset function . 5-51 5.18.2 Method of resetting accumulated time reset function . 5-51 5.19 Communication function . 5-53 5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M

HRX-OM-O021

5.18.1 Accumulated time reset function . 5-51 5.18.2 Method of resetting accumulated time reset function . 5-51 5.19 Communication function . 5-53 5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M

HRX-OM-R005

5.18.1 Accumulated time reset function . 5-51 5.18.2 Method of resetting accumulated time reset function . 5-51 5.19 Communication function . 5-53 5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M

AC Servo Motor Driver (Pulse input type/Positioning type)

Overload alarm margin The margin until the load reaches the overload (AL.50, AL.51) alarm level is displayed in %. An overload alarm will occur when margin is 0%. 0.1% 19 Excessive error alarm margin The margin until the error reaches the excessive error (AL.52) alarm level is displayed in encoder pulses.

High performance type Step Motor Controller (Servo/24 VDC)

Operation instruction 49 (1) Power on Return to origin 49 (2) Positioning operation 49 (3) Pushing operation 50 (4) HOLD 51 (5) Reset 51 (6) Stop 52 (7) Area output 53 11. Alarm Detection 54 11.1 Parallel output for the alarm group 54 11.2 Alarm details 55 12. Wiring of cables/Common precautions 62 13.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Start up procedure for battery-less absolute encoder . 51 10.1 Procedure for start up . 51 10.2 When supplying power for the first time . 52 10.3 Supply of power . 53 10.4 Alarm (group E) is cleared by a cut to the power supply . 54 11.

KA

51 22 1 4 3 8 KAU12-U02 KAU12-U03 53 52 61 55 20.9 12 20.9 22 22 45.4 45.4 1 2 KAU12-U04 62.5 54.5 52 Reference dimensions after Uni thread installation.

VHK

(mm) Model H 1(P) 2(A) L3 L4 L5 L6 Q L1 L2 M1 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-M5-04F VHK-M5-06F 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 3.5 11 18 41 16.5 VHK-01S-04F VHK-01S-06F VHK-01S-08F 62.2 26.2 36 18.7 31 58 17 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 3.4 1.2 21 51 11 23 53 13 4 6

Compact Guide Cylinder Series MGQ

20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGC Made to Order Specifications (For details, refer to pages 1829 to 2021.) 0UT 113 23 34 45 57 68 79 90 102 113 12 6 IN 85 17 26 34 43 51

1

This means that the output can become energized anywhere between 49 to 51 [kPa]. (Refer to the chart below.) Note: If the pressure switch allows an error of 1 [% F.S.], the output turns ON at 51 [kPa]. Taking the repeatability into account, the output turns ON at 50 to 52 [kPa] and, in the same way, the pressure display turns 50 [kPa] at 49 to 51 [kPa]. (Refer to the chart below.)

VHK

18 41 6 60.4 62.4 36.1 38.1 31 54 56 17 14 41 1 8 1 4 3 8 8 18 41 62.2 26.2 36 16.5 3.5 18.7 11 9.7 1.2 31 58 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-08F-01S VHKl-08F-02S VHKl-08F-03S 65.2 66.2 39 40 32 59 60 19 22 40 1 4 3 8 1 2 10 22 46 73.8 30.5 43.3 21.5 4 20.8 14 16.1 3.2 49 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-10F-02S VHKl-10F-03S VHKl-10F-04S 74.8 78.2 44.3 47.7 51 68 17 19 72 70

XL

) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi