Free Mount Cylinder for Vacuum Series ZCUK (mm) DQ HQ HP Model Applicable pad model Note) ZPU-X11 ZC(D)UKD10 ZC(D)UKR10 SP 4 6 8 10 13 16 20 25 32 40 50 10 16 25 40 6 8 10 13 16 20 25 32 40 50 12 18 32 13 7 32 13 9 12 15 18 31 12 2. 6 26 10 2. 6 31 12 4. 8 26 10 4. 8 31 12 7 26 10 7 31 12 9 26 10 9 12 15 18 ZCUK DQ HQ HP AMJ ZP ZC(D)UKD16 ZC(D)UKR16 AMV DQ HQ HP ZC(D)UKD20 ZC(D)UKR20 ZP 53 15 36 16 37 28 20 44 43 29 16 37 53 38
(g) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) When mounting Series CU, refer to the below table. C(D)U6-D Tightening Torque/ 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) Bore size (mm) Hexagon socket head cap screw dia.
Features 5 Series LEPY/LEPS System Construction Supplied by customer PLC Power supply for I/O signal 24 VDC P I/O cable Pages 31, 40 Part no.
Cable connector (4-wire) Right angle type Cable connector (4-wire) Straight type 52 Mounting hole 4 x 7 40 (31) F.R.L.
DOWN OUT1 U P SET ZS-31-A Bracket Note: Mounting screws are not included.
, DZ: 9mm longer 4.2-7 VNA 10A, 15A, 20A, 25A Port size EZ, TZ, DZ: 9mm longer Main Port Rc(PT) A H I J K R F G L M B S N C T P D U Q E Model 3 8 1 2 3 4 VNA2-10A VNA2-15A VNA3-20A VNA4-25A 72.5 80.5 74.5 79.5 82.5 125.5 142.5 24.3 63 124 2.3 52 42 25 26 28 34 4.5 14 55 60.5 73 1 84 100 92 108 135.5 137 153 154 170 83.5 89.5 88.5 94.5 91.5 97.5 28.3 33.3 80 90 2.3 2.3 62 72 50 60 30 35 31
L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.
1.5 0.4 340 10 1.9 34 4.5 0.61 11 250 1.0 6 1.05 19 3 8 (10A) 8 1.7 31 340 0.4 10 2.4 43 (15A) 10 2.4 43 1 2 420 Note) Refer to p.4.0-14 the glossary for detail of max. operating pressure differential and max. system pressure.
Flat vyilh rib 26 28 29 29 29 29 29.5 31 31 5 31.5 32 32.5 Deep type 95 95 95 95 107 IPI $enie ffi[r Bulfm Pad Diameters q2O . a25. s32 Pad Diameters a4O. sSO Ftat type Flai type Dep typeZPT4oD only Deep lypeZPT2sD only Flat typrg . Flat with rib Flat type.
common 31 slave mode I iso ated comrnon As.lnlerhce 4in/21'jrt 31 slavE riode I ho aled con',1ron Wnhod Sl unitinpui block {SDo) Nole 1 ) Indimie the size in lt'e specinton sheel n ihe Ese oi CM and L^r Note 2l Symbols ior inch s zes are
sEve rrlde 1 isolated corlra" 4Te 1 l o 4 ( 8 1 Aslnledace 4irvloul 31 sla!
hn slencer iype d@s nol sal st rhe 1 Io t2124) N4ult'Connector kit wilh 1 5m cable Mulh-conneclor klt wlh 3 0m cable l4ulliconnector kitwiih 5 0m catr]e Botlom ported elbow Wilh03 2 One-touch fttng SeialkitwilhoulSl unit 1n212 (24) Boitom ported elbow Wilh 06 One-touch ntl ng AS. fterla@ 8 n8oul 31 s al/e mode 2 isolatd common ASrledace 4 rll4oLii 31 s ave mode 2 isolaled comfion As-lnledace
High precision type High precision type High precision type High precision type Ta = I (Nm) Basic type Basic type Basic type Basic type I: Inertial moment 1 2 3 7 10 20 30 50 70 100 200 31 41 0.56 41 Refer to page 3. 32 45 0.82 45 . : Angular acceleration Load . 33 48 1.1 48 2 = (rad/s 2) t 2 54 71 1.5 71 : Rotation angle (rad) 86 74 107 2.9 78 74 2.4 78 t: Rotation time (s) 166 137 197
Flat vyilh rib 26 28 29 29 29 29 29.5 31 31 5 31.5 32 32.5 Deep type ) 95 95 95 95 10 IPI $enie ffi[r Bulfm Pad Diameters q2O . a25. s32 Pad Diameters a4O. sSO Flai type Ftat type Dep typeZPT4oD only Deep lypeZPT2sD only Flat typrg . Flat with rib Flat type.
D-C7 D-C8 D-C73C D-C80C D-A3A D-G39A D-K39A D-A44A D-H7W D-H7BAL D-H7F D-G5NTL D-H7 D-H7C D-C73C D-C80C D-B5 D-B6 D-B59W MG MGP A 1(0) 1(0) 2(0) 7 B 0(0) 0(0) 1(0) 6 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B 5(3) 5(3) 6(4) 11 B A B 1.5(0) 1.5(0) A 7(5) 7(5) 8(6) 13 B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 A Hs 22.5 25 28.5 32.5 Hs 25 27.5 31
Dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size A B C D E F H K L M N Model Note) Note) Q R Q R Q R S Q R S U 22 (23) 45 (52) 44 43 58 40.5 46.5 99 43 66 83 13.5 28 64 31 6.5 12.5 27 14 12.8 M4 4.5 1/8 VCL21 22 (23) 46 (53) 44 44 58 41.5 46.5 99 44 66 86 18 36 67.5 31 8.5 12.5 27 18 12.8 M4 6 1/4 24 (25) 56.5 (63.5) 46 54.5 60 52 48.5 101 54.5 68 99 22
Round head combination screw Round head combination screw ( ) M3 x 47 With spring washer ( ) M3 x 31 With spring washer Adapter plate assembly DXT201-3-1A Round head combination screw ( ) M3 x 31 With spring washer Gasket Individual EXH spacer Applicable base VV5Z5-20 VV5Z5-21 VV5Z5-21P (EXH port) 2-Rc 1/8 Gasket Gasket Round head combination screw Applicable base VV5Z5-20 VV5Z5-21 ( ) M3
.: ZS-27-D) 42.4 11 17.8 8 9.5 33.5 33.5 Panel thickness 0.5 to 6 8 2-Color Display High-Precision Digital Pressure Switch Series ZSE30A(F)/ISE30A Panel-cut dimensions 1 pc. mounting Multiple (2 pcs. or more) horizontal mounting 31 0 0.4 31 x n pcs. + 3.5 x (n pcs. 1) 31 0 0.4 31 0 0.4 4 x R2 or less 4 x R2 or less 24 or more Multiple (2 pcs. or more) vertical mounting 31 0 0.4 24 or more
(For DIN rail mounting) 4(A) port side : Blue (For rubber seal) : Gray (For metal seal) 2(B) port side: Yellow Communication connector (DIN rail) Light/surge voltage suppressor Power connector Marker groove 0 1 (5.5) B A B A B A B A B A (35) 3 2 14 A 14 A 14 A 14 A A 14 90 128.8 115 96.7 (77.1) 5.5 0 1 5 4 PWR 2 3 FE terminal PCI BUS OUT BUS IN (8) 75.8 7 8 B 12 B 12 B 12 B 12 12 B 22.8 31
29 14.5 103.3 111.3 155.8 26 26 52 4.5 44.5 25 26.3 115 74.2 1/2 63 49.6 29 14.5 103.3 111.3 155.8 26 26 52 4.5 44.5 25 26.3 115 74.2 3/4 80 59 35 17.5 112 120.5 165 35 31 62 5.5 48 30 31 124.2 80.1 1 90 74 44 22 135.9 144.5 189 40 36 72 6.5 60 35 39.5 148.2 91.1 382 Coolant Valve Series SGC Dimensions External pilot solenoid type (DIN terminal) PP J Pilot port 2 x 1/8" (Back side PE: Filter