Intrinsically Safe Valve

(A), 2(B) port} 46 (E-type) 0.3 mm2 51.5 42 36.6 16.7 1.55 10 (12) 2 x 4.4 (Mounting hole) 24.9 L (Lead wire length) 194.2 97.1 3 x 1/4" {1(P), 3(EB), 5(EA) port} 23 0.5 0.5 EB 3 P 1 EA 5 49.8 02 03 L-type plug connector with cover (LL) 53-SY9220-LLInsulator: Red (+) Insulator: Black () 4.1 16.7 0.3 mm2 L (Lead wire length) 184 02 03 Terminal type (TT) 53-SY9220-TTLead wire marking No. 1

Modular F.R.L. Units

Example) AF30-03B-2R-A-X430 X430 Low temperature X440 High temperature Symbol Description Nq Body size 20 30 40 50 60 Symbol Description Nq Body size 30 40 50 60 Nil Rc N*1 NPT F*2 G + Nw Pipe thread type Nil Rc N*1 NPT F*2 G + Nw Pipe thread type 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Ne Port size Nr Option (Mounting) Nil Without mounting

Table of Contents

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VP4 21 21 Rc(PT)1/4, 3/8 M5 X 0.8 External pilot port (Only external pilot style(R)) (Rc(PT)3/8) (Rc(PT)3/8) P port 33 VQ 3 4 5 L plug connector (L): VQZ3 5 (R)lLl 0 1 02 03 3 4 5 DIN connector (Y): VQZ3 5 (R)lYl 0 1 02 03 VQ4 VQZ Indicator light 155.5<157.5> 300 VQD (Lead wire length) 71<72> VZS Pg.7 VFS MAX.10 163.5 56.5<60> 75 Applicable cord O.D. 3.5 to 7 VS Indicator light Cover diameter

A

-02 1/4 60 48 36 54 Y41-02 1/4 14 39 24 Y44-03 3/8 60 48 36 54 Y41-03 3/8 14 39 24 Y54-03 3/8 72 62 40 62 Y51-02 1/4 14 24 41 Y54-04 1/2 72 62 40 62 Y52-03 3/8 14 24 41 Y61-03 3/8 15 30 50.5 Y61-04 1/2 15 30 50.5 Courtesy of Steven Engineering, Inc. !

Series KP/KPQ/KPG

Male Branch "Y": KPU Effective area mm Note 1) D Model L TPH TPS A H (width across flats) P Connection threads R Weight g Applicable tubing O.D. mm 2-Applicable tubing P M D KPU04-01 KPU04-02 KPU06-01 KPU06-02 KPU08-01 KPU08-02 KPU10-02 KPU10-03 KPU12-03 KPU12-04 7 8 9 10 15 17 23 25 29 30 41.5 43.5 45.5 46.5 52.5 55.5 59 61.5 63.5 65.5 12 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 45.4 49.4

Series KP/KPQ/KPG

Male Branch "Y": KPU Effective area mm Note 1) D Model L TPH TPS A H (width across flats) P Connection threads R Weight g Applicable tubing O.D. mm 2-Applicable tubing P M D KPU04-01 KPU04-02 KPU06-01 KPU06-02 KPU08-01 KPU08-02 KPU10-02 KPU10-03 KPU12-03 KPU12-04 7 8 9 10 15 17 23 25 29 30 41.5 43.5 45.5 46.5 52.5 55.5 59 61.5 63.5 65.5 12 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 45.4 49.4

KP/KPQ/KPG

) (M5) Applicable tubing O.D. mm Connection threads R Note 1) Weight g M L2 D2 L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 17 21 25 18.5 23.5 27.5

KR

(mm) Note) Weight (g) D Applicable tubing KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 1 8 4 15 23 11 16 14 11 13 15 17 13.1 10.4 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 5.6 10 Connection thread 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14

Table of Contents

flow Effective area (mm2) C J G5-S 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420 105 280 Free flow Effective area (mm2) CV 6.5 1.6 4.3 Note) Supply pressure: 0.5 MPa, Temperature: 20C MVGQ Dual Type CC Air Flow/Effective Area RB ASD230FM-M5 ASD330FM-01 ASD430FM-02 Model 8, 10 6 6, 8 Metric size 4, 6 J Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/4", 5/16" 3/8" 3/16", 1/4" Inch size DAir flow (l/min

ZP

L J Model A B C D E 2 F G H J K L M N P Vacuum inlet direction q Pad dia.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

(width across flats) (M5) Applicable tubing O.D. mm Connection threads R Note 1) Weight g D2 M L2 L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

42

: 0.62(n1) + 2.6 F, L, T1 kits 12 stations L F kitD-sub connector L T kitTerminal block box L T1 kitIndividual terminal block kit L L kitLead wire L S kitSerial transmission 3/8 1/2 Side 3/4 Option Direct exhaust with silencer box SV VQ5l00 VQ5l01 T kit 12 stations VQ5000 VV5Q51-lll Not including valve weight.

modular-press-e

G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L G27-10-R1 Note 3) G27-10-R1 Note 3) 0.02 to 0.2 MPa setting Standard G27-10-R1 y IN OUT Round type Note 2) Pressure gauge u r t i (with color zone) 0.02 to 0.2 MPa setting Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] ISE35-R-25

Modular F.R.L. Pressure Control Equipment

G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L G27-10-R1 Note 3) G27-10-R1 Note 3) 0.02 to 0.2 MPa setting Standard G27-10-R1 y IN OUT Round type Note 2) Pressure gauge u r t i (with color zone) 0.02 to 0.2 MPa setting Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] ISE35-R-25

Secondary Batteries

Port size Body size Port size Symbol 2 3 4 02 03 04 06 1/4 3/8 1/2 3/4 *Specifications and dimensions for the 90-series are the same as standard products.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

) (14) 1/4" {P (1) port} 2 x 1/8" {EA (5), EB (3) port} 96.9 (23.9) 0.9 18 2 EB P EA 36 2 x 2.2 (Positioning for manifold gasket) (66) L plug connector with cover (LL) 52-SY7420-LL-02 (-F2) 3 5 L 170.6 (Lead wire length) Insulation: Red (+) Insulation: Black () 4.1 14.7 12 0.3 mm2 91.8 Cable type (TT) 52-SY7420-TT-02 (-F2) 3 5 Max.10 L 204.2 (Lead wire length) Lead wire marking No.1 (+),

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

24 (58) VF (C10) (02) VFR VP7 38.5 31.5 24.5 3 VP4 23.4 Mounting holes 48 (58) 15 15 1.5 1.5 VQ P 3 5 1 2-PE port 2-Rc(PT)1/8 R port VQ4 22.2 Die cast hole For manifold gasket positioning Rc(PT)1/4 P port VQZ VQD 3 4 5 3 4 5 0 1 0 1 DIN connector (Y): VQZ3 2 (R)wYwC6, C8, C10, 02 L plug connector (L): VQZ3 2 (R)wLwC6, C8, C10, 02 VZS 155.5 <157.5> 300 (Lead wire length) 71 <72> VFS Indicator

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Flow Rate and Sonic Conductance AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 10, 12 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Flow rate (L/min (ANR)) 180 230 100 260 390 660 790 460 920 1580 1710 Controlled