ZP

3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5

VEX1

operating frequency Mounting Lubrication Port 01 P A R mm2 02 02 03 04 04 06 10 10 12 14 20 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 4 3 8 1 2 1 2 3 4 There were not many appropriate large capacity 5 port valves of a closed center.

Modular Type Filter Regulator Series AW

Symbol Note 1) Drain guide is NPT1/4 (applicable to AW30 to 40) Note 2) Drain guide is G1/4 (applicable to AW30 to 40). 20 30 40 30 40 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 02 03 04 06 1/4 3/8 1/2 3/4 Option Note 3) Option Note 3) Description With bracket Applicable model AW30, 40 AW30, 40 AW30, 40 Symbol Nil B G Note 4) H Description With bracket Applicable model AW20 to 40 AW20 to 40 AW20

Table of Contents

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

5 Port Air Operated Valve

328 361 394 427 460 493 526 559 128 161 194 227 260 293 326 359 392 425 458 491 524 557 1517 5 Port Air Operated Valve VFA3000/5000 Series Manifold Base Mounted How to Order Manifold VV5FA 3 40 02 2 05 Common exhaust F Series Stations 02 Thread type Nil F N T Series VFA3000 VFA5000 P, R Port size 1/4 3/8 2 stations Symbol 3 5 A, B Port size 1/4 1/4 Rc G NPT NPTF 20 20 stations Up to 10

LEC-OM02704CN

2)5 4 PT3 RY(n+2)6 TL1 RX(n+2)6 5 PT4 RY(n+2)7 PC RX(n+2)7 6 PT5 RY(n+2)8 CDP RX(n+2)8 7 PT6 RY(n+2)9 RX(n+2)9 8 PT7 RX(n+2)A RY(n+2)A RX(n+2)F RX(n+3)0 RY(n+2)B / RX(n+3)9 RY(n2)C RX(n+3)A ALM 15 RY(n+2)F RY(n+3)0 RX(n+3)B Ready CRD RY(n+3)9 RX(n+3)C RY(n+3)A RES RX(n+3)F RY(n+3)B RY(n+3)F . n 3 12 3CC-Link (RWwn) (RWrn) (1) (1) RWwn 1(2) RWrn 116bit RWwn1 2(2) RWrn1

CG5-S

(mm) 4 Connection threads Model -01 R 1/8 -02 R 1/4 KGD06-M5 M5 x 0.8 KGLU04-M5 M5 x 0.8 -01 R 1/8 4 -01 R 1/8 6 -02 R 1/4 -02 R 1/4 -03 R 3/8 KGLU06-M5 M5 x 0.8 KGD08-01 R 1/8 -01 R 1/8 6 8 -02 R 1/4 -02 R 1/4 -03 R 3/8 -03 R 3/8 KGD10-02 R 1/4 KGLU08-01 R 1/8 10 -03 R 3/8 -02 R 1/4 8 -04 R 1/2 -03 R 3/8 KGD12-02 R 1/4 KGLU10-02 R 1/4 -03 12 10 R 3/8 -03 R 3/

VZ100/300/500

L) VZ54-LM plug connector (M) VZ54-M01 02 01 02 01 02 DIN terminal (D) VZ54-DVFN Applicable cable O.D.: 3.5 to 7 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor 4-6-33 34 Series VZ500 Manifold Specifications Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv Manifold 1(P), 3(R) port 2(A) port

Modular Type Regulator Series AR

Symbol 20 25 30 40 50 60 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Name plate and pressure gauge in imperial units (PSI, F) When more than one specification is required, indicate in ascending alphanumeric order.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Intrinsically Safe Valve

5 1 LL 3 SY 53 20 01 Thread type UL/CSA compliant Nil F N T Rc G Series NPT 5 7 NPTF 53-SY5000 53-SY7000 Thread piping A, B port size Type of actuation Symbol Port size Applicable series 1 2 3 4 5 A Note) 01 02 1/8 53-SY5000 2-position single 1/4 53-SY7000 2-position double 3-position closed center One-touch fitting (Metric size) Note) 3-position exhaust center Symbol C4 C6 C8 C8 C10 Port

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

N02 NPT 1/4 NPT 3/8 Note 2) N03 N04 NPT 3/8 NPT 1/2 NPT 3/8 NPT 1/2 Note 1) AS220-02 Note 2) AS320-02 749 AS20-D Series Construction AS3200-02-D Meter-out M5 type U10/32 type Meter-in M5 type U10/32 type AS3210-02-D Component Parts No.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Size 01 (3 position): 0.26 kg Size 02 (3 position): 0.18 kg 3-11-11 12 ISO Standard Solenoid Valve Size 1,2/Single Unit Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

AS22l1FG-02-03(S)A 5/32" 8.2 AS22l1FG-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 18 (18) AS22l1FG-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 19 (20) AS32l1FG-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS32l1FG-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS32l1FG

•

Flat with rib Flat type Flat with rib (mm) (mm) Model A ~ B C D IG:M5X O.8 1G:M6xl y ~ H:M6 x l H:M8'x'1 V , I .c F G .C F G Rat F Ot wilt i ib.: Model A > 8 .1 0 E E F E F Flat Flat with rib ZPT40g 40 43 1 ,85 ZPT1O~ 1 0 12 12 17 20 38 25 43 3 1.7 3 25 50.5 4.5 '5 40.5 65 3.3 24.5 , > ~ . :'z;p-rt:Jg ZPTsog 50 53 " 9.5 1 3 . 15, 12 17 .20 38 25 43 3 1.8 3 25 51.5 4$ '?

VQ4000

(Values at the initial period) Note 3) Values inside ( ) denote the low wattage (0.5 W) specifications. 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position double check (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 2-5-4 5 Base Mounted Series VQ4000 Plug-in/Plug Lead: Single Unit How to Order Valves Body Port size Nil Without sub-plate (For manifold) 0: Plug-in sub-plate 02 03 Rc 1/4 Rc 3/8 Porting specifications

5 Port Solenoid Valve SY Series

One-touch fitting for 8 C8 One-touch fitting for 10 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 12 SY7000 3 position closed center C10 C8 C10 C12 V 6 VDC S 5 VDC 3 SY9000 R 3 VDC Rated voltage For AC ( Hz) 50 60 Thread type 3 position exhaust center One-touch fitting (Inch size) 1 100 VAC 2 200 VAC Nil Rc Symbol Port size Applicable series 4 F G 5 32" One-touch

VM

-36 Key selector (2 position) Red VM230-02-35R VM250-02-35R VM250-02-35B VM250-02-35G VM250-02-35Y Black VM230-02-35B Twist Selector (3 position) Green VM230-02-35G Yellow VM230-02-35Y (3 port) VM220-02-40 (5 port) VM230-02-40 Foot pedal Note) Actuator replacement is available for all styles except twist selector (3 position) and foot pedal. 3.5-19 VM200 How To Order S 01 02 3 0 VM2 Suffix

Direct Solenoid

$mbry tor.in0l6 $rhold v.lv.s .nd a livo (5) wi4 as*mbly lor douor sor.noid valves 3 POLE 3.ndrich tlar6 b..rrno on n3 00P.. .urt.c. . noonnn9 &c.pls .ll NvS a024 v.lvos. ad rilh a F '* 1. Graen 2.8lack 3.Whate l,Whire 2. R.d 3. Grcen To Ordor: 4.

KJ

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10