Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

B C D H SNKJ-016B SNLJ-016B SN-020B SN-032B NTJ-010A NTJ-015A NT-02 NT-03 19.6 M12 x 1 4 8.1 M4 x 0.7 3.2 6, 10 17 6, 10 7 21.9 M14 x 1 5 9.2 M5 x 0.8 4 16 19 16 8 30 M20 x 1.5 8 15 M8 x 1.25 5 20 26 20 13 37 M26 x 1.5 8 19.6 M10 x 1.25 6 25 32 25 17 T-bracket 4-TC TH 7 +0.2 0 TU -0.1 -0.3 TN TK TX TV 12 TD H10 TT TY TW Part no.

RQ

4 4 4 4.5 5.5 5.5 5.5 6.5 5.5 6.5 Hysteresis specifications are given as a guide, it is not a guaranteed range.

Speed Controller: Standard Type Series AS In-line Type 1

Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3

CE

B H NTJ-015A NT-02 NT-04 NT-05 M5 x 0.8 7.8 9.2 12 8 4 H B M8 x 1.25 12.5 15.0 20 13 5 M14 x 1.5 21.0 25.4 32, 40 22 8 M18 x 1.5 26 31.2 50, 63 27 11 Electrical Wiring Input/Output The input/output of the scale cylinder is performed by a 7 shielded twisted pair wire from the sensor section plus a connector.

Series AP3100

25 50 57 2PW Multi turn round knob Specification Code No code 1/4 turn lever knob 1/4 turn round knob Connections (Inlet, Outlet) Indicator switch Handle 4) ISH Code Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 3/8 inch tube weld 1/2 inch face seal (Female) 1/2 inch face seal (Male) 1/2 inch tube weld 3/4 inch face seal (Female) 3/4 inch face seal (Male) 3/4 inch tube

Residual Pressure Release Valve

Multi-holder (TMA series) for fixing the KE series Refer to page 531 for details. 8 4.2 Connection thread W L2 L2 (mm) Symbol W H Width across flats Model Connection thread Rc 1/4 Rc 3/8 15.2 20.9 27 29 35.3 40 6 7.5 15.4 21.1 64 89 17 19 Weight (g) Connection thread D L1 L2 Q KEC-02 KEC-03 665

Compact Cylinder with Air Cushion Series RQ

Standard type (through hole, double end tapped common)/RQB, RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H effective thread depth C E1 E2 Q F 4-5.4 through D M E 1 Flat washer 4 pcs.

Microspeed Cylinder

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" 38 (1.33) 7 (0.25) Flow rate l/min (ANR) (CFM) 12 (0.42) Controlled flow 0.6 (0.03) 0.2 (0.01) 0.1 (0.006) Effective area

VT325

1 4 4 AC: Can be attached to Grommet, Conduit, Conduit terminal.

48

ML 4 x OA through 4 x OB counterbore depth OL L (OL) 4 x NN through 2 x P (Plug) U X PW VA PE R H T 2 x P D GC GB S Q 2 x P (Plug) GA JC PD GD FB C + Stroke FA G K J A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB GC GD H J JC K L MM ML NN 80 (56 x 2) 25, 50, 100 150, 200 85.5 62 25 19.5 4 69 28.5 20.5 25 22 202 34.5 15.5 34.5 50 M12 x 1.75 30 M10 x 1.5 100 (71 x 2) 94.5 66

Quick Exhaust Valve Series AQ 1

1/4" 13.2 7.1 22.2 15-12-4

Series 10-, 21- AW-B Filter Regulator

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

Series Dimensions Lateral load resisting/Basic type (Through hole & Double end tapped): MQQLB 10, 16, 20 H effective thread depth C 2-M5 x 0.8 2 x 4-OB 2 x 4-OA effective depth RA Y Q F Depth of counterbore RB I 4-N through 4-N through M0.2 D E K B + Stroke L M0.2 A + Stroke E 25, 30, 40 H effective thread depth C 2 x 4-OA effective depth RA 2-Rc1/8 (NPT1/8, G1/8) 2 x 4-OB Y Q F Depth of

Electro-pneumatic Proportional Valve Series VEF/VEP 1

Rc 1/4 Rc 3/8 Nil 02 03 03 04 06 0.05 to 0.65 MPa 1 2 2 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 0.1 to 0.9 MPa 2 02 03 04 03 04 06 1 3 30 Rc 3/8 Rc 1/2 Rc 3/4 4 0.005 to 0.15 MPa 1 1 4 45 1 2 3 4 12 8 4.5 2.5 Without sub-plate Rc 1/4 Rc 3/8 Nil 02 03 JIS Symbol Flow type Flow type Pressure type 2 3 03 04 06 25 Rc 3/8 Rc 1/2 Rc 3/4 4 1 14-9-11 2 Series VEF/VEP Application Example How to

Electro-Pneumatic Proportional Valve Series VEF/VEP

1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2(A) 1/4 3 3/8 2(A) 2(A) 1(P) 3(R) 1(P) 3(R) 03 04 06 25 3/8 1/2 3/4 1 4 Note) Does not conform to ISO1179-1. 886 Series VEF/VEP Electro-Pneumatic

PSxx-OMG0005CN

[V] A B C 0-101 kPa 0 -101 kPa 10.1 kPa -100100 kPa -100 kPa 100 kPa 01 MPa 0 1 MPa -0.1 MPa 0500 kPa 0 500 kPa -50 kPa -13No.PS-OMG0005CN-E PSE5601 PSE56N01 02 N02 PSE56-C01 A B PSE56-01 8.2 R1/8 PSE56-02 12 R1/4 PSE56-N01 9.2 NPT1/8 PSE56-N02 12.2 NPT1/4 PSE56-A2 PSE56-C01 Rc1/8 PSE56-A2 15.5 URJ1/4 PSE56-B2 9.5 TSJ1/4 PSE56-B2 ZS-31-X D E F G H I ZS-31-X188 20 9 R1/8 R1/8 14 1.5

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm/s] 500 500 410 340 250 200 170 [mm/s] 30 20 10 () [mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

AR20-B to AR60-B

H H Center of piping Center of piping Center of piping Dimensions Model Standard specifications Optional specifications Square type pressure gauge Digital pressure switch Round type pressure gauge Round type pressure gauge (with color zone) P1 P2 A B Note 1) C D F J K H J H J H J H J AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 AR20(K)-B 1/8, 1/4 1/8 40 67.4 26.5 28.5 M28 x 1

LC6D/LC6C

-X252 Cable length 0.2m LC6C LC6C Cable length: 1 to 5m 2 1 4 3 6 5 8 7 10 9 12 11 14 13 16 15 18 17 20 19 1 Communication connector 2 c Cable length: 0.2m 20 View c 315