Shock Absorbers and Rate Controls

(lR)otill.l5xl (M(Sl 1.0 6.44 .25',| +.005/-.000 .251 +.005/-.000 o t l +.005/-.000 .l +.001 0 .010 |1/A 1.50il/A .88 .33 .23 .44 1.6 lbs. (LRl0lilll.l5x2(t(S) 2.0 9.07 -1.01 -ri 'bo +tr 0 .010 .500 + m0/'.010 r'r/A 1.50r'r/A .88 .23 .33 .23 .44 1.6 lbs. (tRlorilt.25xt ot(s) 1.0 6.44 +.005/. .7s +M5/.

3 Position Cylinder Series RZQ

4.5 57 14 40 118.5 96.5 16 35 64 37 14 12 M10 x 1.5 86 7 30 22 50 6.6 M8 x 1.25 11 Rc1/4 30 17 14 3 8 5.5 71 19 50 45 M16 x 2.0 84 130 102 21 77 39.5 16.5 15 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 36.5 21.5 18 4.5 10.5 6.5 19 63 9 3 Position Cylinder Series RZQ Foot type/RZQL Foot type (mm) B + Full stroke L Bore size (mm) A LH LS L LD LG B 30 18 6.6 4 107.7 82.5 66.5 32 Special cap bolt 33

Antistatic One-touch Fittings Series KA

(mm) Weight (g) M A L D Part No. 3.2 4 33.5 34.5 36.5 18.5 KAR23-04 18.5 17.5 18 15.5 9.6 3.4 2.9 2.3 2.1 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 10 KAR04-10 39.5 37 39.5 3.6 3 KAR06-08 8 18.5 6 10 KAR06-10 17 12.8 KAR06-12 42 5.2 12 20 3.5 13.1 13.1 8 KAR08-10 41 4.5 18.0 18.0 10 20 18.5 15.2 KAR08-12 42 5.1 12 10 KAR10-12 42 33 32.8 32.8 12 20 21 17 139

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

Air Cylinder Series MB

Z Bore size (mm) Z B DA DB DL DU DC DX DE DR DO DT DS DH DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 32 40 50 63 80 100 125 32 40 50 63 80 100 125 33 33 45 45 65 65 75 46 52 65 75 95 114 136 32 32 43 43 64 64 78 22 22 30 30 45 45 60 10 10 11.5 11.5 14 14 15 44 44 60 60 86 86 110 14 14 20 20 30 30 32 62 62 81 81 111 111 136 6.6 6.6 9 9 11 11 13.5 15 15 18 18 22 22

5 Port Solenoid Valve SY Series

light/surge voltage suppressor Response time (ms) (at the pressure of 0.5 MPa) Type of actuation Without light/surge voltage suppressor 12 or less Type of actuation Without light/surge voltage suppressor 31 or less Type R, U Type S, Z 12 or less 15 or less 2 position single 10 or less 10 or less 13 or less 2 position double 15 or less 16 or less 20 or less 3 position Type R, U Type S, Z 33

5 Port Solenoid Valve Series SQ1000/2000

100 Rubber seal 33 or less Note 1) In case of low temperature, use dry air with no condensation.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3 (R2) Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber Nil: Non-locking push type (tool required) B: Slotted locking type (tool required) 4 1 5 (R1) 3 (P)(R2) 1 (P) 5 (R1) 3 (R2) 2 Bore 6.1 Bore 6.1 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 PUSH TURN LOCK 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Note) See page 33

5 Port Solenoid Valve, Series VQC

or less 25 or less Rubber seal VQC1301 0.70 0.65 0.20 0.16 0.42 0.18 78 (0.17) 26 or less 20 or less Metal seal VQC1400 0.68 0.72 0.15 0.16 0.25 0.18 Exhaust center Symbols 33 or less 25 or less Rubber seal VQC1401 0.70 1.0 0.20 0.16 0.30 0.25 2-position single 26 or less 20 or less Metal seal VQC1500 0.70 0.72 0.15 0.16 0.25 0.18 Pressure center (A)( 4 B) 2 33 or less 25 or less Rubber

High Purity Chemical Valve

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2m LVA3m LVA4m LVA5m LVA6m 66.5 12.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 (mm) Dimensions A B Q R P C E F G H K L N Model LVA1m 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2m 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3m 36 47 78.5 13

30

(mm) Connection thread Rc T (M) Width across flat M Weight (g) Mounting hole L1 L2 Model H1 H2 KQB2E23-02 KQB2E04-01 KQB2E04-02 KQB2E06-01 KQB2E06-02 KQB2E06-03 KQB2E08-01 KQB2E08-02 KQB2E08-03 KQB2E10-02 KQB2E10-03 KQB2E12-03 KQB2E12-04 KQB2E16-03 KQB2E16-04 3.2 3.4 1/4 1/8 1/4 1/8 1/4 3/8 1/8 1/4 3/8 1/4 3/8 3/8 1/2 3/8 1/2 17 14 17 11 12 31 25.8 30.9 24.2 31.6 33 26.3 32.4 34 31.6 33.6

Digital Pressure Switch

[F 0] Units selection function Page 32 Units specification Pressure range Default setting ISE20C(H) MPa "Nil" or M ZSE20C(F) kPa ISE20C(H) P psi ZSE20C(F) [F 1] Setting of OUT1 Page 33 Item Explanation Default setting Output mode Either hysteresis mode, window comparator mode, error output or output off can be selected.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Do not use any cable other than this cable. 2500 10 to 20 (33) 3000 (20) 4.0 6 (55) (100) 775 LECYM/LECYU Series AC Servo Motor Driver/ Specific Product Precautions 1 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 3 to 8 for Electric Actuator Precautions. Design/Selection Handling Warning Warning 1. Use the specified voltage.

Ionizer Nozzle type IZN10 Series IZS

rail mounting bracket/IZN10-B3 (Mounting angle adjustable range) 40 17 50 Internal mounting 2 x 3.4 33 20.5 30 30 44 70 61 70 55 26 17 11 8 x 3.4 9 (7.5) 40 5 2 x Hexagon socket head cap screw M3 x 6 20 26 12 (Accessory) Internal mounting Pivot mounting 33 21 (Mounting angle adjustable range) (99) 30 Power supply cable/IZN10-CP 5.8 5 9 20 1 60 L Cable Specifications No. of cable wire/Size

1

across flats B1 Female thread MM Depth A1 NA D MM AL A F H ZZ + Stroke S + Stroke F 1.5 1.5 Effective thread length 2 x FL NA H ZZ + Stroke Female rod end Female Rod End [mm] [mm] Bore size A AL B1 D E F FL H H1 KA MM NA NN Bore size A1 H MM 20 14.5 12 13 8 18 0 0.033 11 8.5 30 5 Width across flats 6 length 3.5 M8 x 1.25 24 M18 x 1.5 20 8 15.5 M4 x 0.7 25 17.5 15 17 10 22 0 0.033 11 8.5 33

48

16 (12 x 2) Standard: JMGPM WA + Stroke/2 Z X 4 x YY depth YL Bottom view WA + Stroke/2 Z 4 x OA through 4 x OB counterbore depth OL 4 x MM depth ML L 2 x P (Plug) (OL) 4 x NN through PW X U H VA PE T R 2 x P (Plug) 2 x P D 2 x P (Plug) GB GA S Q JC J K PD C + Stroke FB FA G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB H J JC K L MM ML NN 12 (10 x 2) 10, 20, 30, 50, 100 33

Compact Guide Cylinder

16 (12 x 2) Standard: JMGPM WA + Stroke/2 Z X 4 x YY depth YL Bottom view WA + Stroke/2 Z 4 x OA through 4 x OB counterbore depth OL 4 x MM depth ML L 2 x P (Plug) (OL) 4 x NN through PW X U H VA PE T R 2 x P (Plug) 2 x P D 2 x P (Plug) GB GA S Q JC J K PD C + Stroke FB FA G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB H J JC K L MM ML NN 12 (10 x 2) 10, 20, 30, 50, 100 33

KS/KX

38 39 29 32 33 34 1 8 18 15.2 27 18.5 6 1 4 3 8 1 4 3 8 1 2 3 8 1 2 17 21.6 14.9 8 Applicable tubing 42 10 18.5 32 23.5 21 22 30.5 25.0 7 43 44 45 Connection thread 42 40 43 24 20.9 26 35 22 8 35.1 35.1 12 Reference dimensions after R thread installation.

15

thread depth 13 +0.030 0 4 x FA thread depth FB (170) Body mounting reference plane Note ) 106 Mounting pitch: FC 60 45 58 Motor mating part: FD, depth FE 7 46 8 7 74 M4 x 0.7 thread depth 8 (F.G. terminal) 6H9 ( ) depth 7 +0.030 0 L A (Table traveling distance) (86) 66 6 86 97.5 (12) Motor Belt tension adjustment bolt (M5: Width across flats 8) Motor flange 61 53.8 68 65.5 FF (68) 60.5 33

Thermo-chiller/Rack Mount Type

Option 1 (pp. 32, 33) Nil None DM With electric conductivity control function, Applicable to DI water piping M Applicable to DI water piping T1 Inverter pump mounted Power supply 20 Single-phase 200 to 230 VAC (50/60 Hz) When multiple options are combined, indicate symbols in alphabetical order.