5 Port Solenoid Valve Series SQ1000/2000

100 Rubber seal 33 or less Note 1) In case of low temperature, use dry air with no condensation.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3 (R2) Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber Nil: Non-locking push type (tool required) B: Slotted locking type (tool required) 4 1 5 (R1) 3 (P)(R2) 1 (P) 5 (R1) 3 (R2) 2 Bore 6.1 Bore 6.1 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 PUSH TURN LOCK 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Note) See page 33

5 Port Solenoid Valve, Series VQC

or less 25 or less Rubber seal VQC1301 0.70 0.65 0.20 0.16 0.42 0.18 78 (0.17) 26 or less 20 or less Metal seal VQC1400 0.68 0.72 0.15 0.16 0.25 0.18 Exhaust center Symbols 33 or less 25 or less Rubber seal VQC1401 0.70 1.0 0.20 0.16 0.30 0.25 2-position single 26 or less 20 or less Metal seal VQC1500 0.70 0.72 0.15 0.16 0.25 0.18 Pressure center (A)( 4 B) 2 33 or less 25 or less Rubber

High Purity Chemical Valve

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2m LVA3m LVA4m LVA5m LVA6m 66.5 12.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 (mm) Dimensions A B Q R P C E F G H K L N Model LVA1m 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2m 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3m 36 47 78.5 13

30

(mm) Connection thread Rc T (M) Width across flat M Weight (g) Mounting hole L1 L2 Model H1 H2 KQB2E23-02 KQB2E04-01 KQB2E04-02 KQB2E06-01 KQB2E06-02 KQB2E06-03 KQB2E08-01 KQB2E08-02 KQB2E08-03 KQB2E10-02 KQB2E10-03 KQB2E12-03 KQB2E12-04 KQB2E16-03 KQB2E16-04 3.2 3.4 1/4 1/8 1/4 1/8 1/4 3/8 1/8 1/4 3/8 1/4 3/8 3/8 1/2 3/8 1/2 17 14 17 11 12 31 25.8 30.9 24.2 31.6 33 26.3 32.4 34 31.6 33.6

Digital Pressure Switch

[F 0] Units selection function Page 32 Units specification Pressure range Default setting ISE20C(H) MPa "Nil" or M ZSE20C(F) kPa ISE20C(H) P psi ZSE20C(F) [F 1] Setting of OUT1 Page 33 Item Explanation Default setting Output mode Either hysteresis mode, window comparator mode, error output or output off can be selected.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Do not use any cable other than this cable. 2500 10 to 20 (33) 3000 (20) 4.0 6 (55) (100) 775 LECYM/LECYU Series AC Servo Motor Driver/ Specific Product Precautions 1 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 3 to 8 for Electric Actuator Precautions. Design/Selection Handling Warning Warning 1. Use the specified voltage.

Ionizer Nozzle type IZN10 Series IZS

rail mounting bracket/IZN10-B3 (Mounting angle adjustable range) 40 17 50 Internal mounting 2 x 3.4 33 20.5 30 30 44 70 61 70 55 26 17 11 8 x 3.4 9 (7.5) 40 5 2 x Hexagon socket head cap screw M3 x 6 20 26 12 (Accessory) Internal mounting Pivot mounting 33 21 (Mounting angle adjustable range) (99) 30 Power supply cable/IZN10-CP 5.8 5 9 20 1 60 L Cable Specifications No. of cable wire/Size

1

across flats B1 Female thread MM Depth A1 NA D MM AL A F H ZZ + Stroke S + Stroke F 1.5 1.5 Effective thread length 2 x FL NA H ZZ + Stroke Female rod end Female Rod End [mm] [mm] Bore size A AL B1 D E F FL H H1 KA MM NA NN Bore size A1 H MM 20 14.5 12 13 8 18 0 0.033 11 8.5 30 5 Width across flats 6 length 3.5 M8 x 1.25 24 M18 x 1.5 20 8 15.5 M4 x 0.7 25 17.5 15 17 10 22 0 0.033 11 8.5 33

48

16 (12 x 2) Standard: JMGPM WA + Stroke/2 Z X 4 x YY depth YL Bottom view WA + Stroke/2 Z 4 x OA through 4 x OB counterbore depth OL 4 x MM depth ML L 2 x P (Plug) (OL) 4 x NN through PW X U H VA PE T R 2 x P (Plug) 2 x P D 2 x P (Plug) GB GA S Q JC J K PD C + Stroke FB FA G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB H J JC K L MM ML NN 12 (10 x 2) 10, 20, 30, 50, 100 33

Compact Guide Cylinder

16 (12 x 2) Standard: JMGPM WA + Stroke/2 Z X 4 x YY depth YL Bottom view WA + Stroke/2 Z 4 x OA through 4 x OB counterbore depth OL 4 x MM depth ML L 2 x P (Plug) (OL) 4 x NN through PW X U H VA PE T R 2 x P (Plug) 2 x P D 2 x P (Plug) GB GA S Q JC J K PD C + Stroke FB FA G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB H J JC K L MM ML NN 12 (10 x 2) 10, 20, 30, 50, 100 33

KS/KX

38 39 29 32 33 34 1 8 18 15.2 27 18.5 6 1 4 3 8 1 4 3 8 1 2 3 8 1 2 17 21.6 14.9 8 Applicable tubing 42 10 18.5 32 23.5 21 22 30.5 25.0 7 43 44 45 Connection thread 42 40 43 24 20.9 26 35 22 8 35.1 35.1 12 Reference dimensions after R thread installation.

15

thread depth 13 +0.030 0 4 x FA thread depth FB (170) Body mounting reference plane Note ) 106 Mounting pitch: FC 60 45 58 Motor mating part: FD, depth FE 7 46 8 7 74 M4 x 0.7 thread depth 8 (F.G. terminal) 6H9 ( ) depth 7 +0.030 0 L A (Table traveling distance) (86) 66 6 86 97.5 (12) Motor Belt tension adjustment bolt (M5: Width across flats 8) Motor flange 61 53.8 68 65.5 FF (68) 60.5 33

Thermo-chiller/Rack Mount Type

Option 1 (pp. 32, 33) Nil None DM With electric conductivity control function, Applicable to DI water piping M Applicable to DI water piping T1 Inverter pump mounted Power supply 20 Single-phase 200 to 230 VAC (50/60 Hz) When multiple options are combined, indicate symbols in alphabetical order.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Round head combination screw SY100-33-3 (M1.7 x 17, Matt nickel plated) Round head combination screw Round head combination screw SY100-33-3 (M1.7 x 17, Matt nickel plated) Blanking plate A Manifold gasket A P P A Manifold gasket SYJ300-5-12 Manifold gasket SYJ300-5-6 Applicable base Sub-plate 10-SS3YJ3-20(-Q) 10-SS3YJ3-41(-Q) 10-SS3YJ3-S41

Speed Controller with

8.2 9.8 10.9 10.3 11.3 7.9 11.1 11.8 12.8 12.3 13.4 16.3 17.6 19.3 20.1 21.7 22.8 22.7 23.7 20.9 23.8 24.5 25.5 28.9 30 33.2 34.5 38.6 39.4 41 42.1 51.6 52.6 11 9.8 5 6.7 9.8 10.1 12.3 11.5 12.3 15.7 16.1 8.8 2 3.2 4 6 4 6 6 8 6 8 10 12 10 12 12.7 3.3 5.5 9.1 11 15.4 8.8 13.5 12.7 13.5 17 18 17 18 21 22 21 22 3.3 5.5 10 12.6 17 10.5 4.3 7.8 14 17 12 22.8 20.5 4.3 8 19.3 22 25 12 22.1 28 33

AS-FPQ/AS-FPG

33 36 17.7 6 12.8 26.8 18.5 33 36 33 40.3 35.3 R 1/4 17 18.5 34.8 29.4 (18.2) 8 15.2 29.4 20.5 35 35 38.6 (40.8) (35.8) 10 18.5 37.3 23 38 38 46.5 18.3 (18.8) 6 12.8 29.4 18.5 59 40.9 55 8 15.2 31.9 20.5 61 43.4 57 19.8 45.8 40.8 R 3/8 19 23 40.6 35.6 10 18.5 33.6 45.1 23 63 59 (20.9) (46.9) (41.9) 12 20.9 34.8 46.3 24 65 61 10 18.5 35.6 49.9 23 107 100 24.5 57.2 49.7 R 1/2 24 28.6 49.9

AS-FPQ/AS-FPG

33 36 17.7 6 12.8 26.8 18.5 33 36 33 40.3 35.3 R 1/4 17 18.5 34.8 29.4 (18.2) 8 15.2 29.4 20.5 35 35 38.6 (40.8) (35.8) 10 18.5 37.3 23 38 38 46.5 18.3 (18.8) 6 12.8 29.4 18.5 59 40.9 55 8 15.2 31.9 20.5 61 43.4 57 19.8 45.8 40.8 R 3/8 19 23 40.6 35.6 10 18.5 33.6 45.1 23 63 59 (20.9) (46.9) (41.9) 12 20.9 34.8 46.3 24 65 61 10 18.5 35.6 49.9 23 107 100 24.5 57.2 49.7 R 1/2 24 28.6 49.9

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

4 8.2 AS22l1F-U01-06A 6 10.4 10 AS22l1F-U01-08A 8 13.2 22.4 29.5 14.2 11 AS22l1F-U01-10A 10 15.9 25.3 32.4 15.6 12 AS22l1F-U02-23A 3.2 1/8 13 7.2 20.9 30.2 22.6 36.6 35 30.2 28.6 13.3 17 AS22l1F-U02-04A 4 8.2 AS22l1F-U02-06A 6 10.4 23.4 32.7 AS22l1F-U02-08A 8 13.2 23.9 33.2 14.2 18 AS22l1F-U02-10A 10 15.9 26.9 36.2 15.6 19 AS32l1F-U02-06A 6 1/4 17 13 13.3 39 AS32l1F-U02-08A 8 13.2 22.7 33

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

KJ10D KJ12D KJ16D KJ20D KJ27D M10 x 1.25 10 43 28 14 20 4 15 M12 x 1.25 12 50 32 16 22 4 17 M16 x 1.5 16 64 42 21 28 4 23 M20 x 1.5 20 77 50 25 33 4 27 M27 x 2 30 110 70 37 51 4 36 83 Series CP96/C96 Simple Specials These changes are dealt with Simple Specials System.