HRX-OM-R016

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermochiller.

HRX-OM-R005

1 Part number of product HRS Series 2.1 Part number of product 2-1 HRX-OM-R005 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts Fig. 2-2 Names of each part Table 2-1 Accessories list (2) (4) 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

HRX-OM-W038

2 Names of each part Table 2-1 Accessories list 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

2/3 Port Valve

22 2, 23 2 1 2 3 2 3 4 2 3 4 2 3 4 2 3 4 1 2 3 Option (Bracket) Grommet: G Conduit: C Min. pitch for bracket is H mm.

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

New

B1 A B 2 x P 1(IN), 2(OUT) port 2 x M5 Thread depth N 2 x P 1(IN), 2(OUT) port B 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal Cable 0.24 to 0.47 Q F D D S G1/2 Qp0.08 F 1.34 (1.73) 1.26 R 1.24 0.99 T C K C R E E Sp0.08 A A B1 2 x P 1(IN), 2(OUT) port B1 2 x P 1(IN), 2(OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H G1/2 J H (inch) Grommet Grommet (with surge

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

2 !

HRX-OM-X071

Fig 2-2 Part number of product(2/2) 2.1 Model Number of Product HRR Series 2-2 HRX-OM-X071 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts 2.2.1 HRR050-A-20/40(Air cooled type) In the case of option Z, without bypass valve Fig 2-3 Names of the parts Table 2-1 Accessory list 2 copies Operation manual (English 1 copy/ Japanese 1 copy) Power supply connector 1 pc.

CRB2/CRBU2/CRB1

Inertial moment . 3.5 x 10-6 kgm2 2 t E = I 2, = 1 2 Rotation time . 0.12s/90 CRB2BW, CRBU2W20 are selected in this case. 2.

Title not found

/4 1-1/4 1-1/2 1-1/2 2 2 2 2-1/2 25 180 1-1/4 1-1/2 1-1/2 1-1/2 2 2 2 2-1/2 2-1/2 30 240 1-1/4 1-1/2 1-1/2 2 2 2 2-1/2 2-1/2 3 40 300 1-1/2 2 2 2 2 2-1/2 2-1/2 3 3 50 360 1-1/2 2 2 2 2-1/2 2-1/2 2-1/2 3 3 60 450 2 2 2 2-1/2 2-1/2 3 3 3 3-1/2 75 600 2 2-1/2 2-1/2 2-1/2 3 3 3 3-1/2 4 100 750 2 2-1/2 2-1/2 3 3 3 3-1/2 3-1/2 4 125 Pneumatic Pressure Loss Figures in the table below are approximate

Title not found

/4 1-1/4 1-1/2 1-1/2 2 2 2 2-1/2 25 180 1-1/4 1-1/2 1-1/2 1-1/2 2 2 2 2-1/2 2-1/2 30 240 1-1/4 1-1/2 1-1/2 2 2 2 2-1/2 2-1/2 3 40 300 1-1/2 2 2 2 2 2-1/2 2-1/2 3 3 50 360 1-1/2 2 2 2 2-1/2 2-1/2 2-1/2 3 3 60 450 2 2 2 2-1/2 2-1/2 3 3 3 3-1/2 75 600 2 2-1/2 2-1/2 2-1/2 3 3 3 3-1/2 4 100 750 2 2-1/2 2-1/2 3 3 3 3-1/2 3-1/2 4 125 Pneumatic Pressure Loss Figures in the table below are approximate

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2

High Purity Chemical Valve

19 110.5 112.5 37 26 37 Rc 1/4, 3/8, NPT 1/4, 3/8 M6 x 1 46 60 99 16 20.5 138 142 47.5 33.5 50 Rc 3/8, 1/2, NPT 3/8, 1/2 M8 x 1.25 30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 30 36 58.5 44 14.5 10 79 80.5 4 20 37 3.5 27 Rc 1/4, NPT 1/4

JXCx-OMY0008

JXC-OMY0008-A (1) Wiring of power supply (C24V, M24V, 0V) 23 (2) Wiring of the stop switch (EMG) 23 (3) Wiring of the lock release (LK RLS) 23 6.4 Wiring of stop circuit 24 (1)Stop (example of recommended circuit) 24 (2) Stop (relay contact (1)) 25 (3) Motor power shutdown (relay contact (2)) 26 7. LED display 27 7.1 LED display 27 7.2 LED and Controller Status 27 8.

JXCx-OMY0004

Movement mode 1: ABS (Absolute) 2: INC (Relative) (7, 10) 2-7.

SYJ300/500/700

(For details, refer to page 4-4-11.) 4-4-6 7 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ300 Construction (A) 2 (A) 2 N.C.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

PWR: Power supply plug . 27 5.1 Power supply plug specifications . 27 5.2 Electric wire specifications . 27 5.3 Wiring of power supply plug . 28 (1) Wiring of the power supply (C24V, M24V, 0V) . 28 (2) Wiring of the stop switch (EMG) . 28 (3) Wiring of the lock release (LK RLS) . 28 5.4 Stop circuits . 29 (1) Example circuit 1 Single controller with teaching Box . 29 (2) Example circuit 2

100

2 !3 !

VCL

2 stns. x 1 3 stns. x 1 2 stns. x 2 2 stns. + 3 stns. 3 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. + 3stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. x 2 Dimensions (mm) Electrical entry B C D E G H J Z A Model Grommet Conduit DIN terminal Conduit terminal Note) Note) Q R S T U V W N X Y VV2CL2 49 20 24.5 28 4.5 38 17.3 34.5 56 22 (23) 45.5 (52.5) 44 43.5 46 58 41.5 66 99 77 VV2CL3 57 25.5 28.5

Valve Single Unit

Description Note M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm 1 4 3 8 SY5000-27-1 Rc: SY7000-27-1 Rc: SY7000-27-2 SY3000-27-1 Sub-plate Aluminum die-casted i Gasket o HNBR SY5000-11-15 SY7000-11-11 SY3000-11-25 Round head combination screw For valve mounting (Matt nickel plated) M3 x 30 M4 x 35 SX3000-22-2 (M2 x 24) 1-6-31 Base Mounted Series SX3000/5000/7000 Dimensions: Series SX7000 2 position single