Speed Controller: Standard Type Series AS In-line Type 1

L1 L2 L3 L4 L5 L6 L7 L8 D Model Bore size ASS AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 40 56 30 30 45.5 5 5 5.25 17 23 25 10 11.5 13.2 15.5 17 20.6 54.5 56 68 50 51.5 61 16 20 26 4.5 4.5 5.5 1 4 1 4 ASR Effective thread depth 6 8 3 Dimensions: AS5000 ASF 2-1/4 to 1/2 2-M4 x 0.7 Effective thread depth 7 15-9-31

MHF2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS 62 86 MHC 33 Finger closing port M5 x 0.8 2-M6 x 1 thread depth 6 56 MHT Mounting thread E 13 MHY 25 30 41 25 MHW MRHQ 2-5.2 through (Mounting hole) 0 -0.1 32 E Misc.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 54 80 40 42 60 12 +0.3 +0.1 30 3 42H9 +0.062 depth 4 36 0 36 56 4-M8 x 1.25 thread depth 9 (Thread for mounting attachment) Rc 1/8 (Finger closing port) Auto Switch Mounting Groove Dimensions 67 45 28 20 O S 10 10 33.5 14 Rc 1/8 (Finger operating port

ARJ310

6 t Zinc chromated w Electroless nickel plated Black zinc chromated Accessory Accessory IN 2 Series ARJ310 Dimensions ARJ310-01 ARJ310F-01 Approx. 31 Approx. 56 Approx. 56 Approx. 35 32 22 M12 x 1 Panel fitting dimensions 12.5/Panel thickness: 4 or less Approx. 27 19 2 2 -5.5 Approx. 57.2 8.5 Approx. 82.5 15 Applicable tube O.D. 4, 6, 5/32, 1/4 Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge

AN

) (g) Model Port size Effective area Weight Dimensions (mm) R(PT) (mm2) (g) AN103-01 10 1 23.5 11 3 36 16 14 17 66 22 19 A B D A B D 1 8 1 4 2504-002 33.9 111 62 30 24 106 64 30 24 113 68 30 24 AN203-02 15 1 4 AN303-03 35 3 8 25 84 25 22 AN403-04 60 1 2 2505-003 45.9 3 8 2506-004 50.0 1 2 310 88.5 48 35 2507-006 105.6 3 4 514 97.5 60 41 2508-010 129.6 1 57 54 22 19 2510-002 17.2 1 4 55 56

AS-FG/ASD-FG

23 63 18.5 19 12.9 20.6 28.2 49.1 56.2 18.5 AS331FG-03-08 AS331FG-N02-11 32.6 39.7 43.7 3/8" 8 15.2 17.9 59 23 16.2 69 21 R(PT) 3/8 46.5 41.5 23 19 40 35 32.6 53.5 46.1 21 AS331FG-03-10 AS331FG-N03-07 25.6 43.7 38.7 1/4" 10 18.5 13.2 63 56 17 16.2 20.6 12.9 23 NPT 3/8 46.5 41.5 40.2 35.2 34.4 55.3 49.1 22 AS331FG-03-12 AS331FG-N03-09 28.2 44.9 39.7 5/16" 12 20.9 15.2 65 23 59 18.5 19 32.6

High Purity Fluoropolymer

L H M W E Y N (L) LQ2H21-F LQ2H22-F LQ2H23-F LQ2H24-F LQ2H31-F LQ2H32-F LQ2H33-F LQ2H34-F LQ2H35-F LQ2H36-F LQ2H41-F LQ2H42-F LQ2H43-F LQ2H44-F LQ2H51-F LQ2H52-F LQ2H53-F LQ2H54-F 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 Rc (NPT) Port size W 1/8" 18.5 19 19.9 16 18 39.2 1/4" 21.5 (Y) (M) 44.2 1/4" 21.5 (E) H 43.7 22 26.2 24 24 Class 2, 3 46 3/8" 25 45.5 52 51 57 56 63.5 64.5 65 66

MHY2/MHW2

MHW2-32D1.SMHW2, #6 20 18 7 27 4-M6 X 1 (Thread for mounting attachment) 34 2.8-21 51 Series MHW2 Dimensions MHW2-40D Flat finger (Standard) 30 2-M8 X 1.25 Depth 15 (Mounting thread) 27.5 104.5 4-M8 X 1.25 Depth 16 (Mounting thread) Bottom through hole dia. 6.8 (Mounting hole) 2-M8 X 1.25 Depth 15 (Mounting thread) 75.5 56.5 37.5 54 80 40 42 60 12 +0.3 +0.1 30 3 42H9 +0.062 Depth 4 0 36 36 56

MHZ2/MHZJ2

9.8 10 MHZ2-10D (N) 17 Double acting Single acting 6 115 30 16 40 MHZ2-16D (N) 10 235 42 20 66 MHZ2-20D (N) Single acting type, normally open 14 430 65 25 104 MHZ2-25D (N) 4 55 6.3 10 MHZ2-10S (N) Normally closed Normally open 6 115 24 16 MHZ2-16S (N) 10 240 28 20 MHZ2-20S (N) 14 435 45 25 MHZ2-25S (N) 12 4 55 10 MHZ2-10C (N) 31 Single acting type, normally closed 6 115 16 MHZ2-16C (N) 56

MIW/MIS

D-F9NW, F9NWV DC (+) Brown Main switch circuit Auto Switch Weights OUT Black Unit : g Model D-F9NW(V) D-F9PW(V) D-F9BW(V) DC () Blue 0.5 7 7 7 Lead wire length (m) 3 34 34 32 5 56 56 52 D-F9PW, F9PWV DC (+) Brown Auto Switch Dimensions Main switch circuit OUT Black D-F9W Mounting screw M2.5 x 4l Slotted screw DC () Blue Indicator light 2 2.7 D-F9BW, F9BWV 22 2.8 2.6 OUT (+) Brown 4 Main switch

MQQ

3.2 52 46 66 10.7 20 5.8 Y Y X X LG 4-LD LX LT 26 3.2 57 57 71 11.2 25 5.8 LS + Stroke 32.5 3.2 64 64 78 11.2 28 7 LZ A + Stroke Front flange type/MQQTF 10, 16, 20 (mm) Bore size (mm) Stroke range (mm) A B FD FT FV FX FV 10 to 40 49.5 31.5 4.5 5.5 30 45 10 FX FT 10 to 60 54 34 6.6 8 39 48 16 FZ L B + Stroke 10 to 60 57.5 37.5 6.6 8 42 52 20 A + Stroke 2-FD 10 to 50,75,100 64 42 5.5 8 48 56

MXW

160 40 40 40 L Data 11 24 24 K A 60 50 32.5 Z A N-M6 x 1 thread depth 12 (N 1) x H G Bottom through-hole 5.1 GG HH H 7 NN-M6 x 1 thread depth 12 depth 5.5 6H9 +0.030 0 Bottom through-hole 5.1 F E 6H9 +0.030 depth 5.5 0 (mm) H HH Z NN N L K J GG G F E Model MXW20-150 48 412 1 6 66 41 169 29 101 216 113 MXW20-175 52 462 1 6 91 66 194 50.5 128.5 237 140 MXW20-200 48 512 1 7 116 91 219 56

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

For details, refer to page 2-3-56. Note 2) Can be changed to side ported configuration. Note 3) An optional specification for special wiring is available to increase the maximum number of stations. Refer to page 2-3-54 for details. Note 4) Except valves. For valve weight, refer to page 2-3-10.

VHK

-12F VHK-03S-06F VHK-03S-08F VHK-03S-10F VHK-03S-12F VHK-04S-10F VHK-04S-12F 18 41 60.4 24.3 36.1 65.2 26.2 39 16.5 3.5 16.8 18.7 11 1.2 31 54 14 32 59 17 6 8 VHK-B1A 44.5 14.5 27 22 16.5 26 9.7 7.2 1 4 22 46 73.8 30.5 43.3 76.3 31.5 44.8 21.5 4 20.8 21.8 14 3.2 49 68 19 63 70 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 17.5 16.1 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

15 20 77 10.5 M10 x 1.5 103 7 17 8 60 9 1/4 15 93 47.5 19 56 75, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 7

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Be sure to take measures to prevent the area around the product from becoming filled with an explosive gas, when using an explosive fluid. 56

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

46 66 10.7 5.8 LS + Stroke LX LZ 25 26 3.2 57 57 71 11.2 5.8 A + Stroke 30 32.5 3.2 64 64 78 11.2 7 40 27 3.2 79 78 95 14.7 8 Front flange type: MQQTF 10, 16, 20 (mm) Bore size (mm) Stroke range (mm) A B FD FT FV FX FV 10 10 to 40 49.5 31.5 4.5 5.5 30 45 FX FT L B + Stroke 16 10 to 60 54 34 6.6 8 39 48 FZ 20 10 to 60 57.5 37.5 6.6 8 42 52 A + Stroke 2-FD 25 10 to 50,75,100 64 42 5.5 8 48 56

End Lock Cylinder Series CBG1

With Mounting Brackets Axial foot type/CBG1L Foot type (mm) With rear lock/H With front lock/R With double locksW Bore size (mm) ZZ LS ZZ LS LS ZZ With rod boot With rod boot Without rod boot Without rod boot With rod boot Without rod boot 142 + l 141 (149) + l 153 + l 20 57 68 121 (129) 122 56 (64) 133 149.5 + l 148.5 (156.5) + l 160.5 + l 25 57 68 126.5 (134.5) 127.5 56 (64) 138.5 149.5

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

Escapements Series MIW/MIS

D-F9NW, F9NWV DC (+) Brown Main switch circuit Auto Switch Weights OUT Black Unit : g Model D-F9NW(V) D-F9PW(V) D-F9BW(V) DC () Blue 0.5 7 7 7 Lead wire length (m) 3 34 34 32 5 56 56 52 D-F9PW, F9PWV DC (+) Brown Main switch circuit Auto Switch Dimensions OUT Black D-F9W Mounting screw M2.5 x 4l Slotted screw DC () Blue Indicator light 2.7 2 D-F9BW, F9BWV 22 2.8 2.6 OUT (+) Brown 4 Main switch