The use of 34 pin connectors allows up to 16 stations with double solenoids.SV4000 series valve, Single, double solenoid and 3 position available, Service life: 50 million cycles or more, Supply pressure: 0.5MPa, Unrestricted mounting orientation SS5V3 MANIFOLD SV3000. TIE ROD. VALVE. SS5V3 NO SIZE RATING. .08725 lb. 21.

The use of 34 pin connectors allows up to 16 stations with double solenoids.SV4000 series valve, Single, double solenoid and 3 position available, Service life: 50 million cycles or more, Supply pressure: 0.5MPa, Unrestricted mounting orientation SS5V3 MANIFOLD SV3000. TIE ROD. VALVE. SS5V3 NO SIZE RATING. .11733 lb. 21.

The use of 34 pin connectors allows up to 16 stations with double solenoids.SV4000 series valve, Single, double solenoid and 3 position available, Service life: 50 million cycles or more, Supply pressure: 0.5MPa, Unrestricted mounting orientation SS5V3 MANIFOLD SV3000. TIE ROD. VALVE. SS5V3 NO SIZE RATING. .19800 lb. 21.

The use of 34 pin connectors allows up to 16 stations with double solenoids.SV4000 series valve, Single, double solenoid and 3 position available, Service life: 50 million cycles or more, Supply pressure: 0.5MPa, Unrestricted mounting orientation SS5V3 MANIFOLD SV3000. TIE ROD. VALVE. SS5V3 NO SIZE RATING. .25300 lb. 21.

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature specifications Indicator Valve size 16 25 40 50 General use Without XLA16-30-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 With XLA16A-30-1-2 XLA25A-30-1-2 XLA40A-30-1-2 XLA50A-30-1-2 High temperature Without XLA16-30-1H-2 XLA25-30-1H-2 XLA40-30-1H-2 XLA50-30-1H-2 With XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 Temperature

15

1 @4 !2 !3 @1 !8 !7 !6 $4 !9 @0 @7 @2 #1 r q w e y t i u !5 !1 !4 #2 #0 !0 @8 @6 #5 #3 @5 $2 #7 #6 With bumper bolt CY1SG/Centralized piping type For 6 For 6 $0 #9 23b 29b $0 #9 #4 $1 $3 With bumper bolt With shock absorber 1502 Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing CY1S Series Component Parts No. No.

VP300/500/700

Sub-plate gasket VP300-2-1P (Rc 1/8) VP300-2-2P (Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) Mounting Screw Tightening Torques M3: 0.6 Nm M4: 1.4 Nm M5: 2.9 Nm VP300-17-1 VP344 SF4--50 VP500-17-1 VP544 VP700-17-1 VP744 How to Order Sub-plate VP 00 2 1 Series Port size Thread type VP744 3/8 1/2 VP544 1/4 3/8 VP344 1/8 1/4 3 5 7 P F N T VP344 VP544

VP4

Effective area (mm2) Port size Weight (kg) Model Type of actuation 3.3 1 1 1 1 1 1 1 120 280 300 120 280 300 110 VP4150 1 4 1 2 Single 9.5 2 position 3 position VP4170 3.8 VP4250 1 4 1 2 Double 10 VP4270 4.4 VP4350 Closed center 4.4 Exhaust center 1 110 VP4450 3-6-2 3 Large Size 5 Port Solenoid Valve Rubber Seal Series VP450/470 How to Use DIN Terminal Precautions 1.

Digital Gap Checker

Description Lead wire color (Output wire color) 1 DC (+) Brown *1 Black 2 N.C. 1 3 DC () Blue *1 4 OUT1 1 DC (+) Brown *1 White 2 N.C. 2 3 DC () Blue *1 4 OUT1 1 DC (+) Brown *1 Gray 2 N.C. 3 3 DC () Blue *1 4 OUT1 1 DC (+) Brown *1 Orange 2 N.C. 4 3 DC () Blue *1 4 OUT1 1 DC (+) Brown *1 Red 2 N.C. 5 3 DC () Blue *1 4 OUT1 1 DC (+) Brown *1 Green 2 N.C. 6 3 DC () Blue *1 4 OUT1 *1:

53

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt fixing brackets 2 pcs.

25

Bar length symbol 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 ZVB IZS40-E3 IZS40-E4 IZS40-E5 2 1 1 1 2 2 2 1 2 Standard model no.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

, 3/4 Rc 1/4 5 Process Pump Air Operated Type (External Switching Type) Series PA3000/5000 How to Order 1 1 PA 3 03 3 PA3000 Body size Connection port size 03 04 06 3 5 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 3/8 standard 1/2 standard Liquid contact body material Thread type 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Nil T F N Rc NPTF G NPT Diaphragm material 1 PTFE T, F,

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

N1: 1/8 N3: 5/32 N7: 1/4 Y Note 2) Note 1) When specifying two or more options, enter symbols in alphabetical order.

44

KFG2L0425-01 KFG2L0425-02 KFG2L0403-01 KFG2L0403-02 KFG2L0604-01 KFG2L0604-02 KFG2L0806-01 KFG2L0806-02 KFG2L0806-03 KFG2L1075-02 KFG2L1075-03 KFG2L1075-04 KFG2L1008-02 KFG2L1008-03 KFG2L1008-04 KFG2L1209-02 KFG2L1209-03 KFG2L1209-04 KFG2L1210-02 KFG2L1210-03 KFG2L1210-04 KFG2L1613-03 KFG2L1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Note 2) Use 1/8" tubing.

Slider Type Ball Screw Drive/11-LEFS Series

1 I/O cable length*1, Communication plug B 15 m* Nil Without controller/driver 6N LECP6/LECA6 (Step data input type) NPN 6P PNP 1N LECP1*2 Nil Without cable (Without communication plug connector)*3 11LEJS * Produced upon receipt of order (Robotic cable only) Refer to the specifications Note 2) on pages 516 and 517. 1 1.5 m 3 3 m*2 (Programless type) NPN 1P PNP 25A5 5 m*2 S Straight type communication

VP3145/3165/3185

S Z Nil 14 1 2 1 20 2 Indicator light is not available for grommet type.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

AS-FG/ASD-FG

1710 1.5 2.7 3.5 4 6 7 10 12 14 12 26 Effective area mm Note) The flow rate values are at a pressure of 0.5MPa and temperature of 20C. 1 Series AS-FG How to Order AS 2 1 1 3 F G 01 06 Body size Option 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Nil S None With sealant M5 and U10/32 are not available with sealant.

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I