Process Gas Diaphragm Valve

Maximum operating pressure 125 psig (0.9 MPa) Size Port AZ3 AZ4 Connections Code 2P 542 2P 2PW 2PW 1/4 inch face seal (Male) 1) 1/4 inch face seal (Female) 1/4 inch tube weld 3/8 inch face seal (Male) 1) 3/8 inch face seal (Female) 3/8 inch tube weld 1/2 inch tube weld MV4 FV4 TW4 MV6 FV6 TW6 TW8 Material Body material 316L SS Code S Ports Code Ports Connection Machined Welded 2P 2PW

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Refer to pages 16-143 to 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-1-11 to 16-1-13 for Precautions on every series. C (COM) A (N.O.) Color of lead wire Black Symbol Contact C Common B (N.C.) A White Normally Open B Red Normally Closed Mounting & Wiring ZSE ISE IFW50--01 to 04/11 to 14/21 to 24 Caution PSE 1.

S Couplers

KKA9S-10M -12M -14M KKA3S-01M-1 -02M-1 -03M-1 KKA4S-02M-1 -03M-1 -04M-1 KKA6S-03M-1 -04M-1 -06M-1 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 1/8 1/8 1/4 1/4 With check valve 1/2 1/2 3/4 3/4 Without check valve 1 1 1 1

SMC Basic Pneumatics

F 3 COMPRESSED AIR THEORY Units Pressur Prooerties of Gases lsothermic change (Boyle's Law) lsobaric change Charles Law Law of Gay Lussac lsochoric change Adiabatic (lsentropic) change Standard Volume Flow Bernoulli's Equation Air Humidity Relative humidity Pressur and Flow Use of the diagram: Formulae: 6 6 I 1 0 1 0 1 1 1 1 1 1 1 1 1 2 1 2 1 2 1 2 1 2 1 3 1 5 1 6 1 6 AE 36 36 5 AIR TBEATMENT

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F 3 COMPRESSED AIR THEORY Units Pressur Prooerties of Gases lsothermic change (Boyle's Law) lsobaric change Charles Law Law of Gay Lussac lsochoric change Adiabatic (lsentropic) change Standard Volume Flow Bernoulli's Equation Air Humidity Relative humidity Pressur and Flow Use of the diagram: Formulae: 6 6 I 1 0 1 0 1 1 1 1 1 1 1 1 1 2 1 2 1 2 1 2 1 2 1 3 1 5 1 6 1 6 AE 36 36 5 AIR TBEATMENT

F/ISE

Proper tightening torque N.m Nominal thread size 1/6 rotation after tightening by hand M5 13.6N.m R 1/4, NPT 1/4, G 1/4, URJ 1/4, TSJ 1/4 3. Apply wrench only to the metal part of the main housing when installing the pressure switch onto the system piping.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

R 1/ 4NPT 1/4G 1/ 4 (with M5 male thread) URJ 1/4TSJ 1/ 4 Port size Leak rate 1 x 10 -5Pa. m 3/ s 1 x 10 -10Pam3/s 1MPa 1MPa 100kPa 100kPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Analog output Output voltage 1 to 5V Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH. H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

HAA

(mm) Voltage(V) 10% 15 2200 300 Single100 55/65 37 5700 350 X 2 3-phase200 132/170 X 2 1.44/1.4 11/2B union 55 22 3300 400 3-phase200 90/130 0.4/0.45 B union 36 Single200 38/46 3-phase200 50/60 Cooling fan (50/60Hz) Power consumption (W) Current (A) 0.46/0.52 0.23/0.26 Rp(PS) Socket 18 0.8/0.9 0.4/0.35 1B union 24 11 2 Port size Weight (kg) 3 4 Compact size and light weight Note 1) Based

Title not found

: Fibre Gasket Supplied) 1/4 Hex 5/16 Hex 1/4 Hex 1/4 Hex Typ. 1/4 Hex 1/4 Hex .135 11 32 1/8 9/32 11/32 9/32 9/32 1/4 1/4 Furnished with O'Ring Assembled Captive Rubber Seal 3/32 20 10-0 Plain Plug 10-32 Plain Plug 10-32 Cap Short 10-32 Cap 10-0-1/4 Plain Plug EX10-10 EX10-10 (1/4) 10-32 Female Thread to Tube 1/4 Hex Typ. 11/32 11/32 Typ. 11/32 11/32 1/4 Hex Typ. 9/16 Typ. 11/32 Typ.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Parallel I/O Connector I/O 2 Wiring example NPN JXC73 PNP JXC83 24 VDC BUSY1 24 VDC +COM3 Load Load 10 BUSY1 10 +COM3 1 1 Load Load BUSY2 30 BUSY2 30 +COM4 +COM4 21 21 Load Load BUSY3 11 BUSY3 11 N.C. 1 N.C. 1 2 2 Load Load BUSY4 31 BUSY4 31 N.C. 1 N.C. 1 22 22 Load Load AREA1 12 AREA1 12 N.C. 1 N.C. 1 Load Load AREA2 32 AREA2 32 3 3 Load Load AREA3 13 AREA3 13 N.C. 1 N.C. 1 23 23 Load Load

CRQ2

Refer to page 11-1-29 for further information.

Support Guide/11-LEFG Series

310 6 2 240 11-LEFG25-S-250 380 257 360 11-LEFG25-S-300 430 307 410 8 3 360 11-LEFG25-S-350 480 357 460 11-LEFG25-S-400 530 407 510 35 528 Support Guide 11-LEFG Series Dimensions: Ball Screw Drive 11-LEFG32-S 42 70 (122) 5H9 (+0.030 0 ) depth 5 4 x M6 x 1 thread depth 9.9 LEF 44 60 LEJ 5.5 5H9 (+0.030 0 ) depth 5 LEL 48 70 A (Table traveling distance) L 61 (62) 10 10 LEM 60 46.8 LEY (60)

HRX-OM-W002

2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 34 24 14 2B 1B 2A 3A 1A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 1 23 2 22 25 26 27 1 22 2 2 7 7 6 2 7 5 (CN5) 1 37 2 38 4 39 3 40 32 3 20 2 20

Model: SV3000, Valve Manifold Stations: 1

Model: 3000 (SV3000), Valve Manifold Stations: 1

HRX-OM-X084

1B 4 1 PT2 2B Blue 7 External temperature sensor 13 ue own Blue 3B 8 14 ue 15 (CN7) Blue 5 7 ue 16 6 Blue 8 Brown 3 4 1 9 Brown Blue Serial communication 9 10 Blue Blue Blue 7 12 2 Blue 9 Blue 11 3 10 11 12 Blue Blue Blue External communication section for customer connection Brown 15 1 Blue 8 Blue 16 9 17 2 Brown Blue 18 10 (CN1) 1/2 Red Brown 19 3 1A White Blue 20 11 2A outlet White Blue

VS 8-2/VS 8-4

VVQC1000-F26-1 VVQC1000-T0-1 VVQC1000-80A-D VVQC1000-74A-1 VVQC1000-L25-0-1 VVQC1000-L25-1-1 VVQC1000-L25-2-1 VVQC1000-M26-1 No.

MLGP

78 14 19 19 6.5 6.8 7.5 27 32 39 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 M8 11 12 39.5 107 14 44 M10 13.5 16.5 46 115 16.5 49 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st 25 25 < st 100 100 < st 200 200 < st 300 300 < st 350 38 47 55 30 40 50 13 9 14 18 104 44 60 70 72 92 110 40 50 63 1/8 1/4 1/4 20 22 22 6.6 8.6 8.6 124 124 128 11 14 14 200 200 200 24

MLGP

78 14 19 19 6.5 6.8 7.5 27 32 39 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 M8 11 12 39.5 107 14 44 M10 13.5 16.5 46 115 16.5 49 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st 25 25 < st 100 100 < st 200 200 < st 300 300 < st 350 38 47 55 30 40 50 13 9 14 18 104 44 60 70 72 92 110 40 50 63 1/8 1/4 1/4 20 22 22 6.6 8.6 8.6 124 124 128 11 14 14 200 200 200 24