Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

5 Port Solenoid Valve

(Not applicable to Gateway Unit) Connector type manifold Connector Wiring Diagram (Mixed wiring) 6 A 4 A 3 A 1 A 5 B 2 B Output The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing manifold configuration. 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 5 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 5 6 7 8 9 10 All kits use multi-pin connectors

Air Fittings Fitting Series For Special Environment

8 / 3 S 6 3 7 0 L R K 1 1 / 6 1 ) 6 4 . 7 1 ( 6 1 . 1 ) 5 . 9 2 ( 4 2 . 1 ) 5 . 1 3 ( 3 3 6 1 . 1 ) 5 . 9 2 ( 8 3 . 1 ) 5 3 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 4 / 1 S 5 3 1 1 L R K 5 . 4 2 1 1 / 6 1 ) 6 4 . 7 1 ( 9 8 . 0 ) 7 . 2 2 ( 7 6 . 0 ) 7 1 ( 0 1 . 1 ) 8 2 ( 8 / 3 S 6 3 1 1 L R K 4 2 . 1 ) 5 . 1 3 ( 4 4 . 1 ) 5 . 6 3 ( 5 . 4 3 8 / 3 2 / 1 S 7 3 1 1 L R K 0 4 . 1 ) 5 . 5 3 ( 4 5 . 1 )

42

Stations (1 to 12) C C kit (Plug lead type) 6.

HRX-OM-Y098

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil . 1-5 1.7.2 Disposal of product . 1-5 1.7.3 Battery . 1-6 1.8 Safety Data SheetSDS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRL-A-20 (Air cooled type) . 2-2 2.3 Function of Parts . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1

ZP

Thread dia. 4, 6 Nylon tube, 4, 6 Urethane tube 4, 6 Nylon tube, 4, 6 Urethane tube 6 Nylon tube, 6 Urethane tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows

DOC1001322

to 3 .5-55 Setting of contact output signal 4 to 6 .5-55 5.4.10 Temperature waveform screen.5-59 Chapter 6 Alarm Notifications and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Operation of this product when an alarm occurs . 6-1 6.3 Troubleshooting . 6-2 6.3.1 Alarm contents, causes, and troubleshooting . 6-2 6.4 Other Errors . 6-5 Chapter 7 Control, Inspection and Cleaning . 7-

C76

1 !2 !3 !4 !5 !6 !7 1 1 1 1 1 1 1 q 2B 2D e r t y u i o !

C76

1 !2 !3 !4 !5 !6 !7 1 1 1 1 1 1 1 q 2B 2D e r t y u i o !

HRX-OM-R016

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Electric

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

1 @1 !8 !5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

Electric Actuator

CNP3 CN2 CN4 Control circuit power supply connector Servo motor power connector 6 Battery 1 26 (14) 1 Battery included.

VQ5000

5 6 7 8 9 1 1 2 3 4 5 6 7 8 9 Double Double Double Double Double Double Double SI unit SI unit Single Single Single Single Single Single Single Single Single Single Single SI unit output no.

Electric Rotary Table

5 @1 !4 e High precision type Basic type !6 !6 u !7 y !1 Component Parts Component Parts No. Material Note Description No.

JXCx-OMY0008

S Standard cable Orange 9 B A-6 Black 8 3 Actuator side Controller side (14.2) (2) 2 1 (8) (1) B1 A1 (14) (18) (17.7) 6 5 (3) 2 1 A6 B6 15 16 L (11) (30.7) 14.2 Actuator cable [8 to 20m] (1) (2) LE-CPSignal name Terminal number Cable color Terminal number A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 8 8m B A-2 Yellow 5 COM-A/COM B-3 Green 3 A 10m COM-B/ A-3 Blue 4 (3) B 15m

Rotary Actuator/Vane Type

1 !1 y u i D-M9m !6 Component Parts No. Description Material No.

SFOD-OMT0010

7 A B-5 Nil Robotic type cable Black 6 A A-5 Orange 9 S Standard cable B B-6 Black 8 B A-6 3 Actuator side Controller side (14.2) (b) 2 1 (8) (a) (14) B A1 (17.7) 6 5 1 (c) 2 1 (18) A6 B6 15 16 L (11) (30.7) 10.4 Actuator cable (8-20m) (a) (b) L E C P Signal name Terminal Cable colour Terminal number number Brown 2 A B-1 Red 1 A A-1 Cable length [L] Orange 6 B B-2 8 8mNote) Yellow 5 B A-2

Vacuum Unit Ejector / Vacuum Pump System

Size Ejector System Vacuum Pump System Port Metric Inch Metric Inch PV 6 1/4 6 1/4 V 6, 8 1/4, 5/16 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 PE EXH Common Port open to atmosphere Note 1) PS 4 5/32 PD Note 2) M3 M3 : Not applicable Note 1) Piping for PE port is available as an option (M3). Refer to page 11. Note 2) A model with PD port (M3) is available as an option. Refer to page 11.

Stainless Steel One-touch Fittings Series KG

A M Weight (g) M5 D L P Nylon Urethane KGU04-01 KGU04-M5 M5 0.8 4 11 20 13 12 22 35 10.4 36 38 40 2.2 2.2 39.5 42 46 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 M5 0.8 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 42.5 45.5 49 51 13 1 8 1 4 3 8 1 8 17 12.8 6 12.8 13.4 13.4 14 17 52.5 55.5 56.5 25.6 17.7 16 24 36 17 15.2 1 4 KGU08-02 8 18.5 15.2

JXCx-OMT0005CN

-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (4) + B-1 4 A-1 5 + B-3 1 A-3 2 8 (14.2) 1 2 (2) B1 A1 17.7 1 (14) A6 B6 5 6 10.2 (3) 1 2 A1 B1 (18) 5.7 A3 B3 4 15 16 (11) 30.7 L 15.4 ()[820m] 1 2 LE CP B 2 A B-1 L 1 A A-1 6 B B-2 8 8m * 5 B A-2 3 COM-A/COM B-3 A 10m * 4 COM-B/ A-3 B 15m * 3 Shield C 20m * 12 Vcc B-4 13 GND A-4 * 7 A B-5 6 A A-5 * 9 B B-6 8 B A-6 3 4