CJ5-S

12.8 14 41 10.5 20 25.6 30 M10 x 1.25 20 12.8 14 IY-G03SUS + 0.5 + 0.3 + 0.058 0 I-G04SUS Y-G04SUS 40 40 22 10 10 18 18 42 14 30 M14 x 1.5 12 14 42 16 22 41.6 30 M14 x 1.5 36 12 14 IY-G04SUS + 0.5 + 0.3 + 0.5 + 0.3 + 0.070 0 I-G05SUS Y-G05SUS 50, 63 50, 63 28 14 14 22 22 56 18 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 M18 x 1.5 IY-G05SUS + 0.070 0 I-G08SUS Y-G08SUS 80 80 38 18 18 28 28

CJ5-S

42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18.3 18.3 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis style (D): CJ5DS Piping port 2-M5 x 0.8 Clevis pin ( ) CDH9 + 0.030 0 Dd9 0.030 0.060 NB GA GB MM CA CB D NA A U BA S + Stroke BB H 0 0.3 CX + 0.2 + 0.1 R Z + Stroke ZZ + Stroke 0 0.3 CD (Cd) A BA BB CA CB CX D GA GB H MM NA NB R S U Z ZZ Bore

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

A B Hs MXY MTS Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Auto Switch Proper Mounting Position Solid state auto switch Bore size (mm) 2-color indication solid state auto switch Reed auto switch D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV A B C A B Hs Hv A B C A B Hs Hv A B C A B Hs Hv 15.5 15 20 15 20 19.5 46 19.5 31.5 46 46 19.5 31.5 18 46 19.5 35.5 42 15.5 13 42 12 17 17 22 17 22 21 47.5

Compact Cylinder with Air Cushion

x 1.5 M14 x 1.5 22 22 42 14 30 12 14 16 30 12 14 36 41.6 Y-G04 10 18 32, 40 42 0.3 0.5 +0.5 +0.3 +0.070 0 14 IY-G05 22 50, 63 I-G05 M18 x 1.5 M18 x 1.5 28 28 56 18 40 16 20 20 40 16 20 44 50.6 Y-G05 14 22 50, 63 56 0.3 0.5 +0.5 +0.3 18 IY-G08 28 80 I-G08 M22 x 1.5 M22 x 1.5 38 38 71 21 50 21 27 23 50 21 27 56 64 +0.070 0 Y-G08 18 28 80 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 22 IY-G10 32

RQ

IY-G04 18 M14 x 1.5 M14 x 1.5 22 22 42 14 30 12 14 16 30 12 14 36 41.6 10 18 42 0.3 0.5 +0.5 +0.3 +0.070 0 50, 63 I-G05 Y-G05 50, 63 14 IY-G05 22 M18 x 1.5 M18 x 1.5 28 28 56 18 40 16 20 20 40 16 20 44 50.6 14 22 56 0.3 0.5 +0.5 +0.3 +0.070 0 80 I-G08 Y-G08 80 18 IY-G08 28 M22 x 1.5 M22 x 1.5 38 38 71 21 50 21 27 23 50 21 27 56 64 18 28 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 100 I-G10 Y-G10

Modular F.R.L. Unit

117.5 11 11 20 50 98 70 316 3.3 280 46 20 196 44.5 84 13 6.4 117.5 11 20 11 50 70 98 319 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of Optional specification Note 2) the piping.

VQ4000

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

High Purity Chemical Valve

37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 30 36 58.5 44 14.5 10 79 80.5 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 84 56 19 19 113.5 115.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PFA 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 484 Series LVH/Integral Fitting Type

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

84 42.6 62.5 72.7 M8 x 1 45 69.1 [76.1] Approx. 300 (Lead wire length) Pg7 80.6 [82.8] 90.6 70.8 [73] 79.7 72.3 65.8 23 15 23 15 23 15 23 15 48 48 48 48 12 12 12 12 20 20 20 20 54.5 54.5 54.5 54.5 57.6 Refer to the page 68 for dimensions with connector cable. 38 Series SYJ700 Manifold Specifications Manifold Specifications Type 20 Type 21 Type 40 Type 41 Type 42 For internal pilot Model

ZR

ZF ZP ZCU D1 D2 D3 ZR1 1-K1M18 20 AMJ 10.2 Misc.

Process Valve Series VNA

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 75 125.5 52 63 72.5 80.5 80 84.5 124 144.5 26 24.3 2.3 55 42 4.5 25 28 34 14 60.5 73 1 84 100 92 108 135.5 137 153 156 172 84 90 62 72 80 90 89 95 93.5 99.5 31 36 28.3 33.3 2.3 2.3 50 60 5.5 6.5 30 35 35 40 43 49 17.5 20 151.5 Port

LEJ-OM002xx

[LECSA] LEJS40 LEJS63 LEJB40 LEJB63 Series Lead symbol H A B H A B T Lead 24 16 8 30 20 10 27 42 Parameter Para.

Electric Slide Tables

Motor cable 20 20 24 24 20 Lock cable 20 15 15 Dimensions (mm) Model L C D E F G H 144.5 J 46 LES25L-30133.5 105 2 46 4 48 LES25L-502 84 84 42 159.5 131 170.5 6 LES25L-75165 2 112 112 204.5 6 55 193.5 LES25L-10056 112 8 50 266.5 238 4 277.5 LES25L-125263 4 59 118 302.5 8 55 291.5 LES25L-15062 124 62 316.5 288 4 327.5 8 20 Series LES Dimensions: In-line Motor Type/D Type LES8D 3H9 (+0.025

MXS Series Air Slide Table

Z ZZ (NN-1) x H G H 11 5.5 5.5 11 A B 3.2 6.5 7 7 12 4 NN-M4 x 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5 83.5 99.5 M 42 52 62 84 100 ZZ 48 58

energy saving effect

-A-20/40HRSH150-W-20/4025 25 Facility water temperature 32C Ambient temperature 32C 20 20 Cooling capacity [kW] Cooling capacity [kW] 15.7 15.7 15 15 Ambient temperature 43C 10 10 Facility water temperature 40C Ambient temperature 45C 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH200-A-20/40HRSH200-W-20/4030 30 Ambient

Cylinder with Lock

no. a (Max.) b c (Min.) d e f H9 (Hole) f h11 (Shaft) l1 32 GKM10-20 20 10+0.5 +0.15 20 40 M10 x 1.25 10 10 52 40 GKM12-24 24 12+0.5 +0.15 24 48 M12 x 1.25 12 12 62 50, 63 GKM16-32 32 16+0.5 +0.15 32 64 M16 x 1.5 16 16 83 80, 100 GKM20-40 40 20+0.5 +0.15 40 80 M20 x 1.5 20 20 105 * Supplied with clevis pin and clevis pin bracket Rod end: KJ (ISO 8139) l l3 [mm] Bore size Part no. b1 h12

5 Port Solenoid Valve

mmm J kit: PC wiring compatible flat ribbon cable 325 20 Max. 16 stations T kit:Terminal block box 660 20 Max. 20 stations 455 Note 4) L kit: Lead wire 20 Max. 24 stations M kit: Circular connector 390 20 Max. 24 stations M5 thread C2 (2) C3 (3.2) C4 (4) N1 (1/8") N3 (5/32") C kit: Connector 115 20 Max. 20 stations SS0755-mCmC (Manifold pitch: 8.5) Rc1/8 S kit: Serial transmission (EX510)

Compact Cylinder with Air Cushion Series RQ

Y-G04 32, 40 10 18 IY-G04 42 14 22 30 M14 x 1.5 12 14 16 22 30 M14 x 1.5 12 14 36 41.6 10 18 42 +0.5 +0.3 +0.070 0 50, 63 I-G05 Y-G05 50, 63 14 22 IY-G05 56 18 28 40 M18 x 1.5 16 20 20 28 40 M18 x 1.5 16 20 44 50.6 14 22 56 +0.5 +0.3 +0.070 0 80 I-G08 Y-G08 80 18 28 IY-G08 71 21 38 50 M22 x 1.5 21 27 23 38 50 M22 x 1.5 21 27 56 64 18 28 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 100 I-G10 Y-G10

Guide Cylinder/Compact Type Series MGC

160 176 110 125 9 9 88 165 M8 37 160 1/8 86.5 30 62 4 142 19 19 190 210 115 135 11 12 96 200 42 194 1/8 95 35 67 4 M10 GL GQ GR I J K L M N O P Note 2) Q R S T U V W Bore size (mm) 20 25 32 40 5.5 4 4 35 60 80 105 50 25 M6 x 1 M5 x 0.8 94 12 26 16 112 53 50 9 7 7 40 70 95 125 60 32 M5 x 0.8 104 12 31 20 132 63 60 M8 x 1.25 9 7 7 40 70 95 125 60 32 1/8 104 12 38 20 132 63 60 M8 x 1.25 11 8

21

14 32 16 13.5 8 42 8 10 46.4 M14 x 1.5 M32 x 2 Long Male Rod End P S ZZ Boss-cut Female Rod End Bore size 20 25 32 40 Bore size (mm) (mm) Bore size (mm) ZZ A1 8 H MM M4 x 0.7 ZZ 88 A 18 AL H 41 ZZ 109 Bore size 20 25 32 40 55 99 M5 x 0.8 20 25 32 40 20 25 32 40 56 103 86 M5 x 0.8 20 15.5 Rc1/8 62 109 90 8 22 20 M5 x 0.8 89 19.5 45 114 Rc1/8 67 125 96 12 22 20 M6 x 1 95 19.5 45 120 109 13