CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

CLQ

A A1 E1 L1 NZ 16 16 20 22 28 38 44 34 41 42 56 71 79 25 30 30 40 50 55 20 25 32, 40 50, 63 80 100 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 34 41 42 56 71 79 25 30 30 40 50 55 IY-G02 16 20 IY-G03 20 22 IY-G04 36 28 IY-G05 44 38 IY-G08 56 44 IY-G10 Knuckle pin and snap ring are included. 64 Knuckle Pin (Common with double clevis pin

Thermo-chiller

x Width 925 x Depth 955] HRS150-W -20-A 459 [208] HRS150-A-20 4.

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

HRS100/150

[C] HRS100-W-20/40(60 Hz) HRS100-W-20/40(50 Hz) 14 14 Facility water temperature 32C 12 12 Cooling capacity [kW] Cooling capacity [kW] Facility water temperature 32C 10 10 8 8 6 6 4 4 Facility water temperature 40C Facility water temperature 40C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRS150-A-20/40(50 Hz) HRS150-

0.55

Unless otherwise indicated, dimensions are the same as Grommet (G). 20 Series VF3000/5000 Dimensions: Series VF3000/Base Mounted (mm) 2-position double Grommet (G) (H): VF3240-; ;;1; G H 02 03 33 28 1/4, 3/8 [4(A), 2(B) port] 13 22 Manual override 50 20 36 1.7 4A 2B 5EA 26.4 35 42 + 3EB 3EB 1P 5EA 1.7 2 x 4.3 (Indicator light) (For mounting) Grommet (G) (H) DC without light/surge voltage

Manifold Specifications

Rc 1/8 VZS How to Order Type 42 VFS VV5Z5 05 C6 42 1 VS4 P, R port thread type A, B port size Stations VQ7 C6 One-touch fitting for 6 C8 One-touch fitting for 8 02 2 stations 1(P) port Rc 1/4 Rc Nil G F B7 One-touch fitting for 1/4" 20 20 stations EVS N NPTF T NPT B9 One-touch fitting for 5/16" 4(A), 2(B) port 3/5(R) port Rc 1/4 C6, C8 VFN Note) For more than 8 stations, supply air to both

ZP

1.8 ZPT50 50 53 7.5 19.5 25.5 51.5 12.5 16 18 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5 x 0.8 H: M6 x 1 Y Model A B E F E F C D ZPT40D 40 43 29 35.5 3 25 61 4.5 15 51 17 ZPT10D 16 18 16 20 42 25 47 7 21 ZPT16D 10 12 15 20 41 25 46 6 20 13-11-4 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer Connection Male thread Pad Form Bellows Vacuum

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

/25 CY1H15/20/25 CY1H15/20/25 CY1H15/20 CY1H15/20 CY1H25 CY1H15/20 CY1H25 0.08 0.03 CY1H25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) CY1HT25/32 CY1HT25/32 CY1HT25/32 0.05 CY1HT25 CY1HT25 CY1HT32 CY1HT25 CY1HT32 0.03 Deflection (mm) Deflection (mm) 0.04

SMC Pneumatic Clean Series

FC 4.5 5.5 5.5 FT 1.6 2.3 2.3 FX 24 33 33 FZ 32 42 42 S 9.5 9.5 7 T 3 20.5 20.5 24.5 5 5 12 28 28 28 17 17 20 16 10 6 15 15 15 18.3 15 15 18.3 12 20 14 5 4 8 8 8 55 54 57.5 83 82 85.5 5 5 M10 x 1.0 M4 x 0.7 M5 x 0.8 M12 x 1.0 With air cushion With air cushion type is not available for 21/ 22CJ2.

Cylinder with Lock

20 25 30 32 40 40 52 52 9 9 11.5 13.5 13.5 12 12 15 18 18 60 70 86 102 116 80 90 105 130 150 42 50 59 76 92 100 110 130 160 180 85 95 102 123 144 15 17 17 21 21 50 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 51 58 58 71 72 8 11 11 13 16 56 65 79.5 93.5 With Bellows (mm) (mm) ZZ (Single side) 263 292 306 369 399 ZZ (Both sides) Bore size (mm) Stroke range (mm) 40 50 63 80

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Plate Cylinder

20 12 14 16 20 20 30 314 265 216 166 117 68 491 OUT 15 42 521 440 360 280 199 119 804 OUT 24 Spring return 56 824 698 573 447 321 195 1257 OUT 30 76 1327 1131 935 738 542 346 1963 OUT 47 113 2069 1757 1446 1134 822 510 3117 OUT 61 30 235 197 159 121 83 46 378 IN 15 42 413 348 283 218 153 88 650 IN 24 Spring extend 56 683 578 472 366 261 155 1056 IN 30 76 1107 942 777 613 448 283 1649 IN

CG1

TU TV TW TX TY TZ 8d9 10d9 12d9 14d9 16d9 18d9 18d9 22d9 18.1 20.7 23.6 27.3 29.7 34.3 35.8 39.8 49.4 58.4 72.4 90.4 42 42 48 56 64 74 72 93 16 20 22 30 36 46 85 100 28 28 28 30 36 46 45 60 38.3 42.1 53.8 64.6 79.2 97.2 110 130 CG-020-24A CG-025-24A CG-032-24A CG-040-24A CG-050-24A CG-063-24A CG-080-24A CG-100-24A 20 25 32 40 50 63 80 100 (mm) Part No.

Best Pneumatics Vol. 14

20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

10

For Saturated Steam (664)(183) Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] (663)(179) 0.8 (662)(174) (661)(170) Subsonic Critical pressure 0.9 0.6 (660)(164) 0.7 0.8 (658)(158) Sonic 0.4 0.6 (656)(151) 0.5 (654)(143) 0.4 (650)(133) 0.2 0.3 0.2 (646)(120) 0 0.1 2 5 10 15 25 20 3 10 15 20 25 45 40 35 30 4 20 10 30 40 50 60 5 30 40 50 60 70 80 20 7 20 30

Vacuum Unit

Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise

Cylinder with Lock

Bore size B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 32 219 40 237 50 268 63 280 80 351 100 371 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 213 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 231 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 260 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 272 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10

Air Cylinder

G 4 x J 4 x FD G Width across flats B1 RY FB FY D E e C B H1 N RT N FT AL C B f L 10.2 A K h + L S + Stroke H M FX FZ ZZ + L + Stroke ZZ + Stroke (mm) Bore size Stroke range (mm) A AL B B1 C D E FB FD FT FY FZ G H1 J K KA M FX (mm) 40 50 63 80 501 to 800 30 35 35 40 40 27 32 32 37 37 60 70 85 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 71 88 9 9 12 20 23 28 29 42 58 64 84

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

the 3 way valve flows out the manifold B port. 42