Specification: 21 (Copper, Fluorine & Silicon-free + Low Partical Generation, Relief Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 10mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 20mm

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating) / Clean Room, Operating Pressure(MPa): 0.1 to 1, Specification: Standard, Port thread type

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification

CATALOG

~ 500 27 30 60 44 16 32 10 15 15 M 8 x 1.25 6 11 M 14 x 1.5 27 1/4 84 8 50 ~ 600 20 ~ 600 32 35 70 52 20 40 10 17 17 M 8 x 1.25 7 11 M 18 x 1.5 30 3/8 90 0 63 ~ 600 20 ~ 600 32 35 85 64 20 40 10 17 17 M 10 x 1.25 7 14 M 18 x 1.5 31 3/8 98 0 80 ~ 750 20 ~ 750 37 40 102 78 25 52 14 21 21 M 12 x 1.75 11 17 M 22 x 1.5 37 1/2 116 0 100 ~ 750 20 ~ 750 37 40 116 92 30 52 14 21 21 M 12 x 1.75 11

Table of Contents

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

Fluoropolymer Piping Equipment

LQ1T3A-R5 1/4" 3/8" 3/8" 5 20 20 20 9 18 17 17 17 36.5 36.5 36.5 23 23 23 3.6 LQ1T3A-R7 1/4" 1/4" 3/8" 3.6 LQ1T4A-R2 1/2" 1/4" 1/2" 6 24 15 24 9 18 21 14 21 43 33 43 28 16.5 28 3.6 LQ1T4A-R4 1/2" 1/8" 1/2" 1.8 LQ1T4A-R5 3/8" 1/2" 1/2" 24 21 43 28 5.8 LQ1T4A-R6 1/4" 1/2" 1/2" 7 20 29 29 14 28 17 26 26 44 54 54 23 39 39 3.6 LQ1T4A-R7 3/8" 3/8" 1/2" 6 24 24 24 9 18 21 21 21 43 43 43 28 28 28

Table of Contents

20 25 25 28 36 24 17.5 25 20 18.5 21 16 16 20 20 25 30 Grooves (Except 12, 16, 20, 25) (mm) Use grooves section a and section b in the figure below of the cylinder body for firmly fixing in the following case.

A

500 27 30 60 44 16 32 10 15 15 M 8 x 1.25 6 M 14 x 1.5 27 1/4 84 8 50 ~ 600 20 ~ 600 32 35 70 52 20 40 10 17 17 M 8 x 1.25 7 M 18 x 1.5 30 3/8 90 0 63 ~ 600 20 ~ 600 32 35 85 64 20 40 10 17 17 M 10 x 1.25 7 M 18 x 1.5 31 3/8 98 0 80 ~ 750 20 ~ 750 37 40 102 78 25 52 14 21 21 M 12 x 1.75 11 M 22 x 1.5 37 1/2 116 0 100 ~ 750 20 ~ 750 37 40 116 92 30 52 14 21 21 M 12 x 1.75 11 M 26 x 1.5 40

Table of Contents

+ 0.070 0 I-G05SUS Y-G05SUS 50, 63 50, 63 28 14 14 22 22 56 18 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 M18 x 1.5 IY-G05SUS + 0.070 0 I-G08SUS Y-G08SUS 80 80 38 18 18 28 28 71 21 50 M22 x 1.5 21 27 71 23 35 64 50 56 21 27 M22 x 1.5 IY-G08SUS + 0.5 + 0.3 + 0.084 0 I-G10SUS Y-G10SUS 100 100 45 22 22 32 32 79 21 55 M26 x 1.5 24 31 79 24 40 72 55 64 24 31 M26 x 1.5 IY-G10SUS Knuckle Joint

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available, SYJ 5 port valve manifold, 4/5 PORT SOLENOID VALVE, 455 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available, SYJ 5 port valve manifold, 4/5 PORT SOLENOID VALVE, VVD, 756 lb

Table of Contents

36 20 21 11.4 3/16" 17 (17.5) 1/4 AS221F-02-07 AS321F-02-06 18.5 6 12.8 27.8 34.5 35.4 29.4 40.4 25.2 34 17 60 39.3 13.2 18.5 34.4 1/4" AS221F-02-09 AS321F-02-08 21 8 15.2 36.4 20 41 27.2 36 18.5 63 15.2 29.5 5/16" 1/4 23 21.8 48.8 37.8 42.8 43.8 AS221F-02-11 AS321F-02-10 21 18.5 43.2 20 10 33.9 43.3 17.9 36 21 67 31.8 3/8" AS321F-02-07 AS321F-02-12 20.9 12 44.3 17 39.3 27.8 22 69 32.8 60

Compact Hydraulic Cylinder

23 17.5 19.5 22.5 24.5 13 15 11 13 17 19 11 13 15 17 11.5 13.5 14 16.5 11 13 63 23.5 24.5 20 21 25 26 13.5 14.5 19.5 20.5 13.5 14.5 17.5 18.5 13.5 14.5 80 23.5 26.5 20 23 25 28 15.5 18.5 13.5 16.5 19.5 22.5 13.5 16.5 17.5 20.5 14 17 16.5 20 13.5 16.5 100 27 31 23.5 27.5 28.5 32.5 19 23 17 21 23 27 17 21 21 25 17.5 21.5 20 24.5 17 21 Note 1) The auto switches listed below cannot be mounted

F

KQR06-12 12.8 42 20 17 13.1/13.1 5/16 9.5(3/8) KQR09-11 16 45.5 25 18.5 6 8 10 KQR08-10 15.2 41 20 18.5 26.1/18 5/16 12.7(1/2) KQR09-13 16 42.5 21 18.5 6 8 12 KQR08-12 15.2 42 20 18.5 26.1/18 3/8 12.7(1/2) KQR11-13 48 44.5 22.5 21 7 10 12 KQR10-12 17 42 20 21 41.5/32.8 10 16 KQR10-16 21 50.5 26.5 21 41.5/(29.5) 12 16 KQR12-16 21 50.5 26.5 22 58.3/(46.1) Note: ( ) Dimensions are for Soft Nylon

Compact 5-Port Solenoid Valve

18.5 23 21 19.5 24 22 20.5 18.5 23 21.5 19.5 18 22.5 Fittings, Replacement Parts, Tools Manifold Options Specific Product Precautions n L 17 18 19 20 21 22 23 24 L1 363 379 395 411 427 443 459 475 L2 325.5 341.5 357.5 373.5 389.5 405.5 421.5 437.5 L3 398 410.5 435.5 448 460.5 473 498 510.5 L4 387.5 400 425 437.5 450 462.5 487.5 500 L5 20.5 19 23.5 21.5 20 18 22.5 21 26 JSY1000/3000/5000

Air Slide Table

20 58 20 30 6.5 58 12 40 6.5 58 11 50 6.5 58 11 75 12 58 21 100 21 88 21 125 7 88 21 150 33 88 21 Dimensions other than those shown below are the same as the standard product.

KQ2

thread (With sealant) Connection thread 5.56 21 5.7 3 8 6.35 21 6.5 7.94 22 8 20 1 2 9.53 22 9.6 21.3 Reference dimensions after NPT thread installation.

Compact Cylinder

2 21 70 60.5 3.5 66.5 38 31 3.5 34.5 38 30.5 3.5 34.5 M6 x 1 9 M3 x 0.5 6 M5 x 0.8 7 M5 x 0.8 7 M8 x 1.25 13 M8 x 1.25 13 M10 x 1.5 15 M10 x 1.5 15 M20 x 2.5 27 M20 x 2.5 27 With Auto Switch 12 20 32 40 50 63 80 100 Bore size Stroke (mm) 10 20 30 48 40.5 3.5 44.5 M6 x 1 9 10 20 30 56.5 50 3.5 53 M6 x 1 9 10 20 30 57.5 50.5 3.5 54 10 20 30 63 52 3.5 59.5 10 20 30 70.5 61 3.5 67 M16 x 2 21

KJ

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

1

CJ1 Series MB Series MB1 Width across flats MA CJP MM Width across flats MA ZZ MM ML MH MI Bore size (mm) MK MA ZZ MM ML MH MI MK Bore size (mm) MA 32 40 50 63 80 100 175 10 18 44 24 10 21 32 40 50 63 80 100 175 10 18 44 24 10 21 CJ2 M I 183 14 20 48 32 12 27 183 14 20 48 32 12 27 205 18 21 53 38 15 32 205 18 21 53 38 15 32 ML + Adjustment CM2 Stroke MK 205 18 21 53 38 15 32 205 18 21 53