0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

Digital Flow Switch (Integrated display type) ( compatible)

Setting of switch operation 2_P/2_N (Page 46) (Display type) Setting of Add dEC1 dEC2 (Page 49) 3. Input of set values Setting of Setting of tP2L/tn2L Setting of Setting of tP_2/tn_2 P2L/n2L Setting of P_2/n_2 P2H/n2H P2/n2 tP2H/tn2H H_2 tH_2 WH2 (Page 49) tWH2 (Page 46) (Page 46) (Page 48) (Page 48 4.

Series VQ Metal Seal/Rubber Seal Body Ported

185.5 77.5 88 162.5 173 67 77.5 150 160.5 56.5 67 150 160.5 25 35.5 112.5 123 46 56.5 137.5 148 L1 L2 (L3) (L4) 35.5 46 125 135.5 VQZ VQD Dimensions/Top entry connector [PU] (mm) n L 1 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 VZS 250 260.5 237.5 248 225 235.5 212.5 223 200 210.5 187.5 198 187.5 198 175 185.5 162.5 173 150 160.5 137.5 148 125 135.5 125 135.5 112.5 123 100 110.5 L3 L4 87.5 98

o

L Type Plug Connector (L) 10-32 Nom (M5) 10-32 Nom (M5) 4 porls g .g 3 1 1 . 8 1 I (300)r I 2.0i (St ) -9 :ions (n 7 6 10 11 12 13 14 'i6 17 18 20 L1 1.40 11.41 (35.s) (46) 2.22 2.& (56.5) (67) 3.O5 3.46 (Be) 3.84 1 4.2S (e8.5) oos) 4.70 (119.5) 512 15.53 (130) (140.5) 5.94 (1511 (161.5) \172) 7.19 7.60 (182.s) (1S3)a.ol (203.5) 8.43 \7t4) 8.84 Q24.5) L2 1.12 {a.r) 1.54 (30) 1.95 (4e.5)2.36

o

L Type Plug Connector (L) 10-32 Nom (M5) 10-32 Nom (M5) 4 porls g .g 3 1 1 . 8 1 I (300)r I 2.0i (St ) -9 :ions (n 7 6 10 11 12 13 14 'i6 17 18 20 L1 1.40 11.41 (35.s) (46) 2.22 2.& (56.5) (67) 3.O5 3.46 (Be) 3.84 1 4.2S (e8.5) oos) 4.70 (119.5) 512 15.53 (130) (140.5) 5.94 (1511 (161.5) \172) 7.19 7.60 (182.s) (1S3)a.ol (203.5) 8.43 \7t4) 8.84 Q24.5) L2 1.12 {a.r) 1.54 (30) 1.95 (4e.5)2.36

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

L Type Plug Connector (L) 10-32 Nom (M5) 10-32 Nom (M5) 4 porls g .g 3 1 1 . 8 1 I (300)r I 2.0i (St ) -9 :ions (n 7 6 10 11 12 13 14 'i6 17 18 20 L1 1.40 11.41 (35.s) (46) 2.22 2.& (56.5) (67) 3.O5 3.46 (Be) 3.84 1 4.2S (e8.5) oos) 4.70 (119.5) 512 15.53 (130) (140.5) 5.94 (1511 (161.5) \172) 7.19 7.60 (182.s) (1S3)a.ol (203.5) 8.43 \7t4) 8.84 Q24.5) L2 1.12 {a.r) 1.54 (30) 1.95 (4e.5)2.36

C76

+0.036 0 10 +0.043 0 12 30 0 0.033 M30 x 1.5 G 1/8 30 58 23.8 10 M8 x 1 9 32 40 12.2 M10 x 1.5 38 0 0.039 M38 x 1.5 G 1/4 35 69 28.3 12 M10 x 1 12 14.2 M12 x 1.75 With Rod Boot (mm) AM C e f K KK Item h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12

C76

Construction 6-10-46

LEC-OM02704CN

12 .2 12.1 .2 12.2 .3 12.3 .5 12.3.1 .5 12.3.2 .6 12.4 .7 12.5 .8 12 1 12 12 12.1 12.11(A50) 2(A51) 70% 04575 1000 1000 100 100 10 10 [s] [s] 1 1 0.1 0.1 0 50 150 200 250 300 100 0 50 150 200 250 300 100 ()[] ()[] LECSC-S5 LECSC-S7, LECSC-S8 . ()30r/min100% 12.1 12 2 12 12.2 (1) 12.1 12.1 1 (2)[W] (1) [m2] [kVA] LECSC-S5 LE-S5LE-S60.3 25 15 0.5 LECSC-S7 LE-S70.5 25 15

CG5-S

10 AS4311FG-04-10 AS3311FG-02-12 -03-12 AS4311FG-04-12 R 1/4 10 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 12 In-line Type AS-FG JIS symbol SUS303 Model Model In-line type Applicable tubing O.D.

Speed Controller with Indicator

12 18.5 29.7 40.9 34.5 17 59 AS321FS-G03-06 6 1/4 21 16.6 45 AS321FS-G03-08 8 13.2 22.7 33.9 14.2 46 AS321FS-G03-10 10 15.9 26.7 37.9 28 15.6 47 AS321FS-G03-12 12 18.5 29.7 40.9 26.8 17 49 AS421FS-G04-10 10 1/2 27 15.9 18.8 27.4 41.8 36.2 64.1 62.5 55.1 53.5 15.6 26 29 10 19 80 AS421FS-G04-12 12 18.5 30.8 45.2 35.1 17 82 AS421FS-G04-16 16 23.8 34.8 49.2 32.7 20.6 86 10.4 21.8 33 28.7 55.4

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Note 12) For the manufacture of intermediate strokes, please contact SMC.

A

2 (N)AF900 200 488 46 2 H O W T O O R D E R A I R F I LT E R (N)AF800-12 (1 14) (N)AF800-14 (1 12) (N)AF900-20 (2) H O W T O O R D E R A I R F I LT E R W I T H A U T O D R A I N (N)AF811-12 (1 14) (N)AF811-14 (1 12) (N)AF911-20 (2) ACCESSORIES A I R F I LT E R Filter Elements 11345-5B NAF800 11352-5B NAF900 Note) (N)AF AF Japanese NAF North American Courtesy of Steven Engineering, Inc. !

SYJ300/500/700

D: Push-turn locking slotted type E: Push-turn locking lever type (With gasket and screws) Body option Nil: Individual pilot exhaust type Electrical entry Grommet L plug connector 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12 VDC/ 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC M plug connector DIN terminal M8 connector R port P, E port M: Common exhaust for the pilot and main valve MN: Without

Vacuum Unit

VDC to 24 VDC Black OUT + (Analog output) 1 k 12 VDC to 24 VDC rown DC(+) Brown DC(+) Brown DC(+) Black OUT + White LED (Green) Load 12 VDC to 24 VDC For release valve (, +) Load Main circuit Main circuit Load 12 VDC to 24 VDC Black Brown Black Brown + + OUT1 12 VDC to 24 VDC Load 12 VDC to 24 VDC Black OUT 1 Black OUT 1 Load + + 12 VDC to 24 VDC ack OUT + + + Load White OUT 2 White

Integrated Controller

Wiring Examples Operation Data Setting Options Specific Product Precautions EQFS25RH Motor option: With lock (132.5) (16) (2) 3 H9 (+0.025 0 ) depth 15 (Depth of counterbore 12) (172.5) (2) (16) Body mounting reference plane (B dimension range)1 4 x M5 x 0.8 thread depth 20.5 (Depth of counterbore 12) 128 38 3.5 50 22.5 (Depth of counterbore 12) 3 H9 (+0.025 0 ) depth 15 45 64 (102) L +

Vacuum Pad

Buffer Assembly Part No. 10 Series ZP3 4 to 8 Pad diameter Dimensions/With Adapter: Vacuum Inlet Vertical Bellows Pad type ZP3-T04B;-A10-B5 [Weight: 11.0 g] ZP3-T06B;-A10-B5 [Weight: 11.0 g] ZP3-T08B;-A10-B5 [Weight: 11.1 g] M10 x 1 M10 x 1 M10 x 1 Width across flat 14 Width across flat 14 Width across flat 14 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 8 3 3 3 3 8 3 3 12 12 12 14 14 14 22 22 22 8 2

Vacuum Pad

Buffer Assembly Part No. 10 Series ZP3 4 to 8 Pad diameter Dimensions/With Adapter: Vacuum Inlet Vertical Bellows Pad type ZP3-T04B;-A10-B5 [Weight: 11.0 g] ZP3-T06B;-A10-B5 [Weight: 11.0 g] ZP3-T08B;-A10-B5 [Weight: 11.1 g] M10 x 1 M10 x 1 M10 x 1 Width across flat 14 Width across flat 14 Width across flat 14 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 8 3 3 3 3 8 3 3 12 12 12 14 14 14 22 22 22 8 2

Vacuum Pad

Buffer Assembly Part No. 10 Series ZP3 4 to 8 Pad diameter Dimensions/With Adapter: Vacuum Inlet Vertical Bellows Pad type ZP3-T04B;-A10-B5 [Weight: 11.0 g] ZP3-T06B;-A10-B5 [Weight: 11.0 g] ZP3-T08B;-A10-B5 [Weight: 11.1 g] M10 x 1 M10 x 1 M10 x 1 Width across flat 14 Width across flat 14 Width across flat 14 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 8 3 3 3 3 8 3 3 12 12 12 14 14 14 22 22 22 8 2

LVQ

Type of fitting Tubing size Symbol Nil 1 Symbol 03 04 05 06 07 06 08 10 07 11 Symbol 10 12 11 13 12 13 19 19 25 Tubing O.D. 1/8" (3) 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" Tubing O.D. 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1". 25 Applicable fitting LQ2 LQ1 Body class Applicable fitting Body class Applicable fitting 4 LQ1,LQ2 2 Body class LQ2 Symbol 2 3 4 5 6 LQ2 Applicable fitting Body class